Microfabricated small metal cantilevers with silicon tip for atomic force microscopy

Journal of Microelectromechanical Systems

Volumn 9, Issue 1, 2000, Pages 112-116

  Chand, Ami ^a   Viani, Mario B ^b   Schäffer, Tilman E ^c   Hansma, Paul K ^b  

^a Veeco Metrology   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c MAX PLANCK INSTITUTE FOR BIOPHYSICAL CHEMISTRY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; GOLD; INTEGRATED CIRCUIT MANUFACTURE; NATURAL FREQUENCIES; RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON; SPECTRUM ANALYSIS; STRESSES;

INTEGRATED SILICON TIPS; METAL CANTILEVERS; MICROFABRICATED AFM PROBES; SACRIFICIAL OXIDE CANTILEVER;

MICROELECTROMECHANICAL DEVICES;

EID: 0033889018     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.825785     Document Type: Article

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