Fabrication and characterization of nanoresonating devices for mass detection

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 2, 2000, Pages 612-616

  Davis, Z J ^a   Abadal, G ^a,b   Kuhn, O ^a   Hansen, O ^a   Grey, F ^a   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; MASKS; NANOSTRUCTURED MATERIALS; PHOTOLITHOGRAPHY; SUBSTRATES;

CANTILEVER RESONANCE; NANORESONATING DEVICES;

RESONATORS;

EID: 0034156464     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591247     Document Type: Article

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