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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 1, 2002, Pages 407-413

Technology CAD: Device simulation and characterization

(2) Grasser, T a Selberherr, S a

a VIENNA UNIVERSITY OF TECHNOLOGY (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CALIBRATION; COMPUTER SIMULATION; MATHEMATICAL MODELS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DOPING; ULSI CIRCUITS;

INVERSE MODELING;

COMPUTER AIDED DESIGN;

EID: 0036122650 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1445162 Document Type: Conference Paper

Times cited : (7)

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