메뉴 건너뛰기




Volumn 10, Issue , 2008, Pages 289-334

Multiscale Modeling and Design of Electrochemical Systems

Author keywords

Advances; Atomistic molecular simulation; Challenges; Electrochemical engineering; Electrochemical science; Electrochemical systems; Multiscale design; Multiscale modeling; Multiscale simulation; Requirements

Indexed keywords

ADVANCES; ATOMISTIC/MOLECULAR SIMULATION; CHALLENGES; ELECTROCHEMICAL ENGINEERING; ELECTROCHEMICAL SCIENCE; ELECTROCHEMICAL SYSTEMS; MULTI-SCALE DESIGN; MULTI-SCALE MODELING; MULTI-SCALE SIMULATION; REQUIREMENTS;

EID: 85018548770     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527625307.ch4     Document Type: Chapter
Times cited : (13)

References (187)
  • 1
    • 33144463474 scopus 로고    scopus 로고
    • Multiscale Mathematics Initiative: A Roadmap. U.S. Department of Energy
    • December 2004
    • Dolbow, J., Khaleel, M.A. and Mitchell, J. (2004) Multiscale Mathematics Initiative: A Roadmap. U.S. Department of Energy, December 2004 http://www.si.umich.edu/InfrastructureWorkshop/documents/NSF_2004_CIMultiscaleMath.pdf.
    • (2004)
    • Dolbow, J.1    Khaleel, M.A.2    Mitchell, J.3
  • 3
    • 0032659162 scopus 로고    scopus 로고
    • Micromachines for Nanoscale Science and Technology
    • Hoummady, M. and Fujita, H. (1999) Micromachines for Nanoscale Science and Technology. Nanotechnology, 10, 29-33.
    • (1999) Nanotechnology , vol.10 , pp. 29-33
    • Hoummady, M.1    Fujita, H.2
  • 4
    • 5544286683 scopus 로고    scopus 로고
    • Emerging Trends in Ultra-miniaturized CMOS (Complementary Metal-Oxide-Semiconductor) Transistors, SingleElectron and Molecular-Scale Devices:A Comparative Analysis for High-Performance Computational Nanoelectronics
    • Khanna, V.K. (2004) Emerging Trends in Ultra-miniaturized CMOS (Complementary Metal-Oxide-Semiconductor) Transistors, SingleElectron and Molecular-Scale Devices:A Comparative Analysis for High-Performance Computational Nanoelectronics. J. Sci. Ind. Res., 63, 795-806.
    • (2004) J. Sci. Ind. Res. , vol.63 , pp. 795-806
    • Khanna, V.K.1
  • 7
    • 0035687501 scopus 로고    scopus 로고
    • Bioartificial Organs in the Twenty-FirstCentury-Nanobiological Devices. Bioartificial Organs III: Tissue Sourcing, Immunoisolation, and Clinical Trials
    • Prokop, A. (2001) Bioartificial Organs in the Twenty-FirstCentury-Nanobiological Devices. Bioartificial Organs III: Tissue Sourcing, Immunoisolation, and Clinical Trials. Ann. New York Acad. Sci., 944, 472-490.
    • (2001) Ann. New York Acad. Sci. , vol.944 , pp. 472-490
    • Prokop, A.1
  • 11
    • 32644484370 scopus 로고    scopus 로고
    • A Review of Multiscale Analysis: Examples from Systems Biology, Materials Engineering, and Other Fluid-Surface Interacting Systems
    • Technical report, University of Delaware, Newark, DE
    • Vlachos, D.G. (2005) A Review of Multiscale Analysis: Examples from Systems Biology, Materials Engineering, and Other Fluid-Surface Interacting Systems. Technical report, University of Delaware, Newark, DE.
    • (2005)
    • Vlachos, D.G.1
  • 13
    • 0034031855 scopus 로고    scopus 로고
    • Multiscale Modeling of Hard Materials: Challenges and Opportunities for Chemical Engineering
    • Maroudas, D. (2000) Multiscale Modeling of Hard Materials: Challenges and Opportunities for Chemical Engineering. AIChEJ., 46, 878-882.
    • (2000) AIChEJ. , vol.46 , pp. 878-882
    • Maroudas, D.1
  • 14
    • 85018582895 scopus 로고    scopus 로고
    • National Research Council Report on Information, and Communications. National Academy Press Washington, DC
    • st Century, National Research Council Report on Information, and Communications. National Academy Press Washington, DC.
    • (2003) st Century
    • Alkire, R.1    Ratner, M.2
  • 15
    • 0346421137 scopus 로고    scopus 로고
    • Report of the Electrolytic Industries for the Year 2002
    • Srinivasan, V. and Lipp, L. (2003) Report of the Electrolytic Industries for the Year 2002. J. Electrochem. Soc., 150, K15-K38.
    • (2003) J. Electrochem. Soc. , vol.150 , pp. K15-K38
    • Srinivasan, V.1    Lipp, L.2
  • 16
  • 18
    • 0141641976 scopus 로고    scopus 로고
    • American Scientific Publisher, StevensonRanch, CA
    • Reed, M.A. and Lee, T. (eds) (2003) Molecular Nanoelectronics, American Scientific Publisher, StevensonRanch, CA.
    • (2003) Molecular Nanoelectronics
    • Reed, M.A.1    Lee, T.2
  • 19
    • 0036919986 scopus 로고    scopus 로고
    • Molecular Electronics with Carbon Nanotubes
    • Avouris, P. (2002) Molecular Electronics with Carbon Nanotubes. Acc. Chem. Res., 35, 1026-1034.
    • (2002) Acc. Chem. Res. , vol.35 , pp. 1026-1034
    • Avouris, P.1
  • 20
    • 0021953688 scopus 로고
    • The Theory of Ion Transport Through Membrane Channels
    • 1985
    • Cooper, K., Jakobsson, E. and Wolynes, P. (1985) The Theory of Ion Transport Through Membrane Channels. Prog. Biophys. Mol. Biol., 46, 51-96 (1985).
    • (1985) Prog. Biophys. Mol. Biol. , vol.46 , pp. 51-96
    • Cooper, K.1    Jakobsson, E.2    Wolynes, P.3
  • 22
    • 0023371196 scopus 로고
    • Stochastic Theory of Ion Movement in Channels with Single-Ion Occupancy. Application to Sodium Permeation of Gramicidin Channels
    • Jakobsson, E. and Chiu, S.-W. (1987) Stochastic Theory of Ion Movement in Channels with Single-Ion Occupancy. Application to Sodium Permeation of Gramicidin Channels. Biophys. J., 52, 33-45.
    • (1987) Biophys. J. , vol.52 , pp. 33-45
    • Jakobsson, E.1    Chiu, S.-W.2
  • 23
    • 0034313051 scopus 로고    scopus 로고
    • Active Optoelectronics using Thin-film Organic Semiconductors
    • Forrest, S.R. (2000) Active Optoelectronics using Thin-film Organic Semiconductors. IEEE J. Sel. Top. Quant. Electron., 6, 1072-1083.
    • (2000) IEEE J. Sel. Top. Quant. Electron. , vol.6 , pp. 1072-1083
    • Forrest, S.R.1
  • 25
    • 0037456689 scopus 로고    scopus 로고
    • Fabrication and Quantum Properties of Nanostructured Silicon
    • Koshida, N. and Matsumoto, N. (2003) Fabrication and Quantum Properties of Nanostructured Silicon. Mater. Sci. Eng. Res., 40, 169-205.
    • (2003) Mater. Sci. Eng. Res. , vol.40 , pp. 169-205
    • Koshida, N.1    Matsumoto, N.2
  • 26
    • 0030569720 scopus 로고    scopus 로고
    • Electrochemically Tunable Magnetic Phase Transition in a High-Tc Chromium Cyanide Thin Film
    • Sato, O., Iyoda, T., Fujishima, A. and Hashimoto, K. (1996) Electrochemically Tunable Magnetic Phase Transition in a High-Tc Chromium Cyanide Thin Film. Science, 271, 49-51.
    • (1996) Science , vol.271 , pp. 49-51
    • Sato, O.1    Iyoda, T.2    Fujishima, A.3    Hashimoto, K.4
  • 30
    • 0042530607 scopus 로고    scopus 로고
    • The Initial Stages of Metal Deposition as Viewed by Scanning Tunneling Microscopy
    • (eds R.C. Alkire and D.M. Kolb), Wiley-VCH, Weinheim
    • Kolb, D.M. (2002) The Initial Stages of Metal Deposition as Viewed by Scanning Tunneling Microscopy, in Advances in Electrochemistry, Science and Engineering (eds R.C. Alkire and D.M. Kolb), Wiley-VCH, Weinheim, vol. 7, pp. 107-150.
    • (2002) Advances in Electrochemistry, Science and Engineering , vol.7 , pp. 107-150
    • Kolb, D.M.1
  • 31
    • 0032047431 scopus 로고    scopus 로고
    • Electrochemical Fabrication of Large Arrays of Metal Nanoclusters
    • Engelmann, G.E., Ziegler, J.C. and Kolb, D.M. (1998) Electrochemical Fabrication of Large Arrays of Metal Nanoclusters. Surf. Sci., 401, 420-424.
    • (1998) Surf. Sci. , vol.401 , pp. 420-424
    • Engelmann, G.E.1    Ziegler, J.C.2    Kolb, D.M.3
  • 32
    • 4243156799 scopus 로고    scopus 로고
    • Electrochemical Nanostructuring with a Scanning Tunneling Microscope
    • 6th edn Wiley-VCH, Weinheim, chapter 3.7
    • Kolb, D.M., Engelmann, G.E. and Ziegler, J.C. (1999) Electrochemical Nanostructuring with a Scanning Tunneling Microscope, In Ullmann's Encyclopedia of Industrial Chemistry, 6th edn Wiley-VCH, Weinheim, chapter 3.7.
    • (1999) Ullmann's Encyclopedia of Industrial Chemistry
    • Kolb, D.M.1    Engelmann, G.E.2    Ziegler, J.C.3
  • 34
    • 4544257597 scopus 로고    scopus 로고
    • Perspectives on the Evolution of Electrochemical Engineering
    • Winter, 2003
    • Alkire, R.C. and Chapman, T.W. (Winter 2003) Perspectives on the Evolution of Electrochemical Engineering. Electrochem. Soc. Interface, 12, 47, 2003.
    • (2003) Electrochem. Soc. Interface , vol.12 , pp. 47
    • Alkire, R.C.1    Chapman, T.W.2
  • 36
    • 0028727470 scopus 로고
    • Electrochemical Reaction Engineering in Materials Processing
    • Alkire, R. and Verhoff, M. (1995) Electrochemical Reaction Engineering in Materials Processing. Chem. Eng. Sci., 49, 4085-4093.
    • (1995) Chem. Eng. Sci. , vol.49 , pp. 4085-4093
    • Alkire, R.1    Verhoff, M.2
  • 37
    • 0032313126 scopus 로고    scopus 로고
    • The Bridge from Nanoscale Phenomena to Macroscale Processes
    • Alkire, R. and Verhoff, M. (1998) The Bridge from Nanoscale Phenomena to Macroscale Processes. Electrochim. Acta, 43, 2733-2741.
    • (1998) Electrochim. Acta , vol.43 , pp. 2733-2741
    • Alkire, R.1    Verhoff, M.2
  • 40
    • 1342332719 scopus 로고    scopus 로고
    • Multiscale Modelling of CVD Film Growth - A Review of Recent Works
    • Dollet, A. (2004) Multiscale Modelling of CVD Film Growth - A Review of Recent Works. Surf. Coat. Technol., 177, 245-251.
    • (2004) Surf. Coat. Technol. , vol.177 , pp. 245-251
    • Dollet, A.1
  • 41
    • 4243074668 scopus 로고    scopus 로고
    • Coarse-grained Kinetic Monte Carlo Simulation of Copper Electrodeposition with Additives
    • Drews, T.O., Braatz, R.D. and Alkire, R.C. (2004) Coarse-grained Kinetic Monte Carlo Simulation of Copper Electrodeposition with Additives. Int. J. Multiscale Comput. Eng., 2, 313-327.
    • (2004) Int. J. Multiscale Comput. Eng. , vol.2 , pp. 313-327
    • Drews, T.O.1    Braatz, R.D.2    Alkire, R.C.3
  • 44
    • 0037171042 scopus 로고    scopus 로고
    • From Atomistic Simulation Towards Multiscale Modelling of Materials
    • Nieminen, R.M. (2002) From Atomistic Simulation Towards Multiscale Modelling of Materials. J. Phys.-Condens. Matt., 14, 2859-2876.
    • (2002) J. Phys.-Condens. Matt. , vol.14 , pp. 2859-2876
    • Nieminen, R.M.1
  • 45
    • 0000108193 scopus 로고    scopus 로고
    • Multiscale Modelling of Chemical Vapor Deposition
    • Rodgers, S.T. and Jensen, K.F. (1998) Multiscale Modelling of Chemical Vapor Deposition. J. Appl. Phys., 83, 524-530.
    • (1998) J. Appl. Phys. , vol.83 , pp. 524-530
    • Rodgers, S.T.1    Jensen, K.F.2
  • 47
    • 0038143185 scopus 로고    scopus 로고
    • Nanotechnology: Convergence with Modern Biology and Medicine
    • Roco, M.C. (2003) Nanotechnology: Convergence with Modern Biology and Medicine. Curr. Opin. Biotechnol., 14, 337-346.
    • (2003) Curr. Opin. Biotechnol. , vol.14 , pp. 337-346
    • Roco, M.C.1
  • 48
    • 85018598498 scopus 로고    scopus 로고
    • Scope of the journal Nanotechnology
    • as described on its website, Institute of Physics Publishing: Bristol
    • Nanotechnology (2008). Scope of the journal Nanotechnology, as described on its website, Institute of Physics Publishing: Bristol, http://www.iop.org
    • (2008)
  • 49
    • 0242385345 scopus 로고    scopus 로고
    • Role of Backbone Hydration and Salt-Bridge Formation in Stability of Alpha-Helix in Solution
    • Ghosh, T., Grade, S. and Garcia, A.E. (2003) Role of Backbone Hydration and Salt-Bridge Formation in Stability of Alpha-Helix in Solution. Biophys. J., 85, 3187-3193.
    • (2003) Biophys. J. , vol.85 , pp. 3187-3193
    • Ghosh, T.1    Grade, S.2    Garcia, A.E.3
  • 50
    • 4344595498 scopus 로고    scopus 로고
    • Escherichia Coli Glutaminyl-tRNA Synthetase is Electrostatically Optimization for Binding of its Cognate Substrates
    • Green, D.F. and Tidor, B. (2004) Escherichia Coli Glutaminyl-tRNA Synthetase is Electrostatically Optimization for Binding of its Cognate Substrates. J. Mol. Biol., 342, 435-452.
    • (2004) J. Mol. Biol. , vol.342 , pp. 435-452
    • Green, D.F.1    Tidor, B.2
  • 51
    • 4344592285 scopus 로고    scopus 로고
    • Molecular Design of Functional Polymer Surfaces
    • Koberstein, J.T. (2004) Molecular Design of Functional Polymer Surfaces. J. Polym. Sci. Part B-Polym. Phys., 42, 2942-2956.
    • (2004) J. Polym. Sci. Part B-Polym. Phys. , vol.42 , pp. 2942-2956
    • Koberstein, J.T.1
  • 52
    • 0345099660 scopus 로고    scopus 로고
    • Molecular Engineering of Peptides
    • Larson, R.G. (2003) Molecular Engineering of Peptides. Chem. Biol., 10, 1005-1006.
    • (2003) Chem. Biol. , vol.10 , pp. 1005-1006
    • Larson, R.G.1
  • 54
    • 84916430884 scopus 로고
    • A Self-consistent Iterative Scheme for One-dimensional Steady State Transistor Calculations
    • Gummel, H.K. (1964) A Self-consistent Iterative Scheme for One-dimensional Steady State Transistor Calculations. IEEE Trans. Electron Devices, ED-11, 455-465.
    • (1964) IEEE Trans. Electron Devices, ED-11 , pp. 455-465
    • Gummel, H.K.1
  • 57
    • 36549097576 scopus 로고
    • Fluid Model Simulations of a 13.56-MHz rfDischarge - Time and Space Dependence of Rates of Electron-Impact Excitation
    • Graves, D.B. (1987) Fluid Model Simulations of a 13.56-MHz rfDischarge - Time and Space Dependence of Rates of Electron-Impact Excitation. J. Appl. Phys., 62, 88-94.
    • (1987) J. Appl. Phys. , vol.62 , pp. 88-94
    • Graves, D.B.1
  • 58
    • 0022706010 scopus 로고
    • Continuum Model of DC and rf Discharges
    • Graves, D.B. and Jensen, K.F. (1986) Continuum Model of DC and rf Discharges. IEEE Trans. Plasma Sci., PS-14, 78-91.
    • (1986) IEEE Trans. Plasma Sci. , vol.PS-14 , pp. 78-91
    • Graves, D.B.1    Jensen, K.F.2
  • 59
    • 0000621971 scopus 로고
    • Analysis of Low-Pressure rf-Glow Discharges Using a Continuum Model
    • Park, S.K. and Economou, D.J. (1990) Analysis of Low-Pressure rf-Glow Discharges Using a Continuum Model. J. Appl. Phys., 68, 3904-3915.
    • (1990) J. Appl. Phys. , vol.68 , pp. 3904-3915
    • Park, S.K.1    Economou, D.J.2
  • 60
    • 0012683728 scopus 로고
    • Comparison of Measured and Calculated SF6 Breakdown in rf Electric-Fields
    • Thompson, B.E. and Sawin, H.H. (1986) Comparison of Measured and Calculated SF6 Breakdown in rf Electric-Fields. J. Appl. Phys., 60, 89-94.
    • (1986) J. Appl. Phys. , vol.60 , pp. 89-94
    • Thompson, B.E.1    Sawin, H.H.2
  • 61
    • 0000793139 scopus 로고
    • Cramming More Components onto Integrated Circuits
    • Moore, G.E. (1965) Cramming More Components onto Integrated Circuits. Electronics, 38, 8.
    • (1965) Electronics , vol.38 , pp. 8
    • Moore, G.E.1
  • 68
    • 10644233843 scopus 로고    scopus 로고
    • Common-Refinement-Based Data Transfer between Non-matching Meshes in Multiphysics Simulations
    • Jiao, X. and Heath, M.T. (2004a) Common-Refinement-Based Data Transfer between Non-matching Meshes in Multiphysics Simulations. Int. J. Numer. l Meth. Eng., 61, 2402-2427.
    • (2004) Int. J. Numer. l Meth. Eng. , vol.61 , pp. 2402-2427
    • Jiao, X.1    Heath, M.T.2
  • 71
    • 85071084137 scopus 로고    scopus 로고
    • Simulating Ion Permeation Through the ompF Porin Ion Channel Using Three-dimensional Drift-Diffusion Theory
    • van der Straaten, T.A., Tang, J.M., Ravaioli, U., Eisenberg, R.S. and Aluru, N.R. (2003) Simulating Ion Permeation Through the ompF Porin Ion Channel Using Three-dimensional Drift-Diffusion Theory. J. Computat. Electron., 2, 29-47.
    • (2003) J. Computat. Electron. , vol.2 , pp. 29-47
    • van der Straaten, T.A.1    Tang, J.M.2    Ravaioli, U.3    Eisenberg, R.S.4    Aluru, N.R.5
  • 72
    • 0036122650 scopus 로고    scopus 로고
    • Technology CAD: Device Simulation and Characterization
    • Grasser, T. and Selberherr, S. (2002) Technology CAD: Device Simulation and Characterization. J. Vac. Sci. Technol. B, 20, 407-413.
    • (2002) J. Vac. Sci. Technol. B , vol.20 , pp. 407-413
    • Grasser, T.1    Selberherr, S.2
  • 73
    • 0011406973 scopus 로고    scopus 로고
    • Two-step Dopant Diffusion Study Performed in Two Dimensions by Scanning Capacitance Microscopy and TSUPREM IV
    • Kim, J., McMurray, J.S., Williams, C.C. and Slinkman, J. (1998) Two-step Dopant Diffusion Study Performed in Two Dimensions by Scanning Capacitance Microscopy and TSUPREM IV. J. Appl. Phys., 84, 1305-1309.
    • (1998) J. Appl. Phys. , vol.84 , pp. 1305-1309
    • Kim, J.1    McMurray, J.S.2    Williams, C.C.3    Slinkman, J.4
  • 74
    • 1542619859 scopus 로고    scopus 로고
    • Multidimensional Semiconductor Device and Micro-scale Thermal Modeling Using the PROPHET Simulator with Dial-an-Operator Framework
    • Pardhanani, A.L. and Carey, G.F. (2000) Multidimensional Semiconductor Device and Micro-scale Thermal Modeling Using the PROPHET Simulator with Dial-an-Operator Framework. Comput. Model. Eng. Sci., 1, 141-150.
    • (2000) Comput. Model. Eng. Sci. , vol.1 , pp. 141-150
    • Pardhanani, A.L.1    Carey, G.F.2
  • 76
    • 13244290171 scopus 로고    scopus 로고
    • TSUPREM-4 Based Modeling of Boron and Carbon Diffusion in SiGeC Base Layers Under Rapid Thermal Annealing Conditions
    • Sibaja-Hernandez, A., Xu, M.W., Decoutere, S. and Maes, H. (2005) TSUPREM-4 Based Modeling of Boron and Carbon Diffusion in SiGeC Base Layers Under Rapid Thermal Annealing Conditions. Mater. Sci. Semicon. Process., 8, 115-120.
    • (2005) Mater. Sci. Semicon. Process. , vol.8 , pp. 115-120
    • Sibaja-Hernandez, A.1    Xu, M.W.2    Decoutere, S.3    Maes, H.4
  • 78
    • 33646862173 scopus 로고    scopus 로고
    • A Review of Hydrodynamic and Energy-Transport Models for Semiconductor Device Simulation
    • Grasser, T., Tang, T.W., Kosina, H. and Selberherr, S. (2003) A Review of Hydrodynamic and Energy-Transport Models for Semiconductor Device Simulation. Proc. IEEE, 91, 251-274.
    • (2003) Proc. IEEE , vol.91 , pp. 251-274
    • Grasser, T.1    Tang, T.W.2    Kosina, H.3    Selberherr, S.4
  • 79
    • 36549099421 scopus 로고
    • Distribution of Ion Energies Incident on Electrodes in Capacitively Coupled rf Discharges
    • Kushner, M.J. (1985) Distribution of Ion Energies Incident on Electrodes in Capacitively Coupled rf Discharges. J. Appl. Phys., 58, 4024-4031.
    • (1985) J. Appl. Phys. , vol.58 , pp. 4024-4031
    • Kushner, M.J.1
  • 80
    • 0343347619 scopus 로고    scopus 로고
    • Hierarchy of Simulation Approaches for Hot Carrier Transport in Deep Submicron Devices
    • Ravaioli, U. (1998) Hierarchy of Simulation Approaches for Hot Carrier Transport in Deep Submicron Devices. Semiconduct. Sci. Technol., 13, 1-10.
    • (1998) Semiconduct. Sci. Technol. , vol.13 , pp. 1-10
    • Ravaioli, U.1
  • 81
    • 0037417029 scopus 로고    scopus 로고
    • Numerical Challenges in Particle-based Approaches for the Simulation of Semiconductor Devices
    • Saraniti, M., Tang, J., Goodnick, S.M. and Wigger, S.J. (2003) Numerical Challenges in Particle-based Approaches for the Simulation of Semiconductor Devices. Math. Comput. Simulat., 62, 501-508.
    • (2003) Math. Comput. Simulat. , vol.62 , pp. 501-508
    • Saraniti, M.1    Tang, J.2    Goodnick, S.M.3    Wigger, S.J.4
  • 82
    • 0026924115 scopus 로고
    • Simulation of Compound Semiconductor-Devices
    • Schoenmaker, W. and Vankemmel, R. (1992) Simulation of Compound Semiconductor-Devices. Microelectron. Eng., 19, 31-38.
    • (1992) Microelectron. Eng. , vol.19 , pp. 31-38
    • Schoenmaker, W.1    Vankemmel, R.2
  • 84
    • 31144463269 scopus 로고    scopus 로고
    • Topography Simulations for Contact Formation Involving Reactive Ion Etching, Sputtering and Chemical Vapor Deposition. J
    • Takagi, S., Onoue, S., Iyanagi, K., Nishitani, K. and Shinmura, T. (2005) Topography Simulations for Contact Formation Involving Reactive Ion Etching, Sputtering and Chemical Vapor Deposition. J. Vac. Sci. Technol. B, 23, 1076-1083.
    • (2005) Vac. Sci. Technol. B , vol.23 , pp. 1076-1083
    • Takagi, S.1    Onoue, S.2    Iyanagi, K.3    Nishitani, K.4    Shinmura, T.5
  • 85
    • 0342723158 scopus 로고    scopus 로고
    • Singleand Multiband Modeling of Quantum Electron Transport Through Layered Semiconductor Devices
    • Lake, R., Klimeck, G., Bowen, R.C. and Jovanovic, D. (1997) Singleand Multiband Modeling of Quantum Electron Transport Through Layered Semiconductor Devices. J. Appl. Phys., 81, 7845-7869.
    • (1997) J. Appl. Phys. , vol.81 , pp. 7845-7869
    • Lake, R.1    Klimeck, G.2    Bowen, R.C.3    Jovanovic, D.4
  • 86
    • 3042753085 scopus 로고    scopus 로고
    • Device Modeling and Simulations Toward Sub-10 nm Semiconductor Devices
    • Sano, N., Hiroki, A. and Matsuzawa, K. (2002) Device Modeling and Simulations Toward Sub-10 nm Semiconductor Devices. IEEETrans. Nanotechnol., 1, 63-71.
    • (2002) IEEETrans. Nanotechnol. , vol.1 , pp. 63-71
    • Sano, N.1    Hiroki, A.2    Matsuzawa, K.3
  • 88
    • 0033341471 scopus 로고    scopus 로고
    • Initial Stages of Ge Growth on Si(100): Ad-atoms, Ad-dimers, and Ad-trimers
    • Dalpian, G.M., Janotti, A., Fazzio, A. and da Silva, A.J.R. (1999) Initial Stages of Ge Growth on Si(100): Ad-atoms, Ad-dimers, and Ad-trimers. Physica B, 274, 589-592.
    • (1999) Physica B , vol.274 , pp. 589-592
    • Dalpian, G.M.1    Janotti, A.2    Fazzio, A.3    da Silva, A.J.R.4
  • 89
    • 0037371813 scopus 로고    scopus 로고
    • Atomic Scale Computer Aided Design for Novel Semiconductor Devices
    • La Magna, A., Alippi, P., Colombo, L. and Strobel, M. (2003) Atomic Scale Computer Aided Design for Novel Semiconductor Devices. Comput. Mater. Sci., 27, 10-15.
    • (2003) Comput. Mater. Sci. , vol.27 , pp. 10-15
    • La Magna, A.1    Alippi, P.2    Colombo, L.3    Strobel, M.4
  • 90
    • 0011975605 scopus 로고    scopus 로고
    • First-Principles Study of the Equilibrium Structures of Si-N Clusters
    • Jeong, J.W., Lee, I.H., Oh, J.H. and Chang, K.J. (1998) First-Principles Study of the Equilibrium Structures of Si-N Clusters. J. Phys.-Condens. Matt., 10, 5851-5860.
    • (1998) J. Phys.-Condens. Matt. , vol.10 , pp. 5851-5860
    • Jeong, J.W.1    Lee, I.H.2    Oh, J.H.3    Chang, K.J.4
  • 91
    • 9944252518 scopus 로고    scopus 로고
    • Boron Diffusion in Strained Si: A First-Principles Study
    • Lin, L., Kirichenko, T., Banerjee, S.K. and Hwang, G.S. (2004) Boron Diffusion in Strained Si: A First-Principles Study. J. Appl. Phys., 96, 5543-5547.
    • (2004) J. Appl. Phys. , vol.96 , pp. 5543-5547
    • Lin, L.1    Kirichenko, T.2    Banerjee, S.K.3    Hwang, G.S.4
  • 93
    • 20444497919 scopus 로고    scopus 로고
    • Structural and Electronic Properties of Liquid Ge-Sn Alloys: Ab Initio Molecular-Dynamics Simulations
    • Goto, R., Shimojo, F., Munejiri, S. and Hoshino, K. (2004) Structural and Electronic Properties of Liquid Ge-Sn Alloys: Ab Initio Molecular-Dynamics Simulations. J. Phys. Soc. Jpn., 73, 2746-2752.
    • (2004) J. Phys. Soc. Jpn. , vol.73 , pp. 2746-2752
    • Goto, R.1    Shimojo, F.2    Munejiri, S.3    Hoshino, K.4
  • 94
    • 0037103856 scopus 로고    scopus 로고
    • First Principles Simulations of SiGe for the Liquid and Amorphous States
    • Ko, E., Jain, M. and Chelikowsky, J.R. (2002) First Principles Simulations of SiGe for the Liquid and Amorphous States. J. Chem. Phys., 117, 3476-3483.
    • (2002) J. Chem. Phys. , vol.117 , pp. 3476-3483
    • Ko, E.1    Jain, M.2    Chelikowsky, J.R.3
  • 95
    • 2342421845 scopus 로고    scopus 로고
    • Adsorption and Diffusion of a Cl Adatom on the GaAs(001)-c(8x2) Zeta Surface
    • Lee, S.M., Lee, S.H. and Scheffler, M. (2004) Adsorption and Diffusion of a Cl Adatom on the GaAs(001)-c(8x2) Zeta Surface. Phys. Rev. B, 69, 125317.
    • (2004) Phys. Rev. B , vol.69 , pp. 125317
    • Lee, S.M.1    Lee, S.H.2    Scheffler, M.3
  • 96
    • 36448998595 scopus 로고
    • Theoretical Foundations of Dynamical Monte Carlo Simulations
    • Fichthorn, K.A. and Weinberg, W.H. (1991) Theoretical Foundations of Dynamical Monte Carlo Simulations. J. Chem. Phys., 95, 1090-1096.
    • (1991) J. Chem. Phys. , vol.95 , pp. 1090-1096
    • Fichthorn, K.A.1    Weinberg, W.H.2
  • 97
    • 0038681862 scopus 로고    scopus 로고
    • Effect of Spatially Distributed Surface Residues on Protein-Polymer Association
    • Jönsson, M., Skepö, M., Tjerneld, F. and Linse, P. (2003) Effect of Spatially Distributed Surface Residues on Protein-Polymer Association. J. Phys. Chem. B, 107, 5511-5518.
    • (2003) J. Phys. Chem. B , vol.107 , pp. 5511-5518
    • Jönsson, M.1    Skepö, M.2    Tjerneld, F.3    Linse, P.4
  • 100
    • 0001259264 scopus 로고    scopus 로고
    • Coarse-grained Molecular Dynamics and the Atomic Limit ofFinite Elements
    • Rudd, R.E. and Broughton, J.Q. (1998) Coarse-grained Molecular Dynamics and the Atomic Limit ofFinite Elements. Phys. Rev. B, 58, R5893-R5896.
    • (1998) Phys. Rev. B , vol.58 , pp. R5893-R5896
    • Rudd, R.E.1    Broughton, J.Q.2
  • 101
    • 0034339381 scopus 로고    scopus 로고
    • Concurrent Coupling of Length Scales in Solid State Systems
    • Rudd, R.E. and Broughton, J.Q. (2000) Concurrent Coupling of Length Scales in Solid State Systems. Phys. Status Solidi B - Basic Res., 217, 251-291.
    • (2000) Phys. Status Solidi B - Basic Res. , vol.217 , pp. 251-291
    • Rudd, R.E.1    Broughton, J.Q.2
  • 102
    • 0037456891 scopus 로고    scopus 로고
    • Course-grained Stochastic Processes and Monte Carlo Simulations in Lattice Systems
    • Katsoulakis, M.A., Majda, A.J. and Vlachos, D.G. (2003) Course-grained Stochastic Processes and Monte Carlo Simulations in Lattice Systems. J. Comput. Phys., 186, 250-278.
    • (2003) J. Comput. Phys. , vol.186 , pp. 250-278
    • Katsoulakis, M.A.1    Majda, A.J.2    Vlachos, D.G.3
  • 103
    • 0345529914 scopus 로고    scopus 로고
    • Coarse-grained Stochastic Processes and Kinetic Monte Carlo Simulation for the Diffusion of Interacting Particles
    • Katsoulakis, M.A. and Vlachos, D.G. (2003) Coarse-grained Stochastic Processes and Kinetic Monte Carlo Simulation for the Diffusion of Interacting Particles. J. Chem. Phys., 119, 9412-9427.
    • (2003) J. Chem. Phys. , vol.119 , pp. 9412-9427
    • Katsoulakis, M.A.1    Vlachos, D.G.2
  • 104
    • 0037426193 scopus 로고    scopus 로고
    • Multiresolution Analysis in Statistical Mechanics - I. Using Wavelets to Calculate Thermodynamic Properties
    • Ismail, A.E., Rutledge, G.C. and Stephanopoulos, G. (2003a) Multiresolution Analysis in Statistical Mechanics - I. Using Wavelets to Calculate Thermodynamic Properties. J. Chem. Phys., 118, 4414-4423.
    • (2003) J. Chem. Phys. , vol.118 , pp. 4414-4423
    • Ismail, A.E.1    Rutledge, G.C.2    Stephanopoulos, G.3
  • 105
    • 0037426176 scopus 로고    scopus 로고
    • Multiresolution Analysis in Statistical Mechanics - II. The Wavelet Transform as a Basis for Monte Carlo Simulations on Lattices. J
    • Ismail, A.E., Rutledge, G.C. and Stephanopoulos, G. (2003b) Multiresolution Analysis in Statistical Mechanics - II. The Wavelet Transform as a Basis for Monte Carlo Simulations on Lattices. J. Chem. Phys., 118, 4424-4431.
    • (2003) Chem. Phys. , vol.118 , pp. 4424-4431
    • Ismail, A.E.1    Rutledge, G.C.2    Stephanopoulos, G.3
  • 106
    • 17344387998 scopus 로고    scopus 로고
    • The Gap-Tooth Method in Particle Simulations
    • Gear, C.W., Li, J. and Kevrekidis, I.G. (2003) The Gap-Tooth Method in Particle Simulations. Phys. Lett. A, 316, 190-195.
    • (2003) Phys. Lett. , vol.316 A , pp. 190-195
    • Gear, C.W.1    Li, J.2    Kevrekidis, I.G.3
  • 107
    • 0035933994 scopus 로고    scopus 로고
    • Approximate Accelerated Stochastic Simulation of Chemically Reacting Systems
    • Gillespie, D.T. (2001) Approximate Accelerated Stochastic Simulation of Chemically Reacting Systems. J. Chem. Phys., 115, 1716-1733.
    • (2001) J. Chem. Phys. , vol.115 , pp. 1716-1733
    • Gillespie, D.T.1
  • 108
    • 0242425970 scopus 로고    scopus 로고
    • Improved Leap-size Selection for Accelerated Stochastic Simulation
    • Gillespie, D.T. and Petzold, L.R. (2003) Improved Leap-size Selection for Accelerated Stochastic Simulation. J. Chem. Phys., 119, 8229-8234.
    • (2003) J. Chem. Phys. , vol.119 , pp. 8229-8234
    • Gillespie, D.T.1    Petzold, L.R.2
  • 109
    • 0942279178 scopus 로고    scopus 로고
    • Stiffness in Stochastic Chemically Reacting Systems: The Implicit Tau-leaping Method
    • Rathinam, M., Petzold, L. and Gillespie, D. (2003) Stiffness in Stochastic Chemically Reacting Systems: The Implicit Tau-leaping Method. J. Chem. Phys., 119, 12784-12794.
    • (2003) J. Chem. Phys. , vol.119 , pp. 12784-12794
    • Rathinam, M.1    Petzold, L.2    Gillespie, D.3
  • 110
    • 36849126204 scopus 로고
    • Studies in Molecular Dynamics. I. General Method
    • Alder, B.J. and Wainwright, T.E. (1959) Studies in Molecular Dynamics. I. General Method. J. Chem. Phys., 31, 459-466.
    • (1959) J. Chem. Phys. , vol.31 , pp. 459-466
    • Alder, B.J.1    Wainwright, T.E.2
  • 111
    • 33750335230 scopus 로고    scopus 로고
    • Hierarchical Multiscale Simulation of Electrokinetic Transport in Silica Nanochannels at the Point of Zero Charge
    • Joseph, S. and Aluru, N.R. (2006) Hierarchical Multiscale Simulation of Electrokinetic Transport in Silica Nanochannels at the Point of Zero Charge. Langmuir, 22, 9041-9051.
    • (2006) Langmuir , vol.22 , pp. 9041-9051
    • Joseph, S.1    Aluru, N.R.2
  • 112
    • 25844530338 scopus 로고    scopus 로고
    • Multiscale Simulation of Electroosmotic Transport Using Embedding Techniques
    • Qiao, R. and Aluru, N.R. (2004) Multiscale Simulation of Electroosmotic Transport Using Embedding Techniques. Int. J. Multiscale Computat. Eng., 2, 173-188.
    • (2004) Int. J. Multiscale Computat. Eng. , vol.2 , pp. 173-188
    • Qiao, R.1    Aluru, N.R.2
  • 113
    • 0001460414 scopus 로고    scopus 로고
    • Molecular Dynamics-based Ion-surface Interaction Modes for Ionized Physical Vapor Deposition Feature Scale Simulations
    • Coronell, D.G., Hansen, D.E., Voter, A.F., Liu, C.-L., Liu, X.-Y. and Kress, J.D. (1998) Molecular Dynamics-based Ion-surface Interaction Modes for Ionized Physical Vapor Deposition Feature Scale Simulations. Appl Phys. Lett., 73, 3860-3862.
    • (1998) Appl Phys. Lett. , vol.73 , pp. 3860-3862
    • Coronell, D.G.1    Hansen, D.E.2    Voter, A.F.3    Liu, C.-L.4    Liu, X.-Y.5    Kress, J.D.6
  • 114
    • 0035959673 scopus 로고    scopus 로고
    • First-principles Based Kinetic Simulations of Acetic Acid Temperature Programmed Reaction on Pd(111)
    • Hansen, E. and Neurock, M. (2001) First-principles Based Kinetic Simulations of Acetic Acid Temperature Programmed Reaction on Pd(111). J. Phys. Chem. B, 105, 9218-9229.
    • (2001) J. Phys. Chem. B , vol.105 , pp. 9218-9229
    • Hansen, E.1    Neurock, M.2
  • 115
    • 0000614806 scopus 로고    scopus 로고
    • Modeling of Metal Thin Film Growth: Linking Angstrom-scale Molecular Dynamics Results to Micron-scale Film Topographies
    • Hansen, U., Rodgers, S. and Jensen, K.F. (2000) Modeling of Metal Thin Film Growth: Linking Angstrom-scale Molecular Dynamics Results to Micron-scale Film Topographies. Phys. Rev. B, 62, 2869-2878.
    • (2000) Phys. Rev. B , vol.62 , pp. 2869-2878
    • Hansen, U.1    Rodgers, S.2    Jensen, K.F.3
  • 116
    • 0036531418 scopus 로고    scopus 로고
    • Continuum and Atomistic Modeling of Electromechanically-induced Failure of Ductile Metallic Thin Films
    • Maroudas, D. and Gungor, M.R. (2002) Continuum and Atomistic Modeling of Electromechanically-induced Failure of Ductile Metallic Thin Films. Comput. Mater. Sci., 23, 242-249.
    • (2002) Comput. Mater. Sci. , vol.23 , pp. 242-249
    • Maroudas, D.1    Gungor, M.R.2
  • 118
    • 0032649508 scopus 로고    scopus 로고
    • Modeling Microdefect Formation in Czochralski Silicon
    • Sinno, T. and Brown, R.A. (1999) Modeling Microdefect Formation in Czochralski Silicon. J. Electrochem. Soc., 146, 2300-2312.
    • (1999) J. Electrochem. Soc. , vol.146 , pp. 2300-2312
    • Sinno, T.1    Brown, R.A.2
  • 120
    • 0001430250 scopus 로고    scopus 로고
    • Mixed Atomistic and Continuum Models of Deformation in Solids
    • Tadmor, E.B., Phillips, R. and Ortiz, M. (1996b) Mixed Atomistic and Continuum Models of Deformation in Solids. Langmuir, 12, 4529-4534.
    • (1996) Langmuir , vol.12 , pp. 4529-4534
    • Tadmor, E.B.1    Phillips, R.2    Ortiz, M.3
  • 121
    • 0031276392 scopus 로고    scopus 로고
    • A Multiscale Simulator for Low Pressure Chemical Vapor Deposition
    • Gobbert, M.K., Merchant, T.P., Borucki, L.J. and Cale, T.S. (1997) A Multiscale Simulator for Low Pressure Chemical Vapor Deposition. J. Electrochem. Soc., 144, 3945-3951.
    • (1997) J. Electrochem. Soc. , vol.144 , pp. 3945-3951
    • Gobbert, M.K.1    Merchant, T.P.2    Borucki, L.J.3    Cale, T.S.4
  • 122
    • 0033121676 scopus 로고    scopus 로고
    • Finite Element and Monte Carlo Simulation of Submicrometer Silicon n-MOSFET's
    • Hadji, D., Marechal, Y. and Zimmerman, J. (1999) Finite Element and Monte Carlo Simulation of Submicrometer Silicon n-MOSFET's. IEEE Trans. Magnetics, 35, 1809-1812.
    • (1999) IEEE Trans. Magnetics , vol.35 , pp. 1809-1812
    • Hadji, D.1    Marechal, Y.2    Zimmerman, J.3
  • 123
    • 0037191682 scopus 로고    scopus 로고
    • Recent Developments on Multiscale, Hierarchical Modeling of Chemical Reactors
    • Raimondeau, S. and Vlachos, D.G. (2002) Recent Developments on Multiscale, Hierarchical Modeling of Chemical Reactors. Chem. Eng.J., 90, 3-23.
    • (2002) Chem. Eng.J. , vol.90 , pp. 3-23
    • Raimondeau, S.1    Vlachos, D.G.2
  • 124
    • 0031275154 scopus 로고    scopus 로고
    • Multiscale Integration Hybrid Algorithms for Homogeneous-Heterogeneous Reactors
    • Vlachos, D.G. (1997) Multiscale Integration Hybrid Algorithms for Homogeneous-Heterogeneous Reactors. AIChEJ., 43, 3031-3041.
    • (1997) AIChEJ. , vol.43 , pp. 3031-3041
    • Vlachos, D.G.1
  • 125
    • 0037141173 scopus 로고    scopus 로고
    • A Combined Continuum/DSMC Technique for Multiscale Analysis of Microfluidic Filters. J
    • Aktas, O. and Aluru, N.R. (2002) A Combined Continuum/DSMC Technique for Multiscale Analysis of Microfluidic Filters. J. Comp. Phys., 178, 342-372.
    • (2002) Comp. Phys. , vol.178 , pp. 342-372
    • Aktas, O.1    Aluru, N.R.2
  • 126
    • 17244374413 scopus 로고    scopus 로고
    • Concurrent Coupling of Length Scales: Methodology and Application
    • Broughton, J.Q., Abraham, F.F., Bernstein, N. and Kaxiras, E. (1999) Concurrent Coupling of Length Scales: Methodology and Application. Phys. Rev. B, 60, 2391-2403.
    • (1999) Phys. Rev. B , vol.60 , pp. 2391-2403
    • Broughton, J.Q.1    Abraham, F.F.2    Bernstein, N.3    Kaxiras, E.4
  • 127
    • 0032614177 scopus 로고    scopus 로고
    • Role of Macrotransport Phenomena in Film Microstructure during Epitaxial Growth
    • Vlachos, D.G. (1999) Role of Macrotransport Phenomena in Film Microstructure during Epitaxial Growth. Appl. Phys. Lett., 74, 2797-2799.
    • (1999) Appl. Phys. Lett. , vol.74 , pp. 2797-2799
    • Vlachos, D.G.1
  • 128
    • 0001000232 scopus 로고
    • The Effects ofPhase Transitions, Surface Diffusion, and Defects on Surface Catalyzed Reactions: Oscillations and Fluctuations
    • Vlachos, D.G., Schmidt, L.D. and Aris, R. (1990) The Effects ofPhase Transitions, Surface Diffusion, and Defects on Surface Catalyzed Reactions: Oscillations and Fluctuations. J. Chem. Phys., 93, 8306.
    • (1990) J. Chem. Phys. , vol.93 , pp. 8306
    • Vlachos, D.G.1    Schmidt, L.D.2    Aris, R.3
  • 129
  • 131
    • 33947111542 scopus 로고    scopus 로고
    • Effect of Additives on Shape Evolution during Electrodeposition. I. Multiscale Simulation with Dynamically Coupled Kinetic Monte Carlo and MovingBoundary Finite-Volume Codes
    • Li, X., Drews, T.O., Rusli, E., Xue, F., He, Y., Braatz, R. and Alkire, R. (2007) Effect of Additives on Shape Evolution during Electrodeposition. I. Multiscale Simulation with Dynamically Coupled Kinetic Monte Carlo and MovingBoundary Finite-Volume Codes. J. Electrochem. Soc., 154, D230-D240.
    • (2007) J. Electrochem. Soc. , vol.154 , pp. D230-D240
    • Li, X.1    Drews, T.O.2    Rusli, E.3    Xue, F.4    He, Y.5    Braatz, R.6    Alkire, R.7
  • 132
    • 10044222037 scopus 로고    scopus 로고
    • Systems Analysis and Design of Dynamically Coupled Multiscale Reactor Simulation Codes
    • Rusli, E., Drews, T.O. and Braatz, R.D. (2004) Systems Analysis and Design of Dynamically Coupled Multiscale Reactor Simulation Codes. Chem. Eng. Sci., 59, 5607-5613.
    • (2004) Chem. Eng. Sci. , vol.59 , pp. 5607-5613
    • Rusli, E.1    Drews, T.O.2    Braatz, R.D.3
  • 134
    • 0000291789 scopus 로고    scopus 로고
    • Low-dimensional Approximations of Multiscale Epitaxial Growth Models for Microstructure Control of Materials
    • Raimondeau, S. andVlachos, D.G. (2000) Low-dimensional Approximations of Multiscale Epitaxial Growth Models for Microstructure Control of Materials. J. Comput. Phys., 160, 564-576.
    • (2000) J. Comput. Phys. , vol.160 , pp. 564-576
    • Raimondeau, S.1    Vlachos, D.G.2
  • 135
    • 0030584607 scopus 로고    scopus 로고
    • A Level Set Formulation of Eulerian Interface Capturing Methods for Incompressible Fluid Flows
    • Chang, Y.C., Hou, T.Y., Merriman, B. and Osher, S. (1996) A Level Set Formulation of Eulerian Interface Capturing Methods for Incompressible Fluid Flows. J. Comp. Phys., 124, 449-464.
    • (1996) J. Comp. Phys. , vol.124 , pp. 449-464
    • Chang, Y.C.1    Hou, T.Y.2    Merriman, B.3    Osher, S.4
  • 136
    • 0001046083 scopus 로고    scopus 로고
    • A Numerical Study of Electro-migration Voiding by Evolving Level Set Functions on a Fixed Cartesian Grid
    • Li, Z., Zhao, H. and Gao, H. (1999) A Numerical Study of Electro-migration Voiding by Evolving Level Set Functions on a Fixed Cartesian Grid. J. Comput. Phys., 152, 281-304.
    • (1999) J. Comput. Phys. , vol.152 , pp. 281-304
    • Li, Z.1    Zhao, H.2    Gao, H.3
  • 137
    • 0038178132 scopus 로고    scopus 로고
    • Modeling Superconformal Electrodeposition using the Level Set Method
    • Wheeler, D., Josell, D. and Moffat, T.P. (2003) Modeling Superconformal Electrodeposition using the Level Set Method. J. Electrochem. Soc., 150, C302-C310.
    • (2003) J. Electrochem. Soc. , vol.150 , pp. C302-C310
    • Wheeler, D.1    Josell, D.2    Moffat, T.P.3
  • 138
    • 10844237076 scopus 로고    scopus 로고
    • Pair Diffusion and Kick-Out: Contributions to Diffusion of Boron in Silicon
    • Jung, M.Y.L., Gunawan, R., Braatz, R.D. and Seebauer, E.G. (2004a) Pair Diffusion and Kick-Out: Contributions to Diffusion of Boron in Silicon. AIChE J., 50, 3248-3256.
    • (2004) AIChE J. , vol.50 , pp. 3248-3256
    • Jung, M.Y.L.1    Gunawan, R.2    Braatz, R.D.3    Seebauer, E.G.4
  • 139
    • 0033097801 scopus 로고    scopus 로고
    • Copper on-Chip Interconnections - A Breakthrough in Electrodeposition to Make Better Chips
    • Andricacos, P.C. (1999) Copper on-Chip Interconnections - A Breakthrough in Electrodeposition to Make Better Chips. Electrochem. Soc. Interface, 8, 32-37.
    • (1999) Electrochem. Soc. Interface , vol.8 , pp. 32-37
    • Andricacos, P.C.1
  • 141
    • 0042529428 scopus 로고    scopus 로고
    • Fundamental Aspects and Applications of Electrochemical Microfabrication
    • Datta, M. and Landolt, D. (2000) Fundamental Aspects and Applications of Electrochemical Microfabrication. Electrochim. Acta, 45, 2535-2558.
    • (2000) Electrochim. Acta , vol.45 , pp. 2535-2558
    • Datta, M.1    Landolt, D.2
  • 142
    • 2042442448 scopus 로고    scopus 로고
    • Role ofAdditives for Copper Damascene Electrodeposition:Experimental Study on Inhibition and Acceleration Effects
    • Kondo, K., Matsumoto, T. and Watanabe, K. (2004) Role ofAdditives for Copper Damascene Electrodeposition:Experimental Study on Inhibition and Acceleration Effects. J. Electrochem. Soc., 151, C250-C255.
    • (2004) J. Electrochem. Soc. , vol.151 , pp. C250-C255
    • Kondo, K.1    Matsumoto, T.2    Watanabe, K.3
  • 145
    • 2042469471 scopus 로고    scopus 로고
    • Electrodeposition of Copper in the SPS-PEG-Cl Additive Sytem
    • Moffat, T.P., Wheeler, D. and Josell, D. (2004) Electrodeposition of Copper in the SPS-PEG-Cl Additive Sytem. J. Electrochem. Soc., 151, C262-C271.
    • (2004) J. Electrochem. Soc. , vol.151 , pp. C262-C271
    • Moffat, T.P.1    Wheeler, D.2    Josell, D.3
  • 146
    • 0038608146 scopus 로고    scopus 로고
    • Additive Behavior During Copper Electrodeposition in Solutions Containing Cl_, PEG, and SPS
    • Tan, M. and Harb, J.N. (2003) Additive Behavior During Copper Electrodeposition in Solutions Containing Cl_, PEG, and SPS. J. Electrochem. Soc., 150, C420-C425.
    • (2003) J. Electrochem. Soc. , vol.150 , pp. C420-C425
    • Tan, M.1    Harb, J.N.2
  • 147
    • 0033906753 scopus 로고    scopus 로고
    • Theory of Filling of High-Aspect Ratio Trenches and Vias in Presence ofAdditives
    • West, A.C. (2000) Theory of Filling of High-Aspect Ratio Trenches and Vias in Presence ofAdditives. J. Electrochem. Soc., 147, 227-232.
    • (2000) J. Electrochem. Soc. , vol.147 , pp. 227-232
    • West, A.C.1
  • 148
    • 17644370354 scopus 로고    scopus 로고
    • Quantum Chemistry Study of Monomer Electronic Properties in Water Clusters and Liquid Water and Methanol
    • Tu, Y and Laaksonen, A. (2005) Quantum Chemistry Study of Monomer Electronic Properties in Water Clusters and Liquid Water and Methanol. Int. J. Quantum Chem., 102, 888-896.
    • (2005) Int. J. Quantum Chem. , vol.102 , pp. 888-896
    • Tu, Y.1    Laaksonen, A.2
  • 149
    • 0037182850 scopus 로고    scopus 로고
    • The Nature and Transport Mechanism of Hydrated Hydroxide Ions in Aqueous Solution
    • Tuckerman, M.E., Marx, D. and Parrinello, M. (2002) The Nature and Transport Mechanism of Hydrated Hydroxide Ions in Aqueous Solution. Nature, 417, 925-929.
    • (2002) Nature , vol.417 , pp. 925-929
    • Tuckerman, M.E.1    Marx, D.2    Parrinello, M.3
  • 151
    • 18744410128 scopus 로고    scopus 로고
    • Structure and Ultrafast Dynamics of Liquid Water: A Quantum Mechanics/Molecular Mechanics Molecular Dynamics Simulations Study
    • Xenides, D., Randolf, B.R. and Rode, B.M. (2005) Structure and Ultrafast Dynamics of Liquid Water: A Quantum Mechanics/Molecular Mechanics Molecular Dynamics Simulations Study. J. Chem. Phys., 122, 147506.
    • (2005) J. Chem. Phys. , vol.122 , pp. 147506
    • Xenides, D.1    Randolf, B.R.2    Rode, B.M.3
  • 153
    • 0031121268 scopus 로고    scopus 로고
    • Choosing the Right Model: Case Studies on the Use of Statistical Model Discrimination Experiments
    • Burke, A.L., Duever, T.A. and Penlidis, A. (1997) Choosing the Right Model: Case Studies on the Use of Statistical Model Discrimination Experiments. Can. J. Chem. Eng., 75, 422-436.
    • (1997) Can. J. Chem. Eng. , vol.75 , pp. 422-436
    • Burke, A.L.1    Duever, T.A.2    Penlidis, A.3
  • 154
    • 0037138084 scopus 로고    scopus 로고
    • Identification of Kinetic Parameters in a Multidimensional Crystallization Process
    • Gunawan, R., Ma, D.L., Fujiwara, M. and Braatz, R.D. (2002) Identification of Kinetic Parameters in a Multidimensional Crystallization Process. Int. J. Mod. Phys. B, 16, 367-374.
    • (2002) Int. J. Mod. Phys. , vol.16 B , pp. 367-374
    • Gunawan, R.1    Ma, D.L.2    Fujiwara, M.3    Braatz, R.D.4
  • 155
    • 0012691839 scopus 로고
    • The Use of Statistical Methods to Build Mathematical Models ofChemical Reacting Systems
    • Reilly, P.M. and Blau, G.E. (1974) The Use of Statistical Methods to Build Mathematical Models ofChemical Reacting Systems. Can. J. Chem. Eng., 52, 289-299.
    • (1974) Can. J. Chem. Eng. , vol.52 , pp. 289-299
    • Reilly, P.M.1    Blau, G.E.2
  • 157
    • 34848817161 scopus 로고    scopus 로고
    • Effect of Additives on Shape Evolution during Electrodeposition. Part II: Parameter Estimation from Roughness Evolution Experiments
    • Rusli, E., Xue, F., Drews, T.O., Vereecken, P., Andracacos, P., Deligianni, H., Braatz, R.D. and Alkire, R.C. (2007) Effect of Additives on Shape Evolution during Electrodeposition. Part II: Parameter Estimation from Roughness Evolution Experiments. J. Electrochem. Soc., 154, D584-D597.
    • (2007) J. Electrochem. Soc. , vol.154 , pp. D584-D597
    • Rusli, E.1    Xue, F.2    Drews, T.O.3    Vereecken, P.4    Andracacos, P.5    Deligianni, H.6    Braatz, R.D.7    Alkire, R.C.8
  • 158
    • 85018612131 scopus 로고    scopus 로고
    • PhD Thesis, Universityof Illinois, Urbana-Champaign
    • Rusli, E. (2006). PhD Thesis, Universityof Illinois, Urbana-Champaign.
    • (2006)
    • Rusli, E.1
  • 159
    • 85018541065 scopus 로고    scopus 로고
    • PhD Thesis, University of Illinois, Urbana-Champaign
    • Xue, F. (2006) PhD Thesis, University of Illinois, Urbana-Champaign.
    • (2006)
    • Xue, F.1
  • 160
    • 0037454108 scopus 로고    scopus 로고
    • Parameter Optimization of Molecular Models: Application to Surface Kinetics
    • Raimondeau, S., Aghalayam, P., Mhadeshwar, A.B. and Vlachos, D.G. (2003) Parameter Optimization of Molecular Models: Application to Surface Kinetics. Ind. Eng. Chem. Res., 42, 1174-1183.
    • (2003) Ind. Eng. Chem. Res. , vol.42 , pp. 1174-1183
    • Raimondeau, S.1    Aghalayam, P.2    Mhadeshwar, A.B.3    Vlachos, D.G.4
  • 161
    • 0242593845 scopus 로고    scopus 로고
    • Parameter Sensitivity Analysis of Monte Carlo Simulations of Copper Electrodeposition with Multiple Additives
    • Drews, T.O., Braatz, R.D. and Alkire, R.C. (2003) Parameter Sensitivity Analysis of Monte Carlo Simulations of Copper Electrodeposition with Multiple Additives. J. Electrochem. Soc., 150, C807-C812.
    • (2003) J. Electrochem. Soc. , vol.150 , pp. C807-C812
    • Drews, T.O.1    Braatz, R.D.2    Alkire, R.C.3
  • 162
    • 0038824929 scopus 로고    scopus 로고
    • Robust Nonlinear Model Predictive Control of BatchProcesses
    • Nagy, Z.K. and Braatz, R.D. (2003) Robust Nonlinear Model Predictive Control of BatchProcesses. AIChEJ., 49, 1776-1786.
    • (2003) AIChEJ. , vol.49 , pp. 1776-1786
    • Nagy, Z.K.1    Braatz, R.D.2
  • 163
    • 0000016888 scopus 로고    scopus 로고
    • Continuum Based Modeling of Silicon Integrated Circuit Processing: An Object Oriented Approach
    • Law, M.E. and Cea, S.M. (1998) Continuum Based Modeling of Silicon Integrated Circuit Processing: An Object Oriented Approach. Comput. Mater. Sci., 12, 289-308.
    • (1998) Comput. Mater. Sci. , vol.12 , pp. 289-308
    • Law, M.E.1    Cea, S.M.2
  • 165
    • 0043240532 scopus 로고    scopus 로고
    • Maximum A Posteriori Estimation of Transient Enhanced Diffusion Energetics
    • Gunawan, R., Jung, M.Y.L., Seebauer, E.G. and Braatz, R.D. (2003a) Maximum A Posteriori Estimation of Transient Enhanced Diffusion Energetics. AIChEJ., 49, 2114-2123.
    • (2003) AIChEJ. , vol.49 , pp. 2114-2123
    • Gunawan, R.1    Jung, M.Y.L.2    Seebauer, E.G.3    Braatz, R.D.4
  • 167
    • 0345932933 scopus 로고    scopus 로고
    • Parameter Sensitivity Analysis of Boron Activation and Transient Enhanced Diffusion in Silicon
    • Gunawan, R., Jung, M.Y.L., Seebauer, E.G. and Braatz, R.D. (2003b) Parameter Sensitivity Analysis of Boron Activation and Transient Enhanced Diffusion in Silicon. J. Electrochem. Soc., 150, G758-G765.
    • (2003) J. Electrochem. Soc. , vol.150 , pp. G758-G765
    • Gunawan, R.1    Jung, M.Y.L.2    Seebauer, E.G.3    Braatz, R.D.4
  • 168
    • 0347651393 scopus 로고    scopus 로고
    • Ramp-rate Effects in Transient Enhanced Diffusion and Dopant Activation
    • Jung, M.Y.L., Gunawan, R., Braatz, R.D. and Seebauer, E.G. (2003) Ramp-rate Effects in Transient Enhanced Diffusion and Dopant Activation. J. Electrochem. Soc., 150, G838-G842.
    • (2003) J. Electrochem. Soc. , vol.150 , pp. G838-G842
    • Jung, M.Y.L.1    Gunawan, R.2    Braatz, R.D.3    Seebauer, E.G.4
  • 169
    • 0842268429 scopus 로고    scopus 로고
    • A Simplified Picture for Transient Enhanced Diffusion of Boron in Silicon
    • Jung, M.Y.L., Gunawan, R., Braatz, R.D. and Seebauer, E.G. (2004c) A Simplified Picture for Transient Enhanced Diffusion of Boron in Silicon. J. Electrochem. Soc., 151, G1-G7.
    • (2004) J. Electrochem. Soc. , vol.151 , pp. G1-G7
    • Jung, M.Y.L.1    Gunawan, R.2    Braatz, R.D.3    Seebauer, E.G.4
  • 170
    • 0347379704 scopus 로고    scopus 로고
    • Optimal Control of Transient Enhanced Diffusion in a Semiconductor Process
    • Gunawan, R., Jung, M.Y.L., Seebauer, E.G. and Braatz, R.D. (2004) Optimal Control of Transient Enhanced Diffusion in a Semiconductor Process. J. Process Contr., 14, 423-430.
    • (2004) J. Process Contr. , vol.14 , pp. 423-430
    • Gunawan, R.1    Jung, M.Y.L.2    Seebauer, E.G.3    Braatz, R.D.4
  • 171
    • 0942280738 scopus 로고    scopus 로고
    • Mechanism for Coupling between Properties of Interfaces and Bulk Semiconductors
    • Dev, K., Jung, M.Y.L., Gunawan, R., Braatz, R.D. and Seebauer, E.G. (2003) Mechanism for Coupling between Properties of Interfaces and Bulk Semiconductors. Phys. Rev. B, 68, 195311 (1-6).
    • (2003) Phys. Rev. B , vol.68 , Issue.1-6 , pp. 195311
    • Dev, K.1    Jung, M.Y.L.2    Gunawan, R.3    Braatz, R.D.4    Seebauer, E.G.5
  • 172
    • 0942289528 scopus 로고    scopus 로고
    • 2 Interface Induced by Low-Energy Ion Bombardment
    • 2 Interface Induced by Low-Energy Ion Bombardment. Surf. Sci., 550, 185-191.
    • (2004) Surf. Sci. , vol.550 , pp. 185-191
    • Dev, K.1    Seebauer, E.G.2
  • 173
    • 1142292379 scopus 로고    scopus 로고
    • Effect of Near-Surface Band Bending on Dopant Profiles in Ion-Implanted Silicon
    • Jung, M.Y.L., Gunawan, R., Braatz, R.D. and Seebauer, E.G. (2004b) Effect of Near-Surface Band Bending on Dopant Profiles in Ion-Implanted Silicon. J. Appl. Phys., 95, 1134-1139.
    • (2004) J. Appl. Phys. , vol.95 , pp. 1134-1139
    • Jung, M.Y.L.1    Gunawan, R.2    Braatz, R.D.3    Seebauer, E.G.4
  • 175
    • 22944490860 scopus 로고    scopus 로고
    • A Method for Quantifying Annihilation Rates of Bulk Point Defects at Surfaces
    • Kwok, C.T.M., Dev, K., Braatz, R.D. and Seebauer, E.G. (2005) A Method for Quantifying Annihilation Rates of Bulk Point Defects at Surfaces. J. Appl. Phys., 98, 013524.
    • (2005) J. Appl. Phys. , vol.98 , pp. 013524
    • Kwok, C.T.M.1    Dev, K.2    Braatz, R.D.3    Seebauer, E.G.4
  • 178
    • 85018597166 scopus 로고    scopus 로고
    • Methods for Controlling Dopant Concentration and Activation in Semiconductor Structures
    • US Application 20060024928
    • Seebauer, E.G., Braatz, R.D., Jung, M.Y.L. and Gunawan, R. (2005) Methods for Controlling Dopant Concentration and Activation in Semiconductor Structures, US Application 20060024928.
    • (2005)
    • Seebauer, E.G.1    Braatz, R.D.2    Jung, M.Y.L.3    Gunawan, R.4
  • 179
    • 4243057262 scopus 로고    scopus 로고
    • Electrochemical Engineering in an Age of Discovery and Innovation
    • Alkire, R.C. and Braatz, R.D. (2004) Electrochemical Engineering in an Age of Discovery and Innovation. AIChE J., 50, 2000-2007.
    • (2004) AIChE J. , vol.50 , pp. 2000-2007
    • Alkire, R.C.1    Braatz, R.D.2
  • 180
    • 36549101828 scopus 로고
    • Large-Signal Time-Domain Modeling of Low-Pressure rf Glow-Discharges
    • Barnes, M.S., Colter, T.J. and Elta, M.E. (1987) Large-Signal Time-Domain Modeling of Low-Pressure rf Glow-Discharges. J. Appl. Phys., 61, 81-89.
    • (1987) J. Appl. Phys. , vol.61 , pp. 81-89
    • Barnes, M.S.1    Colter, T.J.2    Elta, M.E.3
  • 182
    • 1042302790 scopus 로고    scopus 로고
    • Coupled Mesoscale-Continuum Simulations of Copper Electrodeposition in a Trench
    • Drews, T.O., Webb, E.G., Ma, D.L., Alameda, J., Braatz, R.D. and Alkire, R.C. (2005b) Coupled Mesoscale-Continuum Simulations of Copper Electrodeposition in a Trench. AIChE J., 50, 226-240.
    • (2005) AIChE J. , vol.50 , pp. 226-240
    • Drews, T.O.1    Webb, E.G.2    Ma, D.L.3    Alameda, J.4    Braatz, R.D.5    Alkire, R.C.6
  • 184
    • 35448973286 scopus 로고    scopus 로고
    • Monte Carlo Simulation of Kinetically-limited Electrodeposition on a Surface with Metal Seed Clusters
    • Drews, T.O., Braatz, R.D. and Alkire, R.C. (2007) Monte Carlo Simulation of Kinetically-limited Electrodeposition on a Surface with Metal Seed Clusters. Z. Phys. Chem., 221, 1287-1305.
    • (2007) Z. Phys. Chem. , vol.221 , pp. 1287-1305
    • Drews, T.O.1    Braatz, R.D.2    Alkire, R.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.