Molecular dynamics-based ion-surface interaction models for ionized physical vapor deposition feature scale simulations

Applied Physics Letters

Volumn 73, Issue 26, 1998, Pages 3860-3862

  Coronell, Daniel G ^a   Hansen, David E ^b   Voter, Arthur F ^b   Liu, Chun Li ^c   Liu, Xiang Yang ^c   Kress, Joel D ^b  

^a MOTOROLA INC   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

^c MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001460414     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122917     Document Type: Article

References (13)

1. T. S. Cale and G. B. Raupp, J. Vac. Sci. Technol. B 8, 1242 (1990).
2. R. N. Tait, T. Smy, and M. J. Brett, Thin Solid Films 226, 196 (1993).
3. D. S. Bang, J. P. McVittie, K. C. Saraswat, J. A. Iacoponi, J. Gray, Z. Krivokapic, and K. A. Littau, Mater. Res. Soc. Symp. Proc. 389, 173 (1995).
4. D. G. Coronell, E. W. Egan, G. Hamilton, A. Jain, R. Venkatraman, and B. Weitzman, Thin Solid Films (in press).
5. S. M. Rossnagel and J. Hopwood, J. Vac. Sci. Technol. B 12, 449 (1994).
6. J. C. Arnold, T. J. Dalton, H. H. Sawin, S. Swan, and D. Corliss, J. Electrochem. Soc. 140, 2395 (1993).
7. M. S. Daw and M. I. Baskes, Phys. Rev. B 29, 6443 (1984).
8. M. S. Daw, S. M. Foiles, and M. I. Baskes, Mater. Sci. Rep. 9, 251 (1993).
9. A. F. Voter, Phys. Rev. B 57, 13985 (1998);
10. A. F. Voter, Los Alamos Unclassified Technical Report LA-UR 93-3901 (1993).
11. D. E. Hanson, A. F. Voter, and J. D. Kress, J. Appl. Phys. 82, 3662 (1997).
12. N. Matsunami, Y. Yamamura, Y. Itikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Morita, R. Shimuzu, and H. Tawara, At. Data Nucl. Data Tables 31, 1 (1984).
13. T. S. Cale, J. Vac. Sci. Technol. B 9, 2551 (1991).