A model for the gas-phase chemistry occurring in a furnace N2O oxynitride process

Journal of the Electrochemical Society

Volumn 143, Issue 5, 1996, Pages 1753-1762

  Hartig, Michael J ^a   Tobin, Philip J ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; HEAT TRANSFER; HEATING; MATHEMATICAL MODELS; NITROGEN OXIDES; REACTION KINETICS; THERMODYNAMICS; THIN FILMS;

GAS PHASE CHEMISTRY; OXYNITRIDE;

ELECTROCHEMISTRY;

EID: 0030149644     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1836712     Document Type: Article

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