Oxidation of Si(100) in nitric oxide at low pressures: An x-ray photoelectron spectroscopy study

Applied Physics Letters

Volumn 70, Issue 1, 1997, Pages 63-65

  Kamath, A ^a   Kwong, D L ^a   Sun, Y M ^b   Blass, P M ^b   Whaley, S ^b   White, J M ^b  

^a The University of Texas at Austin   (United States)

^b UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001947006     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119307     Document Type: Article

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