Two-dimensional micromechanical bimorph arrays for detection of thermal radiation

Applied Physics Letters

Volumn 70, Issue 24, 1997, Pages 3311-3313

  Manalis, S R ^a   Minne, S C ^a   Quate, C F ^a   Yaralioglu, G G ^b   Atalar, A ^b  

^a STANFORD UNIVERSITY   (United States)

^b BILKENT UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346774693     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119147     Document Type: Article

References (11)

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9. E. Hecht, Optics, 2nd ed. (Addison-Wesley, Reading, 1987), p. 445.
10. We have analyzed the mechanical bending of a bimorph spiral using ANSYS simulation software.
11. 2 and is less than 2 μm thick. Increasing the thickness will improve both the temperature and mechanical stability of the support grid. The optical reflectivity of the grid can be reduced by depositing metal only on the spirals.