Multiscale modeling of thin film growth

Current Opinion in Solid State and Materials Science

Volumn 3, Issue 6, 1998, Pages 562-569

  Jensen, Klavs F ^a   Rodgers, Seth T ^a   Venkataramani, Rajesh ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

CVD chemical vapor deposition; DFT density functional theory; FEM finite element method; KMC kinetic MC; MC Montre Carlo; MD molecular dynamics; PVD physical vapor deposition

Indexed keywords

EID: 0001339824     PISSN: 13590286     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-0286(98)80026-0     Document Type: Article

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