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Volumn 70, Issue 24, 1997, Pages 3311-3313

Two-dimensional micromechanical bimorph arrays for detection of thermal radiation

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0346774693     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119147     Document Type: Article
Times cited : (75)

References (11)
  • 9
    • 0004038250 scopus 로고
    • Addison-Wesley, Reading
    • E. Hecht, Optics, 2nd ed. (Addison-Wesley, Reading, 1987), p. 445.
    • (1987) Optics, 2nd Ed. , pp. 445
    • Hecht, E.1
  • 10
    • 85033320254 scopus 로고    scopus 로고
    • note
    • We have analyzed the mechanical bending of a bimorph spiral using ANSYS simulation software.
  • 11
    • 85033306332 scopus 로고    scopus 로고
    • note
    • 2 and is less than 2 μm thick. Increasing the thickness will improve both the temperature and mechanical stability of the support grid. The optical reflectivity of the grid can be reduced by depositing metal only on the spirals.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.