Effect of near-interfacial nitrogen on the oxidation behavior of ultrathin silicon oxynitrides

Journal of Applied Physics

Volumn 81, Issue 10, 1997, Pages 6992-6995

  Lu, H C ^a   Gusev, E P ^a   Gustafsson, T ^a   Garfunkel, E ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001089210     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365264     Document Type: Article

References (37)

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