Development of a piezoelectric self-excitation and self-detection mechanism in PZT microcantilevers for dynamic scanning force microscopy in liquid

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 1559-1563

  Lee, Chengkuo ^a,b,c   Itoh, Toshihiro ^a   Ohashi, Takahiro ^a,d   Maeda, Ryutaro ^b   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^d TOTO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL MATERIALS; DAMPING; IMAGING TECHNIQUES; MICROSCOPIC EXAMINATION; NATURAL FREQUENCIES; ORGANIC COMPOUNDS; OSCILLATORS (MECHANICAL); PIEZOELECTRICITY; VIBRATIONS (MECHANICAL);

CYCLIC CONTACT MODE; PIEZOELECTRIC CURRENT; PIEZOELECTRIC MICROCANTILEVER; PIEZOELECTRIC OSCILLATOR; SCANNING FORCE MICROSCOPY; VISCOUS DAMPING;

PIEZOELECTRIC TRANSDUCERS;

EID: 0031187202     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589400     Document Type: Article

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