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Applied Physics Letters

Volumn 69, Issue 18, 1996, Pages 2713-2715

High resolution ion scattering study of silicon oxynitridation

(7) Lu, H C a Gusev, E P a Gustafsson, T a Garfunkel, E a Green, M L b Brasen, D b Feldman, L C b,c

a RUTGERS UNIVERSITY (United States)

b LUCENT TECHNOLOGIES (United States)

c VANDERBILT UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001065135 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.117687 Document Type: Article

Times cited : (98)

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