An atomic force microscope for small cantilevers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3009, Issue , 1997, Pages 48-52

  Schäffer, Tilman E ^a   Viani, Mario ^a   Walters, Deron A ^a   Drake, Barney ^a   Runge, Erik K ^b   Cleveland, Jason P ^b   Wendman, Mark A ^b   Hansma, Paul K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Digital Instruments   (United States)

Author keywords

Atomic force microscopy; Microfabrication; Optical beam deflection; Small cantilevers; Tapping mode in liquid

Indexed keywords

ALUMINA; ATOMIC PHYSICS; ATOMS; COMPOSITE MICROMECHANICS; MACHINING; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; MICROMETERS; NANOCANTILEVERS; OPTICAL MICROSCOPY; RESONANCE; THICKNESS MEASUREMENT;

BEAM DEFLECTION; NOISE CHARACTERISTICS; OPTICAL BEAM DEFLECTION; RESONANCE FREQUENCIES; SMALL CANTILEVERS; SPOT SIZES; TAPPING MODE IN LIQUID; VARIABLE FOCUSING;

ATOMIC FORCE MICROSCOPY;

EID: 0002057466     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271228     Document Type: Conference Paper

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