-
1
-
-
44449085818
-
-
10.1109/LED.2007.903405
-
G. Nicholas, T. J. Grasby, D. Lgoni, C. S. Beer, J. Parsons, M Meuris, and M. M. Heyns, IEEE Electron Dev. Lett. 28, 825 (2007). 10.1109/LED.2007. 903405
-
(2007)
IEEE Electron Dev. Lett.
, vol.28
, pp. 825
-
-
Nicholas, G.1
Grasby, T.J.2
Lgoni, D.3
Beer, C.S.4
Parsons, J.5
Meuris, M.6
Heyns, M.M.7
-
2
-
-
34047272089
-
Device structures and carrier transport properties of advanced CMOS using high mobility channels
-
DOI 10.1016/j.sse.2007.02.017, PII S0038110107000512
-
S. Takagi, T. Tezuka, T. Irisawa, S. Nakaharai, T. Numata, K. Usuda, N. Sugiyama, M. Shichijo, R. Nakane, and S. Sugahara, Solid-State Electron. 51, 526 (2007). 10.1016/j.sse.2007.02.017 (Pubitemid 46550573)
-
(2007)
Solid-State Electronics
, vol.51
, Issue.SPEC. ISS.
, pp. 526-536
-
-
Takagi, S.1
Tezuka, T.2
Irisawa, T.3
Nakaharai, S.4
Numata, T.5
Usuda, K.6
Sugiyama, N.7
Shichijo, M.8
Nakane, R.9
Sugahara, S.10
-
3
-
-
73849108382
-
-
10.1063/1.3266006
-
E. J. Kim, E. Chagarov, J. Cagnon, A. C. Kummel, P. M. Asbeck, S. Stemmer, K. C. Saraswat, and P. C. McIntyre, J. Appl. Phys. 106, 124508 (2009). 10.1063/1.3266006
-
(2009)
J. Appl. Phys.
, vol.106
, pp. 124508
-
-
Kim, E.J.1
Chagarov, E.2
Cagnon, J.3
Kummel, A.C.4
Asbeck, P.M.5
Stemmer, S.6
Saraswat, K.C.7
McIntyre, P.C.8
-
5
-
-
33947309904
-
2 interfaces in high- k metal-oxide-semiconductor gate stacks: Local electronic structure
-
DOI 10.1063/1.2712785
-
J.-H. Ha, K.-I. Seo, P. C. McIntyre, K. C. Sarawat, and K. Cho, Appl. Phys. Lett. 90, 112911 (2007). 10.1063/1.2712785 (Pubitemid 46439819)
-
(2007)
Applied Physics Letters
, vol.90
, Issue.11
, pp. 112911
-
-
Ha, J.-H.1
Seo, K.-I.2
McIntyre, P.C.3
Sarawat, K.C.4
Cho, K.5
-
6
-
-
34248995628
-
First principles investigation of defects at interfaces between silicon and amorphous high-κ oxides
-
DOI 10.1016/j.mee.2007.04.075, PII S0167931707004261, INFOS 2007
-
P. Broqvist and A. Pasquarello, Microelectron. Eng. 84, 2022 (2007). 10.1016/j.mee.2007.04.075 (Pubitemid 46783938)
-
(2007)
Microelectronic Engineering
, vol.84
, Issue.9-10
, pp. 2022-2027
-
-
Broqvist, P.1
Pasquarello, A.2
-
8
-
-
41649110238
-
Band alignments and defect levels in Si-Hf O2 gate stacks: Oxygen vacancy and Fermi-level pinning
-
DOI 10.1063/1.2907704
-
P. Broqvist, A. Alkauskas, and A. Pasquarello, Appl. Phys. Lett. 92, 132911 (2008). 10.1063/1.2907704 (Pubitemid 351483672)
-
(2008)
Applied Physics Letters
, vol.92
, Issue.13
, pp. 132911
-
-
Broqvist, P.1
Alkauskas, A.2
Pasquarello, A.3
-
11
-
-
78650590738
-
-
10.1021/jp107880r
-
W. C. Wang, K. Xiong, R. M. Wallace, and K. Cho, J. Phys. Chem. C 114, 22610 (2010). 10.1021/jp107880r
-
(2010)
J. Phys. Chem. C
, vol.114
, pp. 22610
-
-
Wang, W.C.1
Xiong, K.2
Wallace, R.M.3
Cho, K.4
-
12
-
-
77955661333
-
-
10.1016/j.apsusc.2010.04.048
-
W. C. Wang, K. Xiong, G. Lee, M. Huang, R. M. Wallace, and K. Cho, Appl. Surf. Sci. 256, 6569 (2010). 10.1016/j.apsusc.2010.04.048
-
(2010)
Appl. Surf. Sci.
, vol.256
, pp. 6569
-
-
Wang, W.C.1
Xiong, K.2
Lee, G.3
Huang, M.4
Wallace, R.M.5
Cho, K.6
-
16
-
-
70349982825
-
-
10.1016/j.susc.2009.08.009
-
E. A. Chagarov and A. C. Kummel, Surf. Sci. 603, 3191 (2009). 10.1016/j.susc.2009.08.009
-
(2009)
Surf. Sci.
, vol.603
, pp. 3191
-
-
Chagarov, E.A.1
Kummel, A.C.2
-
17
-
-
84855282228
-
-
SUPPL.ementary material at E-JCPSA6-135-048141 for details of amorphous sample generation and oxideInGaAs DFT-MD annealing
-
See SUPPL.ementary material at http://dx.doi.org/10.1063/1.3657439 E-JCPSA6-135-048141 for details of amorphous sample generation and oxideInGaAs DFT-MD annealing.
-
-
-
-
19
-
-
0031548428
-
-
10.1016/S0921-4526(96)01044-7
-
P. Lamparter and R. Kniep, Physica B 234-236, 405 (1997). 10.1016/S0921-4526(96)01044-7
-
(1997)
Physica B
, vol.234-236
, pp. 405
-
-
Lamparter, P.1
Kniep, R.2
-
20
-
-
33644516912
-
Theoretical study on dielectric response of amorphous alumina
-
DOI 10.1103/PhysRevB.73.054108, 054108
-
H. Momida, T. Hamada, and Y. Takagi, Phys. Rev. B 73, 054108 (2006). 10.1103/PhysRevB.73.054108 (Pubitemid 43292573)
-
(2006)
Physical Review B - Condensed Matter and Materials Physics
, vol.73
, Issue.5
, pp. 1-10
-
-
Momida, H.1
Hamada, T.2
Takagi, Y.3
Yamamoto, T.4
Uda, T.5
Ohno, T.6
-
21
-
-
16344389373
-
2 from ab initio molecular dynamics
-
DOI 10.1103/PhysRevB.71.085107, 085107
-
X. Zhao, D. Ceresoli, and D. Vanderbilt, Phys. Rev. B 71, 085107 (2005). 10.1103/PhysRevB.71.085107 (Pubitemid 40470929)
-
(2005)
Physical Review B - Condensed Matter and Materials Physics
, vol.71
, Issue.8
, pp. 0851071-08510710
-
-
Zhao, X.1
Ceresoli, D.2
Vanderbilt, D.3
-
22
-
-
21844462549
-
2
-
DOI 10.1016/j.tsf.2004.11.232, PII S0040609004019066
-
D. Vanderbilt, X. Zhao, and D. Ceresoli, Thin Solid Films 486, 125 (2005). 10.1016/j.tsf.2004.11.232 (Pubitemid 40952553)
-
(2005)
Thin Solid Films
, vol.486
, Issue.1-2
, pp. 125-128
-
-
Vanderbilt, D.1
Zhao, X.2
Ceresoli, D.3
-
24
-
-
23444458761
-
2 films
-
DOI 10.1016/j.mee.2005.03.056, PII S0167931705001322, The Proceedings of the 2nd International Symposium on Nano- and Giga-Challenges in Microelectronics
-
V. Gritsenko, D. Gritsenko, S. Shaimeev, V. Aliev, K. Nasyrov, S. Erenburg, V. Tapilin, H. Wong, M. C. Poon, J. H. Lee, J. W. Lee, and C. W. Kim, Microelectron. Eng. 81, 524 (2005). 10.1016/j.mee.2005.03.056 (Pubitemid 41108175)
-
(2005)
Microelectronic Engineering
, vol.81
, Issue.2-4
, pp. 524-529
-
-
Gritsenko, V.1
Gritsenko, D.2
Shaimeev, S.3
Aliev, V.4
Nasyrov, K.5
Erenburg, S.6
Tapilin, V.7
Wong, H.8
Poon, M.C.9
Lee, J.H.10
Lee, J.-W.11
Kim, C.W.12
-
25
-
-
33746403317
-
2
-
DOI 10.1134/S1063776106050128
-
A. V. Shaposhnikov, D. V. Gritsenko, I. P. Petrenko, O. P. Pchelyakov, V. A. Gritsenko, S. B. Erenburg, N. V. Bausk, A. M. Badalyan, Yu. V. Shubin, T. P. Smirnova, H. Wong, and C. W. Kim, J. Exp. Theor. Phys. 102, 799 (2006). 10.1134/S1063776106050128 (Pubitemid 44124153)
-
(2006)
Journal of Experimental and Theoretical Physics
, vol.102
, Issue.5
, pp. 799-809
-
-
Shaposhnikov, A.V.1
Gritsenko, D.V.2
Petrenko, I.P.3
Pchelyakov, O.P.4
Gritsenko, V.A.5
Erenburg, S.B.6
Bausk, N.V.7
Badalyan, A.M.8
Shubin, Yu.V.9
Smirnova, T.P.10
Wong, H.11
Kim, C.W.12
-
26
-
-
0035413106
-
-
10.1111/j.1151-2916.2001.tb00885.x
-
P. Schelling, S. Phillpot, and D. Wolf, J. Am. Ceram. Soc. 84 (7), 1609 (2001). 10.1111/j.1151-2916.2001.tb00885.x
-
(2001)
J. Am. Ceram. Soc.
, vol.84
, Issue.7
, pp. 1609
-
-
Schelling, P.1
Phillpot, S.2
Wolf, D.3
-
30
-
-
23444458761
-
2 films
-
DOI 10.1016/j.mee.2005.03.056, PII S0167931705001322, The Proceedings of the 2nd International Symposium on Nano- and Giga-Challenges in Microelectronics
-
V. Gritsenkoa, D. Gritsenkoa, S. Shaimeeva, V. Alieva, K. Nasyrova, S. Erenburgb, V. Tapilinc, H. Wongd, M. C. Poone, J. H. Leef, J.-W. Leef, and C. W. Kimf, Microelectron. Eng. 81, 524 (2005). 10.1016/j.mee.2005.03.056 (Pubitemid 41108175)
-
(2005)
Microelectronic Engineering
, vol.81
, Issue.2-4
, pp. 524-529
-
-
Gritsenko, V.1
Gritsenko, D.2
Shaimeev, S.3
Aliev, V.4
Nasyrov, K.5
Erenburg, S.6
Tapilin, V.7
Wong, H.8
Poon, M.C.9
Lee, J.H.10
Lee, J.-W.11
Kim, C.W.12
-
31
-
-
33947305102
-
Atomic and electronic structure of amorphous and crystalline hafnium oxide: X-ray photoelectron spectroscopy and density functional calculations
-
DOI 10.1063/1.2464184
-
T. V. Perevalov, V. A. Gritsenko, S. B. Erenburg, A. M. Badalyan, H. Wong, and C. W. Kim, J. Appl. Phys. 101, 053704 (2007). 10.1063/1.2464184 (Pubitemid 46439966)
-
(2007)
Journal of Applied Physics
, vol.101
, Issue.5
, pp. 053704
-
-
Perevalov, T.V.1
Gritsenko, V.A.2
Erenburg, S.B.3
Badalyan, A.M.4
Wong, H.5
Kim, C.W.6
-
33
-
-
4644357044
-
y/n-Si CMOS gate stack: A combined photoemission and inverse photoemission study
-
DOI 10.1002/pssb.200404945
-
S. Sayan, R. A. Bartynski, X. Zhao, E. P. Gusev, D. Vanderbilt, M. Croft, M. Banaszak-Holl, and E. Garfunkel, Phys. Status Solidi B 241, 2246 (2004). 10.1002/pssb.200404945 (Pubitemid 39288393)
-
(2004)
Physica Status Solidi (B) Basic Research
, vol.241
, Issue.10
, pp. 2246-2252
-
-
Sayan, S.1
Bartynski, R.A.2
Zhao, X.3
Gusev, E.P.4
Vanderbilt, D.5
Croft, M.6
Holl, M.B.7
Garfunkel, E.8
-
34
-
-
49649120615
-
-
10.1103/PhysRevB.78.085114
-
E. Bersch, S. Rangan, R. A. Bartynski, E. Garfunkel, and E. Vescovo, Phys. Rev. B 78, 085114 (2008). 10.1103/PhysRevB.78.085114
-
(2008)
Phys. Rev. B
, vol.78
, pp. 085114
-
-
Bersch, E.1
Rangan, S.2
Bartynski, R.A.3
Garfunkel, E.4
Vescovo, E.5
-
37
-
-
20444478641
-
Similarities in photoluminescence in hafnia and zirconia induced by ultraviolet photons
-
DOI 10.1063/1.1856220, 054104
-
T. Ito, M. Maeda, K. Nakamura, H. Kato, and Y. Ohki, J. Appl. Phys. 97, 054104 (2005). 10.1063/1.1856220 (Pubitemid 40818251)
-
(2005)
Journal of Applied Physics
, vol.97
, Issue.5
, pp. 1-7
-
-
Ito, T.1
Maeda, M.2
Nakamura, K.3
Kato, H.4
Ohki, Y.5
-
38
-
-
33947322358
-
Crystal structure and band gap determination of Hf O2 thin films
-
DOI 10.1063/1.2697551
-
M. C. Cheynet, S. Pokrant, F. D. Tichelaar, and J.-L. Rouviere, J. Appl. Phys. 101, 054101 (2007). 10.1063/1.2697551 (Pubitemid 46439994)
-
(2007)
Journal of Applied Physics
, vol.101
, Issue.5
, pp. 054101
-
-
Cheynet, M.C.1
Pokrant, S.2
Tichelaar, F.D.3
Rouvire, J.-L.4
-
39
-
-
77958031657
-
-
10.1016/j.susc.2010.07.001
-
J. Shen, J. B. Clemens, E. Chagarov, D. L. Feldwinn, W. Melitz, T. Song, S. R. Bishop, A. C. Kummel, and R. Droopad, Surf. Sci. 604, 1757 (2010). 10.1016/j.susc.2010.07.001
-
(2010)
Surf. Sci.
, vol.604
, pp. 1757
-
-
Shen, J.1
Clemens, J.B.2
Chagarov, E.3
Feldwinn, D.L.4
Melitz, W.5
Song, T.6
Bishop, S.R.7
Kummel, A.C.8
Droopad, R.9
-
40
-
-
0000948663
-
-
10.1143/JPSJ.59.3455
-
K. Shiraishi, J. Phys. Soc. Jpn. 59, 3455 (1990). 10.1143/JPSJ.59.3455
-
(1990)
J. Phys. Soc. Jpn.
, vol.59
, pp. 3455
-
-
Shiraishi, K.1
-
41
-
-
80053561548
-
-
G. Goryl, D. Toton, M. Goryl, N. Tomaszewska, and J. J. Kolodziej, Surf. Sci. 605, 2073 (2011).
-
(2011)
Surf. Sci.
, vol.605
, pp. 2073
-
-
Goryl, G.1
Toton, D.2
Goryl, M.3
Tomaszewska, N.4
Kolodziej, J.J.5
-
42
-
-
18544397105
-
Subsurface dimerization in III-V semiconductor (001) surfaces
-
DOI 10.1103/PhysRevLett.86.3586
-
C. Kumpf, L. D. Marks, D. Ellis, D. Smilgies, E. Landemark, M. Nielsen, R. Feidenhans, J. Zegenhagen, O. Bunk, J. H. Zeysing, Y. Su, and R. L. Johnson, Phys. Rev. Lett. 86, 3586 (2001). 10.1103/PhysRevLett.86.3586 (Pubitemid 32416182)
-
(2001)
Physical Review Letters
, vol.86
, Issue.16
, pp. 3586-3589
-
-
Kumpf, C.1
Marks, L.D.2
Ellis, D.3
Smilgies, D.4
Landemark, E.5
Nielsen, M.6
Feidenhans'l, R.7
Zegenhagen, J.8
Bunk, O.9
Zeysing, J.H.10
Su, Y.11
Johnson, R.L.12
-
43
-
-
0002467378
-
-
10.1006/jcph.1995.1039
-
S. J. Plimpton, J. Comput. Phys. 117, 1 (1995); 10.1006/jcph.1995.1039
-
(1995)
J. Comput. Phys.
, vol.117
, pp. 1
-
-
Plimpton, S.J.1
-
44
-
-
84855285051
-
-
for information about
-
see http://lammps.sandia.gov/index.html for information about LAMMPS code.
-
LAMMPS Code
-
-
-
45
-
-
0008631747
-
-
10.1180/minmag.1994.58A.2.34
-
M. Matsui, Miner. Mag. 58A, 571 (1994). 10.1180/minmag.1994.58A.2.34
-
(1994)
Miner. Mag.
, vol.58
, pp. 571
-
-
Matsui, M.1
-
46
-
-
0030190741
-
Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set
-
DOI 10.1016/0927-0256(96)00008-0, PII S0927025696000080
-
G. Kresse and J. Furthmüller, Comput. Mater. Sci. 6, 15 (1996). 10.1016/0927-0256(96)00008-0 (Pubitemid 126412269)
-
(1996)
Computational Materials Science
, vol.6
, Issue.1
, pp. 15-50
-
-
Kresse, G.1
Furthmuller, J.2
-
48
-
-
25744460922
-
-
10.1103/PhysRevB.50.17953
-
P. E. Blöchl, Phys. Rev. B 50, 17953 (1994). 10.1103/PhysRevB.50. 17953
-
(1994)
Phys. Rev. B
, vol.50
, pp. 17953
-
-
Blöchl, P.E.1
-
49
-
-
0011236321
-
-
10.1103/PhysRevB.59.1758
-
G. Kresse and J. Joubert, Phys. Rev. B 59, 1758 (1999). 10.1103/PhysRevB.59.1758
-
(1999)
Phys. Rev. B
, vol.59
, pp. 1758
-
-
Kresse, G.1
Joubert, J.2
-
54
-
-
33745753520
-
A fast and robust algorithm for Bader decomposition of charge density
-
DOI 10.1016/j.commatsci.2005.04.010, PII S0927025605001849
-
G. Henkelman, A. Arnaldsson, and H. Jonsson, Comput. Mater. Sci. 36, 354 (2006). 10.1016/j.commatsci.2005.04.010 (Pubitemid 44382438)
-
(2006)
Computational Materials Science
, vol.36
, Issue.3
, pp. 354-360
-
-
Henkelman, G.1
Arnaldsson, A.2
Jonsson, H.3
-
55
-
-
33947658923
-
Improved grid-based algorithm for Bader charge allocation
-
DOI 10.1002/jcc.20575
-
E. Sanville, S. Kenny, R. Smith, and G. Henkelman, J. Comput. Chem. 28, 899 (2007). 10.1002/jcc.20575 (Pubitemid 46491698)
-
(2007)
Journal of Computational Chemistry
, vol.28
, Issue.5
, pp. 899-908
-
-
Sanville, E.1
Kenny, S.D.2
Smith, R.3
Henkelman, G.4
-
58
-
-
79958062237
-
-
10.1016/j.mee.2011.03.053
-
W. Wang, C. L. Hinkle, E. M. Vogel, K. Cho, and R. M. Wallace, Microelectron. Eng. 88, 1061 (2011). 10.1016/j.mee.2011.03.053
-
(2011)
Microelectron. Eng.
, vol.88
, pp. 1061
-
-
Wang, W.1
Hinkle, C.L.2
Vogel, E.M.3
Cho, K.4
Wallace, R.M.5
-
59
-
-
84855272474
-
-
in, San Francisco, CA, (IEEE Publishing, New York)
-
J. Robertson and L. Lin, in Proceedings of the 2010 IEEE International Electron Devices Meeting (IEDM), San Francisco, CA, pp. 32.6.1-32.6.4, (2010) (IEEE Publishing, New York).
-
(2010)
Proceedings of the 2010 IEEE International Electron Devices Meeting (IEDM)
, pp. 3261-3264
-
-
Robertson, J.1
Lin, L.2
-
61
-
-
55149106555
-
-
10.1109/LED.2008.2004569
-
M. Passlack, R. Droopad, Z. Yu, N. Medendorp, D. Braddock, X. W. Wang, T. P. Ma, and T. Büyüklimanli, IEEE Electron. Dev. Lett. 29, 1181 (2008). 10.1109/LED.2008.2004569
-
(2008)
IEEE Electron. Dev. Lett.
, vol.29
, pp. 1181
-
-
Passlack, M.1
Droopad, R.2
Yu, Z.3
Medendorp, N.4
Braddock, D.5
Wang, X.W.6
Ma, T.P.7
Büyüklimanli, T.8
-
63
-
-
0012720933
-
-
10.1116/1.590515
-
M. Passlack, Z. Yu, R. Droopad, B. Bowers, C. Overgaard, J. Abrokwah, and A. C. Kummel, J. Vac. Sci. Technol. B 17, 49 (1999). 10.1116/1.590515
-
(1999)
J. Vac. Sci. Technol. B
, vol.17
, pp. 49
-
-
Passlack, M.1
Yu, Z.2
Droopad, R.3
Bowers, B.4
Overgaard, C.5
Abrokwah, J.6
Kummel, A.C.7
-
64
-
-
0142020894
-
-
10.1063/1.1601596
-
M. J. Hale, S. I. Yi, J. Z. Sexton, A. C. Kummel, and M. Passlack, J. Chem. Phys. 119, 6719 (2003). 10.1063/1.1601596
-
(2003)
J. Chem. Phys.
, vol.119
, pp. 6719
-
-
Hale, M.J.1
Yi, S.I.2
Sexton, J.Z.3
Kummel, A.C.4
Passlack, M.5
-
65
-
-
79958008716
-
-
10.1016/j.jcrysgro.2010.11.122
-
W. Priyantha, G. Radhakrishnan, R. Droopad, and M. Passlack, J. Crystal Growth 323, 103 (2011). 10.1016/j.jcrysgro.2010.11.122
-
(2011)
J. Crystal Growth
, vol.323
, pp. 103
-
-
Priyantha, W.1
Radhakrishnan, G.2
Droopad, R.3
Passlack, M.4
-
66
-
-
65449127795
-
-
10.1063/1.3120546
-
C. L. Hinkle, M. Milojevic, B. Brennan, A. M. Sonnet, F. S. Aguirre-Tostado, G. J. Hughes, E. M. Vogel, and R. M. Wallace, Appl. Phys. Lett. 94, 162101 (2009). 10.1063/1.3120546
-
(2009)
Appl. Phys. Lett.
, vol.94
, pp. 162101
-
-
Hinkle, C.L.1
Milojevic, M.2
Brennan, B.3
Sonnet, A.M.4
Aguirre-Tostado, F.S.5
Hughes, G.J.6
Vogel, E.M.7
Wallace, R.M.8
-
67
-
-
74549195664
-
-
10.1149/1.3119561
-
C. L. Hinkle, M. Milojevic, A. M. Sonnet, H. C. Kim, J. Kim, E. M. Vogel, and R. M. Wallace, ECS Trans. 19, 387 (2009). 10.1149/1.3119561
-
(2009)
ECS Trans.
, vol.19
, pp. 387
-
-
Hinkle, C.L.1
Milojevic, M.2
Sonnet, A.M.3
Kim, H.C.4
Kim, J.5
Vogel, E.M.6
Wallace, R.M.7
-
68
-
-
34948906917
-
Electronic properties of adsorbates on GaAs (001) -c (2×8) (2×4)
-
DOI 10.1063/1.2786097
-
D. L. Winn, M. J. Hale, T. J. Grassman, J. Z. Sexton, and A. C. Kummel, J. Chem. Phys. 127, 134705 (2007). 10.1063/1.2786097 (Pubitemid 47531631)
-
(2007)
Journal of Chemical Physics
, vol.127
, Issue.13
, pp. 134705
-
-
Winn, D.L.1
Hale, M.J.2
Grassman, T.J.3
Sexton, J.Z.4
Kummel, A.C.5
Passlack, M.6
Droopad, R.7
-
69
-
-
56849122383
-
-
10.1063/1.3033404
-
M. Milojevic, F. S. Aguirre-Tostado, C. L. Hinkle, H. C. Kim, E. M. Vogel, J. Kim, and R. M. Wallace, Appl. Phys. Lett. 93, 202902 (2008). 10.1063/1.3033404
-
(2008)
Appl. Phys. Lett.
, vol.93
, pp. 202902
-
-
Milojevic, M.1
Aguirre-Tostado, F.S.2
Hinkle, C.L.3
Kim, H.C.4
Vogel, E.M.5
Kim, J.6
Wallace, R.M.7
-
70
-
-
55149106998
-
-
10.1063/1.3009303
-
F. S. Aguirre-Tostado, M. Milojevic, B. Lee, J. Kim, and R. M. Wallace, Appl. Phys. Lett. 93, 172907 (2008). 10.1063/1.3009303
-
(2008)
Appl. Phys. Lett.
, vol.93
, pp. 172907
-
-
Aguirre-Tostado, F.S.1
Milojevic, M.2
Lee, B.3
Kim, J.4
Wallace, R.M.5
-
71
-
-
43049135488
-
Indium stability on InGaAs during atomic H surface cleaning
-
DOI 10.1063/1.2919047
-
F. S. Aguirre-Tostado, M. Milojevic, C. L. Hinkle, E. M. Vogel, R. M. Wallace, S. McDonnell, and G. J. Hughes, Appl. Phys. Lett. 92, 171906 (2008). 10.1063/1.2919047 (Pubitemid 351624888)
-
(2008)
Applied Physics Letters
, vol.92
, Issue.17
, pp. 171906
-
-
Aguirre-Tostado, F.S.1
Milojevic, M.2
Hinkle, C.L.3
Vogel, E.M.4
Wallace, R.M.5
McDonnell, S.6
Hughes, G.J.7
-
72
-
-
77953018514
-
-
10.1063/1.3432749
-
A. P. Kirk, M. Milojevic, J. Kim, and R. M. Wallace, Appl. Phys. Lett. 96, 202905 (2010). 10.1063/1.3432749
-
(2010)
Appl. Phys. Lett.
, vol.96
, pp. 202905
-
-
Kirk, A.P.1
Milojevic, M.2
Kim, J.3
Wallace, R.M.4
-
73
-
-
77955754972
-
-
10.1063/1.3467813
-
H. D. Trinh, E. Y. Chang, P. W. Wu, Y. Y. Wong, C. T. Chang, Y. F. Hsieh, C. C. Yu, H. Q. Nguyen, Y. C. Lin, K. L. Lin, and M. K. Hudait, Appl. Phys. Lett. 97, 042903 (2010). 10.1063/1.3467813
-
(2010)
Appl. Phys. Lett.
, vol.97
, pp. 042903
-
-
Trinh, H.D.1
Chang, E.Y.2
Wu, P.W.3
Wong, Y.Y.4
Chang, C.T.5
Hsieh, Y.F.6
Yu, C.C.7
Nguyen, H.Q.8
Lin, Y.C.9
Lin, K.L.10
Hudait, M.K.11
-
74
-
-
77954050779
-
-
10.1063/1.3452336
-
B. Shin, J. B. Clemens, M. A. Kelly, A. C. Kummel, and P. C. McIntyre, Appl. Phys. Lett. 96, 252907 (2010). 10.1063/1.3452336
-
(2010)
Appl. Phys. Lett.
, vol.96
, pp. 252907
-
-
Shin, B.1
Clemens, J.B.2
Kelly, M.A.3
Kummel, A.C.4
McIntyre, P.C.5
-
75
-
-
73849108382
-
-
10.1063/1.3266006
-
E. J. Kim, E. Chagarov, J. Cagnon, Y. Yuan, A. C. Kummel, P. M. Asbeck, S. Stemmer, K. C. Saraswat, and P. C. McIntyre, J. Appl. Phys. 106, 124508 (2009). 10.1063/1.3266006
-
(2009)
J. Appl. Phys.
, vol.106
, pp. 124508
-
-
Kim, E.J.1
Chagarov, E.2
Cagnon, J.3
Yuan, Y.4
Kummel, A.C.5
Asbeck, P.M.6
Stemmer, S.7
Saraswat, K.C.8
McIntyre, P.C.9
-
76
-
-
51849098136
-
-
10.1063/1.2966357
-
B. Shin, D. Choi, J. S. Harris, and P. C. McIntyre, Appl. Phys. Lett. 93, 052911 (2008). 10.1063/1.2966357
-
(2008)
Appl. Phys. Lett.
, vol.93
, pp. 052911
-
-
Shin, B.1
Choi, D.2
Harris, J.S.3
McIntyre, P.C.4
-
77
-
-
84855285050
-
-
in, San Diego, CA, (IEEE Publishing, New York)
-
P. C. McIntyre, Y. Oshima, E. Kim, E. Chagarov, J. Cagnon, K. C. Saraswat, S. Stemmer, and A. C. Kummel, in Proceeding of the Semiconductor Interface Specialists Conference (SISC), San Diego, CA, 2008, p. 133 (IEEE Publishing, New York)..
-
(2008)
Proceeding of the Semiconductor Interface Specialists Conference (SISC)
, pp. 133
-
-
McIntyre, P.C.1
Oshima, Y.2
Kim, E.3
Chagarov, E.4
Cagnon, J.5
Saraswat, K.C.6
Stemmer, S.7
Kummel, A.C.8
-
78
-
-
67349197268
-
-
10.1016/j.mee.2009.03.081
-
P. C. McIntyre, Y. Oshima, E. Kim, and K. C. Saraswat, Microelectron. Eng. 86, 1536 (2009). 10.1016/j.mee.2009.03.081
-
(2009)
Microelectron. Eng.
, vol.86
, pp. 1536
-
-
McIntyre, P.C.1
Oshima, Y.2
Kim, E.3
Saraswat, K.C.4
-
79
-
-
78049314956
-
-
10.1063/1.3487737
-
J. B. Clemens, E. A. Chagarov, M. Holland, R. Droopad, J. Shen, and A. C. Kummel, J. Chem. Phys. 133, 154704 (2010). 10.1063/1.3487737
-
(2010)
J. Chem. Phys.
, vol.133
, pp. 154704
-
-
Clemens, J.B.1
Chagarov, E.A.2
Holland, M.3
Droopad, R.4
Shen, J.5
Kummel, A.C.6
-
80
-
-
84855272477
-
-
Surface cleaning and monolayer seeding for ALD of high-k studied by in situ STM, STS, and XPS, in, Nashville, TN, (American Institute of Physics, New York)
-
W. Melitz, T. Kent, J. Shen, and A. C. Kummel, Surface cleaning and monolayer seeding for ALD of high-k studied by in situ STM, STS, and XPS, in Proceedings of the AVS 2011, Nashville, TN, 2011 (American Institute of Physics, New York).
-
(2011)
Proceedings of the AVS 2011
-
-
Melitz, W.1
Kent, T.2
Shen, J.3
Kummel, A.C.4
-
81
-
-
79751524419
-
-
10.1016/j.mee.2010.09.015
-
Y. H. Chang, M. L. Huang, P. Chang, C. A. Lin, Y. J. Chu, B. R. Chen, C. L. Hsu, J. Kwo, T. W. Pi, and M. Hong, Microelectron. Eng. 88, 440 (2011). 10.1016/j.mee.2010.09.015
-
(2011)
Microelectron. Eng.
, vol.88
, pp. 440
-
-
Chang, Y.H.1
Huang, M.L.2
Chang, P.3
Lin, C.A.4
Chu, Y.J.5
Chen, B.R.6
Hsu, C.L.7
Kwo, J.8
Pi, T.W.9
Hong, M.10
-
83
-
-
84855288494
-
-
in, Baltimore, MD, (IEEE Publishing, New York)
-
J. Huang, N. Goel, H. Zhao, C. Y. Kang, K. S. Min, G. Bersuker, S. Oktyabrsky, S. Koveshnikov, J. C. Lee, P. Majhi, W. Tsai, P. D. Kirsch, H.-H. Tseng, and R. Jammy, in Proceedings of the International Electron Device Meeting (IEDM), Baltimore, MD, 2009, p. 13.5 (IEEE Publishing, New York).
-
(2009)
Proceedings of the International Electron Device Meeting (IEDM)
, pp. 135
-
-
Huang, J.1
Goel, N.2
Zhao, H.3
Kang, C.Y.4
Min, K.S.5
Bersuker, G.6
Oktyabrsky, S.7
Koveshnikov, S.8
Lee, J.C.9
Majhi, P.10
Tsai, W.11
Kirsch, P.D.12
Tseng, H.-H.13
Jammy, R.14
-
84
-
-
64849093362
-
-
in, Santa Barbara, CA, (IEEE Publishing, New York)
-
Y. Xuan, T. Shen, Y. Q. Wu, M. Xu, and P. D. Ye, in Proceedings of the 66th Annual Device Research Conference (DRC), Santa Barbara, CA, 2008, pp. 37-38 (IEEE Publishing, New York).
-
(2008)
Proceedings of the 66th Annual Device Research Conference (DRC)
, pp. 37-38
-
-
Xuan, Y.1
Shen, T.2
Wu, Y.Q.3
Xu, M.4
Ye, P.D.5
-
85
-
-
76549105848
-
-
in, San Francisco, CA, (IEEE Publishing, New York)
-
Y. Xuan, T. Shen, M. Xu, Y. Q. Wu, and P. D. Ye, in Proceedings of the IEDM, San Francisco, CA, 2008, p. 371 (IEEE Publishing, New York).
-
(2008)
Proceedings of the IEDM
, pp. 371
-
-
Xuan, Y.1
Shen, T.2
Xu, M.3
Wu, Y.Q.4
Ye, P.D.5
-
86
-
-
41749086201
-
High-performance inversion-type enhancement-mode InGaAs MOSFET with maximum drain current exceeding 1 A/mm
-
DOI 10.1109/LED.2008.917817
-
Y. Xuan, Y. Q. Wu, and P. D. Ye, IEEE Electron Device Lett. 29, 294 (2008). 10.1109/LED.2008.917817 (Pubitemid 351486762)
-
(2008)
IEEE Electron Device Letters
, vol.29
, Issue.4
, pp. 294-296
-
-
Xuan, Y.1
Wu, Y.Q.2
Ye, P.D.3
-
87
-
-
84855282234
-
-
in, Santa Barbara, CA, 28 June (IEEE Publishing, New York)
-
M. Egard, L. Ohlsson, B. M. Borg, L.-E. Wernersson, and E. Lind, in Proceedings of the Abstracts of the IEEE Device Research Conference 2011, Santa Barbara, CA, 28 June 2011 (IEEE Publishing, New York).
-
(2011)
Proceedings of the Abstracts of the IEEE Device Research Conference 2011
-
-
Egard, M.1
Ohlsson, L.2
Borg, B.M.3
Wernersson, L.-E.4
Lind, E.5
-
88
-
-
67349195475
-
-
10.1016/j.mee.2009.03.053
-
J. Robertson, Microelectron. Eng. 86, 1558 (2009). 10.1016/j.mee.2009.03. 053
-
(2009)
Microelectron. Eng.
, vol.86
, pp. 1558
-
-
Robertson, J.1
-
89
-
-
65249129755
-
-
10.1063/1.3120554
-
J. Robertson, Appl. Phys. Lett. 94, 152104 (2009). 10.1063/1.3120554
-
(2009)
Appl. Phys. Lett.
, vol.94
, pp. 152104
-
-
Robertson, J.1
-
90
-
-
76549136545
-
-
10.1149/1.3122119
-
P. D. Ye, Y. Xuan, Y. Q. Wu, and M. Xu, ECS Trans. 19, 605 (2009). 10.1149/1.3122119
-
(2009)
ECS Trans.
, vol.19
, pp. 605
-
-
Ye, P.D.1
Xuan, Y.2
Wu, Y.Q.3
Xu, M.4
-
91
-
-
70349486832
-
-
in, Newport Beach, CA, (IEEE Publishing, New York)
-
U. Singisetti, M. A. Wistey, G. J. Burek, A. K. Baraskar, J. Cagnon, B. Thibeault, A. C. Gossard, S. Stemmer, M. J. W. Rodwell, E. Kim, B. Shin, P. C. McIntyre, and Y.-J. Lee, in Proceedings of the IPRM'09, Newport Beach, CA, 2009, p. 120 (IEEE Publishing, New York).
-
(2009)
Proceedings of the IPRM'09
, pp. 120
-
-
Singisetti, U.1
Wistey, M.A.2
Burek, G.J.3
Baraskar, A.K.4
Cagnon, J.5
Thibeault, B.6
Gossard, A.C.7
Stemmer, S.8
Rodwell, M.J.W.9
Kim, E.10
Shin, B.11
McIntyre, P.C.12
Lee, Y.-J.13
-
92
-
-
67349114865
-
-
10.1016/j.mee.2009.03.090
-
M. Caymax, G. Brammertz, A. Delabie, S. Sioncke, D. Lin, M. Scarrozza, G. Pourtois, W.-E. Wang, M. Meuris, and M. Heyns, Microelectron. Eng. 86, 1529 (2009). 10.1016/j.mee.2009.03.090
-
(2009)
Microelectron. Eng.
, vol.86
, pp. 1529
-
-
Caymax, M.1
Brammertz, G.2
Delabie, A.3
Sioncke, S.4
Lin, D.5
Scarrozza, M.6
Pourtois, G.7
Wang, W.-E.8
Meuris, M.9
Heyns, M.10
-
93
-
-
67049158595
-
-
10.1063/1.3133360
-
H. Zhao, Y.-T. Yen-Ting Chen, J. H. Yum, Y. Wang, N. Goel, and J. C. Lee, Appl. Phys. Lett. 94, 193502 (2009). 10.1063/1.3133360
-
(2009)
Appl. Phys. Lett.
, vol.94
, pp. 193502
-
-
Zhao, H.1
Yen-Ting Chen, Y.-T.2
Yum, J.H.3
Wang, Y.4
Goel, N.5
Lee, J.C.6
-
94
-
-
79953064474
-
-
10.1109/LED.2011.2107876
-
S. J. Bentley, M. Holland, L. Xu, G. W. Paterson, Z. Haiping, O. Ignatova, D. Macintyre, S. Thoms, A. Asenov, S. Byungha, A. Jaesoo, P. C. McIntyre, and I. G. Thayne, IEEE Electron Dev. Lett. 32, 494 (2001). 10.1109/LED.2011.2107876
-
(2001)
IEEE Electron Dev. Lett.
, vol.32
, pp. 494
-
-
Bentley, S.J.1
Holland, M.2
Xu, L.3
Paterson, G.W.4
Haiping, Z.5
Ignatova, O.6
MacIntyre, D.7
Thoms, S.8
Asenov, A.9
Byungha, S.10
Jaesoo, A.11
McIntyre, P.C.12
Thayne, I.G.13
-
95
-
-
84925292983
-
-
in, Baltimore, MD, (IEEE Publishing, New York)
-
M. Radosavljevic, B. Chu-Kung, S. Corcoran, G. Dewey, M. K. Hudait, J. M. Fastenau, J. Kavalieros, W. K. Liu, D. Lubyshev, M. Metz, K. Millard, N. Mukherjee, W. Rachmady, U. Shah, and R. Chau, in Proceedings of the 2009 IEEE International Electron Devices Meeting (IEDM), Baltimore, MD, 2009, pp. 1-4 (IEEE Publishing, New York).
-
(2009)
Proceedings of the 2009 IEEE International Electron Devices Meeting (IEDM)
, pp. 1-4
-
-
Radosavljevic, M.1
Chu-Kung, B.2
Corcoran, S.3
Dewey, G.4
Hudait, M.K.5
Fastenau, J.M.6
Kavalieros, J.7
Liu, W.K.8
Lubyshev, D.9
Metz, M.10
Millard, K.11
Mukherjee, N.12
Rachmady, W.13
Shah, U.14
Chau, R.15
-
96
-
-
79956067038
-
-
in, San Francisco, CA, (IEEE Publishing, New York)
-
M. Radosavljevic, G. Dewey, J. M. Fastenau, J. Kavalieros, R. Kotlyar, B. Chu-Kung, W. K. Liu, D. Lubyshev, M. Metz, K. Millard, N. Mukherjee, L. Pan, R. Pillarisetty, W. Rachmady, U. Shah, and R. Chau, in Proceedings of the 2010 IEEE International Electron Devices Meeting (IEDM), San Francisco, CA, 2010, pp. 6.1.1-6.1.4 (IEEE Publishing, New York).
-
(2010)
Proceedings of the 2010 IEEE International Electron Devices Meeting (IEDM)
, pp. 611-614
-
-
Radosavljevic, M.1
Dewey, G.2
Fastenau, J.M.3
Kavalieros, J.4
Kotlyar, R.5
Chu-Kung, B.6
Liu, W.K.7
Lubyshev, D.8
Metz, M.9
Millard, K.10
Mukherjee, N.11
Pan, L.12
Pillarisetty, R.13
Rachmady, W.14
Shah, U.15
Chau, R.16
-
98
-
-
39749137699
-
Atomic-layer-deposited Hf O2 on In0.53 Ga0.47 As: Passivation and energy-band parameters
-
DOI 10.1063/1.2883967
-
Y. C. Chang, M. L. Huang, K. Y. Lee, Y. J. Lee, T. D. Lin, M. Hong, J. Kwo, T. S. Lay, C. C. Liao, and K. Y. Cheng, Appl. Phys. Lett. 92, 072901 (2008). 10.1063/1.2883967 (Pubitemid 351304853)
-
(2008)
Applied Physics Letters
, vol.92
, Issue.7
, pp. 072901
-
-
Chang, Y.C.1
Huang, M.L.2
Lee, K.Y.3
Lee, Y.J.4
Lin, T.D.5
Hong, M.6
Kwo, J.7
Lay, T.S.8
Liao, C.C.9
Cheng, K.Y.10
-
99
-
-
59849105046
-
-
10.1063/1.3078399
-
M. L. Huang, Y. C. Chang, Y. H. Chang, T. D. Lin, J. Kwo, and M. Hong, Appl. Phys. Lett. 94, 052106 (2009). 10.1063/1.3078399
-
(2009)
Appl. Phys. Lett.
, vol.94
, pp. 052106
-
-
Huang, M.L.1
Chang, Y.C.2
Chang, Y.H.3
Lin, T.D.4
Kwo, J.5
Hong, M.6
-
100
-
-
70349487965
-
-
in, Newport Beach, CA, (IEEE Publishing, New York)
-
T. D. Lin, P. Chang, H. C. Chiu, Y. C. Chang, C. A. Lin, W. H. Chang, Y. J. Lee, Y. H. Chang, M. L. Huang, J. Kwo, and M. Hong, in Proceedings of the 2009 IEEE International Conference on Indium Phosphide and Related Materials, Newport Beach, CA, 2009, p. 94 (IEEE Publishing, New York).
-
(2009)
Proceedings of the 2009 IEEE International Conference on Indium Phosphide and Related Materials
, pp. 94
-
-
Lin, T.D.1
Chang, P.2
Chiu, H.C.3
Chang, Y.C.4
Lin, C.A.5
Chang, W.H.6
Lee, Y.J.7
Chang, Y.H.8
Huang, M.L.9
Kwo, J.10
Hong, M.11
-
101
-
-
74949085201
-
-
10.1149/1.3118949
-
D. C. Suh, Y. D. Cho, D.-H. Ko, K. B. Chung, M.-H. Cho, and Y. Lee, ECS Trans. 19, 233 (2009). 10.1149/1.3118949
-
(2009)
ECS Trans.
, vol.19
, pp. 233
-
-
Suh, D.C.1
Cho, Y.D.2
Ko, D.-H.3
Chung, K.B.4
Cho, M.-H.5
Lee, Y.6
-
102
-
-
77955896094
-
-
10.1063/1.3465524
-
Y. Hwang, R. Engel-Herbert, N. G. Rudawski, and S. Stemmer, J. Appl. Phys. 108, 034111 (2010). 10.1063/1.3465524
-
(2010)
J. Appl. Phys.
, vol.108
, pp. 034111
-
-
Hwang, Y.1
Engel-Herbert, R.2
Rudawski, N.G.3
Stemmer, S.4
-
103
-
-
63349085439
-
-
10.1016/j.jcrysgro.2008.11.037
-
S. Oktyabrsky, V. Tokranov, S. Koveshnikov, M. Yakimov, R. Kambhampati, H. Bakhru, R. Moore, and W. Tsai, J. Cryst. Growth 311, 1950 (2009). 10.1016/j.jcrysgro.2008.11.037
-
(2009)
J. Cryst. Growth
, vol.311
, pp. 1950
-
-
Oktyabrsky, S.1
Tokranov, V.2
Koveshnikov, S.3
Yakimov, M.4
Kambhampati, R.5
Bakhru, H.6
Moore, R.7
Tsai, W.8
-
104
-
-
77954195474
-
-
10.1063/1.3427584
-
J. B. Clemens, S. R. Bishop, J. S. Lee, A. C. Kummel, and R. Droopad, J. Chem. Phys. 132, 244701 (2010). 10.1063/1.3427584
-
(2010)
J. Chem. Phys.
, vol.132
, pp. 244701
-
-
Clemens, J.B.1
Bishop, S.R.2
Lee, J.S.3
Kummel, A.C.4
Droopad, R.5
-
105
-
-
84905930391
-
-
P. Chang, W. C. Lee, M. L. Huang, Y. J. Lee, M. Hong, and J. Kwo, J. Vac. Sci. Technol. B 28, C3A9 (2010).
-
(2010)
J. Vac. Sci. Technol. B
, vol.28
-
-
Chang, P.1
Lee, W.C.2
Huang, M.L.3
Lee, Y.J.4
Hong, M.5
Kwo, J.6
-
106
-
-
51849093516
-
-
in, (IEEE Publishing, New York)
-
Y. Q. Wu, M. Xu, Y. Xuan, P. D. Ye, J. Li, Z. Cheng, and A. Lochtefeld, in Proceedings of the 17th Biennial UGIM 2008, 2008, pp. 49-52 (IEEE Publishing, New York).
-
(2008)
Proceedings of the 17th Biennial UGIM 2008
, pp. 49-52
-
-
Wu, Y.Q.1
Xu, M.2
Xuan, Y.3
Ye, P.D.4
Li, J.5
Cheng, Z.6
Lochtefeld, A.7
-
107
-
-
44849083052
-
-
10.1063/1.2931031
-
S. Koveshnikov, N. Goel, P. Majhi, H. Wen, M. B. Santos, S. Oktyabrsky, V. Tokranov, R. Kambhampati, R. Moore, F. Zhu, J. Lee, and W. Tsai, Appl. Phys. Lett. 92, 222904 (2008). 10.1063/1.2931031
-
(2008)
Appl. Phys. Lett.
, vol.92
, pp. 222904
-
-
Koveshnikov, S.1
Goel, N.2
Majhi, P.3
Wen, H.4
Santos, M.B.5
Oktyabrsky, S.6
Tokranov, V.7
Kambhampati, R.8
Moore, R.9
Zhu, F.10
Lee, J.11
Tsai, W.12
-
108
-
-
64849104717
-
-
in, Santa Barbara, CA, (IEEE Publishing, New York)
-
S. Koveshnikov, N. Goel, P. Majhi, C. K. Gaspe, M. B. Santos, S. Oktyabrsky, V. Tokranov, M. Yakimov, R. Kambhampati, H. Bakhru, F. Zhu, J. Lee, and W. Tsai, in Proceedings of the 66th Annual Device Research Conference (DRC), Santa Barbara, CA, 2008, pp. 43-44 (IEEE Publishing, New York).
-
(2008)
Proceedings of the 66th Annual Device Research Conference (DRC)
, pp. 43-44
-
-
Koveshnikov, S.1
Goel, N.2
Majhi, P.3
Gaspe, C.K.4
Santos, M.B.5
Oktyabrsky, S.6
Tokranov, V.7
Yakimov, M.8
Kambhampati, R.9
Bakhru, H.10
Zhu, F.11
Lee, J.12
Tsai, W.13
-
109
-
-
84855282232
-
-
in, Kyoto, Japan, (IEEE Publishing, New York)
-
S. Stemmer, in Proceedings of the 2009 VLSI Technology Conference, Kyoto, Japan, 2009 (IEEE Publishing, New York).
-
(2009)
Proceedings of the 2009 VLSI Technology Conference
-
-
Stemmer, S.1
|