Interdigital cantilevers for atomic force microscopy

Applied Physics Letters

Volumn 69, Issue 25, 1996, Pages 3944-3946

  Manalis, S R ^a   Minne, S C ^a   Atalar, A ^a,b   Quate, C F ^a  

^a STANFORD UNIVERSITY   (United States)

^b BILKENT UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001520372     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117578     Document Type: Article

References (20)

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15. Multi-mode Head, Digital Instruments, 520 E. Montecito St, Santa Barbara, California 93103.
16. 0 is the resonant frequency (50 kHz), and B is the bandwidth (1 kHz). This equation yields a value of 0.005 Å.
17. D. Sarid, Scanning Force Microscopy (Oxford University Press, New York, 1991).
18. -19 C), R is the responsivity of the detector (∼0.5 A/W for silicon), P is the laser power (225 μW), and B is the bandwidth (1 kHz).
19. S. Morita, S. Fujisawa, and Y. Sugawara, Surf. Sci. Rep. 23, (1996).
20. 4 cantilevers have force constants below 0.01 N/m and can be operated with minimal setpoint deflection.