Thermal nitridation of SiO2 films in ammonia: Isotopic tracing of nitrogen and oxygen in the initial stages

Journal of the Electrochemical Society

Volumn 143, Issue 9, 1996, Pages 2938-2945

  Baumvol, I J R ^a   Stedile, F C ^b   Ganem, J J ^c   Trimaille, I ^c   Rigo, S ^c,d  

^a Instituto de Fisica Universidade   (Brazil)

^b FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^c CNRS   (France)

^d ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; DIFFUSION; ISOTOPES; NITROGEN; OXIDATION; RESONANCE; SEMICONDUCTING FILMS; SILICA; SURFACES;

ATOMIC TRANSPORT MECHANISMS; DEPTH PROFILES; ISOTOPIC TRACING; NUCLEAR REACTION ANALYSES; OXYNITRIDE; RAPID THERMAL PROCESSING; THERMAL NITRIDATION;

CHEMICAL REACTIONS;

EID: 0030244974     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837130     Document Type: Article

References (42)

1. T. Arakawa and H. Fukada, Electron. Lett., 30, 361 (1994).
2. M. Dutoit, D. Bouvet, J. Mi, N. Novkovski, and P. Letourneau, Microelectron. J., 25, 539 (1995).
3. P. J. Wright, A. Kermani, and K. C. Saraswat, IEEE Trans. Electron Device, ED-37, 1836 (1990).
4. M. Bhat, G. W. Yoon, D. L. Kwong, M. Arendt, and J. M. White, Appl. Phys. Lett., 64, 2116 (1994).
5. W. Ting, J. Ahn, and D. L. Kwong, IEEE Trans. Electron Device Lett., EDL-13, 117 (1992).
6. I. J. R. Baumvol, F. C. Stedile, J.-J. Ganem, I. Trimaille and S. Rigo, This Journal, 143, 1426 (1996).
7. T. Arakawa, T. Hayashi, M. Ohno, R. Matsumoto, A. Uchiyama, and H. Fukuda, Jpn. J. Appl. Phys., 34, 1007 (1995).
8. H.-P. Su and H.-C. Cheng, ibid., 34, 1816 (1995).
9. K. Yoneda, Y. Todokoro, and M. Inoue, J. Mater. Res., 6, 2362 (1991).
10. T. Hori, H. Iwasaki, Y. Naito, and H. Esaki, IEEE Trans. Electron Device, ED-34, 2238 (1987).
11. J. T. Yount, P. M. Lenahan, and P. W. Wyatt, J. Appl. Phys., 77, 699 (1995).
12. I. Trimaille and S. Rigo, Appl. Surf. Sci., 39, 65 (1989).
13. A. Serrari, J. L. Chartier, R. Le Bihan, S. Rigo, and J. C. Dupuy, ibid., 51, 133 (1991); ibid., 40, 65 (1989).
14. A. Serrari, J. L. Chartier, R. Le Bihan, S. Rigo, and J. C. Dupuy, ibid., 51, 133 (1991); ibid., 40, 65 (1989).
15. J. B. O. Elferink, F. H. P. M. Habraken, W. F. Van Der Weg, E. Dooms, M. Heyns, and R. de Kersmaecker, ibid., 39, 219 (1989).
16. I. J. R. Baumvol, F. C. Stedile, J.-J. Ganem, S. Rigo, and I. Trimaille, This Journal, 142, 1205 (1995).
17. J.-J. Ganem, S. Rigo, I. Trimaille, G-L. Lu, and P. Molle, Nucl. Instrum. Meth. B, 64, 778 (1992).
18. R. P. Vasquez and A. Madhukar, J. Appl. Phys., 60, 234 (1986).
19. B. A. Morrow, I. A. Cody, and L. S. M. Lee, J. Phys. Chem., 79, 2405 (1975).
20. S. Rigo, E Rochet, B. Agius, and A. Straboni, This Journal, 129, 867 (1982).
21. E. Bréelle, S. Rigo, J. A. Kilner, and J.-J. Ganem, Appl. Surf. Sci., 81, 127 (1994).
22. M. Bhat, J. Ahn, D. L. Kwong, M. Arendt, and J. M. White, Appl. Phys. Lett., 64, 1168 (1994).
23. H. Wong, B. L. Yang, and Y. C. Cheng, Appl. Surf. Sci., 72, 49 (1993).
24. K. Yamamoto, and M. Nakazawa, Jpn. J. Appl. Phys., 33, 285 (1994).
25. R. K. Brown and G. G. Pantano, J. Am. Ceram. Soc., 70, 9 (1989).
26. 2 Interface, C. R. Helms and B. E. Deal, Editors, Plenum Press, New York (1993).
27. F. C. Stedile, I. J. R. Baumvol, J.-J. Ganem, S. Rigo, I. Trimaille, G. Battistig, W. H. Schulte, and H. W. Becker, Nucl. Instrum, and Meth. B, 85, 248 (1994).
28. S. Rigo, G. Amsel, and M. Croset, J. Appl. Phys., 47, 2800 (1976).
29. A. Bosseboeuf, B. Agius, and S. Rigo, This Journal, 133, 810 (1986).
30. J.-J. Ganem, Ph.D. Thesis, Université Paris 7, (1992).
31. J.-J. Ganem, S. Rigo, I. Trimaille, and G. N. Lu, Nucl. Instrum. Meth. B, 64, 784 (1992).
32. B. Maurel and G. Amsel, Nucl. Instrum. Meth., 218, 159 (1983).
33. G. Amsel, C. Cohen, and B. Maurel, Nucl. Instrum. Meth. B, 14, 226 (1986).
34. G. Amsel, E. D'Artemare, and E. Girard, Nucl. Instrum. Meth., 205, 5 (1983).
35. I. Vickridge and G. Amsel, Nucl. Instrum. Meth. B, 45, 6 (1990).
36. G. Battistig, G. Amsel, E. D'Artemare, and I. Vickridge, ibid., 61, 369 (1991).
37. Manual of GENPLOT, Computer Graphics Service Ltd., Ithaca, New York (1991).
38. G. Battistig, G. Amsel, I. Trimaille, J.-J. Ganem, S. Rigo, F. C. Stedile, and I. J. R. Baumvol, Nucl. Instrum. Meth. B, 85, 326 (1994).
39. J. T. Yount and P. M. Lenaham, J. Non-Cryst. Solid, 164, 1069 (1993).
40. J. T. Yount, P. M. Lenaham, and P. W. Wyatt, J. Appl. Phys., 74, 5867 (1993).
41. J. T. Yount and P. M. Lenaham, and J. T. Krick, ibid., 76, 1754 (1994).
42. I. J. R. Baumvol, F. C. Stedile, J.-J. Ganem, I. Trimaille and S. Rigo, This Journal, 143, 2946 (1996).