Atomic scale computer aided design for novel semiconductor devices

Computational Materials Science

Volumn 27, Issue 1-2, 2003, Pages 10-15

  La Magna, A ^a   Alippi, P ^a   Colombo, L ^b   Strobel, Matthias ^a  

^a CNR IMM   (Italy)

^b UNIVERSITY OF CAGLIARI   (Italy)

Author keywords

Defects; Doping; First principles calculation; Kinetic Monte Carlo; Process simulations; Tight binding molecular dynamics

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; KINETIC THEORY; MOLECULAR DYNAMICS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DOPING;

ATOMIC SCALE DESIGN;

COMPUTER AIDED DESIGN;

EID: 0037371813     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0256(02)00418-4     Document Type: Conference Paper

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