Polymer-based stress sensor with integrated readout

Journal of Physics D: Applied Physics

Volumn 35, Issue 21, 2002, Pages 2698-2703

  Thaysen, J ^a,b   Yalcinkaya A D ^b   Vettiger, P ^c   Menon, A ^b  

^a Cantion AS   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; GOLD; MECHANICAL VARIABLES MEASUREMENT; MOLECULAR DYNAMICS; ORGANIC POLYMERS; PIEZOELECTRIC MATERIALS; PROBES; READOUT SYSTEMS; SENSITIVITY ANALYSIS; STRAIN MEASUREMENT; STRESSES;

CHIP FABRICATION TECHNOLOGY; PIEZORESISTIVE MATERIALS; POLYMER BASED STRESS SENSOR;

SENSORS;

EID: 0037038691     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/35/21/302     Document Type: Article

References (12)

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