메뉴 건너뛰기




Volumn 57, Issue 11, 2010, Pages 2944-2956

Suitability study of oxide/gallium arsenide interfaces for MOSFET applications

Author keywords

Ga2O3; GaAs MOSFET; high k dielectric; IIIV MOSFET; IIIV semiconductor; oxide semiconductor interface

Indexed keywords

GA2O3; GAAS MOSFET; HIGH-K DIELECTRIC; II-IV SEMICONDUCTORS; III-V MOSFET; OXIDE/SEMICONDUCTOR INTERFACES;

EID: 78049282838     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2010.2065950     Document Type: Article
Times cited : (47)

References (37)
  • 4
    • 27144542816 scopus 로고    scopus 로고
    • Methodology for development of high-κ stacked gate dielectrics on III-V semiconductors
    • A.A. Demkov and A. Navrotsky, Eds. Dordrecht, The Netherlands: Springer-Verlag
    • M. Passlack, "Methodology for development of high-κ stacked gate dielectrics on III-V semiconductors," in Materials Fundamentals of Gate Dielectrics, A. A. Demkov and A. Navrotsky, Eds. Dordrecht, The Netherlands: Springer-Verlag, 2005, pp. 403-467.
    • (2005) Materials Fundamentals of Gate Dielectrics , pp. 403-467
    • Passlack, M.1
  • 6
    • 0027239368 scopus 로고
    • In-situ characterization of compound semiconductor surfaces by novel photolu-minescence surface state spectroscopy
    • S Jan.
    • T. Sawada, K. Numata, S. Tohdoh, T. Saitoh, and H. Hasegawa, "In-situ characterization of compound semiconductor surfaces by novel photolu-minescence surface state spectroscopy," Jpn. J. Appl. Phys., vol. 32, pt. 1, no. 1S, pp. 511-517, Jan. 1993.
    • (1993) Jpn. J. Appl. Phys. , vol.32 , Issue.1 PART 1 , pp. 511-517
    • Sawada, T.1    Numata, K.2    Tohdoh, S.3    Saitoh, T.4    Hasegawa, H.5
  • 8
  • 21
    • 0006223952 scopus 로고
    • GaAs metal insulator semiconductor capacitors and high transconductance metal insulator semiconductor field effect transistors
    • May
    • J. Reed, Z. Fan, G. B. Gao, A. Botchkarev, and H. Morkoç, "GaAs metal insulator semiconductor capacitors and high transconductance metal insulator semiconductor field effect transistors," Appl. Phys. Lett., vol. 64, no. 20, pp. 2706-2708, May 1994.
    • (1994) Appl. Phys. Lett. , vol.64 , Issue.20 , pp. 2706-2708
    • Reed, J.1    Fan, Z.2    Gao, G.B.3    Botchkarev, A.4    Morkoç, H.5
  • 22
    • 0024072966 scopus 로고
    • Unpinned GaAs MOS capacitors and transistors
    • Sep.
    • S. Tiwari, S. L. Wright, and J. Batey, "Unpinned GaAs MOS capacitors and transistors," IEEE Electron Device Lett., vol. 9, no. 9, pp. 488-490, Sep. 1988.
    • (1988) IEEE Electron Device Lett. , vol.9 , Issue.9 , pp. 488-490
    • Tiwari, S.1    Wright, S.L.2    Batey, J.3
  • 23
    • 0024126644 scopus 로고
    • 0.47As MIS structures having an ultrathin pseudomorphic interface control layer of Si prepared by MBE
    • Dec.
    • 0.47As MIS structures having an ultrathin pseudomorphic interface control layer of Si prepared by MBE," Jpn. J. Appl. Phys., vol. 27, no. 12, pp. L2 265-L2 267, Dec. 1988.
    • (1988) Jpn. J. Appl. Phys. , vol.27 , Issue.12
    • Hasegawa, H.1    Akazawa, M.2    Matsuzaki, K.3    Ishii, H.4    Ohno, H.5
  • 25
    • 21544434997 scopus 로고
    • Un-pinned gallium oxide/GaAs interface by hydrogen and nitrogen surface plasma treatment
    • Jan.
    • A. Callegari, P. D. Hoh, D. A. Buchanan, and D. Lacey, "Un-pinned gallium oxide/GaAs interface by hydrogen and nitrogen surface plasma treatment," Appl. Phys. Lett., vol. 54, no. 4, pp. 332-334, Jan. 1989.
    • (1989) Appl. Phys. Lett. , vol.54 , Issue.4 , pp. 332-334
    • Callegari, A.1    Hoh, P.D.2    Buchanan, D.A.3    Lacey, D.4
  • 28
    • 0142020894 scopus 로고    scopus 로고
    • Scanning tunneling microscopy and spectroscopy of gallium oxide deposition and oxidation on GaAs(001)-c(2 × 8)/(2 × 4)
    • Oct. 2003. The As-rich GaAs (2 × 4) reconstruction is generally (and in this paper) used during MBE growth as determined by reflection high-energy diffraction (RHEED). While some reports suggest that this reconstruction is also a c(2 × 8) structure, RHEED imaging cannot distinguish between the two reconstructions as they both exhibit a two- and a fourfold periodicity along the orthogonal [110] directions. However, STM observations on this surface reveals that the surface consists of (2 × 4) and c(2 × 8) ordering, with the latter resulting from a rearrangement of the basic (2 × 4) unit cells
    • M. Hale, S. I. Yi, J. Z. Sexton, A. C. Kummel, and M. Passlack, "Scanning tunneling microscopy and spectroscopy of gallium oxide deposition and oxidation on GaAs(001)-c(2 × 8)/(2 × 4)," J. Chem. Phys., vol. 119, no. 13, pp. 6719-6728, Oct. 2003. The As-rich GaAs (2 × 4) reconstruction is generally (and in this paper) used during MBE growth as determined by reflection high-energy diffraction (RHEED). While some reports suggest that this reconstruction is also a c(2 × 8) structure, RHEED imaging cannot distinguish between the two reconstructions as they both exhibit a two- and a fourfold periodicity along the orthogonal [110] directions. However, STM observations on this surface reveals that the surface consists of (2 × 4) and c(2 × 8) ordering, with the latter resulting from a rearrangement of the basic (2 × 4) unit cells.
    • J. Chem. Phys. , vol.119 , Issue.13 , pp. 6719-6728
    • Hale, M.1    Yi, S.I.2    Sexton, J.Z.3    Kummel, A.C.4    Passlack, M.5
  • 32
    • 59049101289 scopus 로고    scopus 로고
    • A nanoanalytical investigation of high-κ dielectric gate stacks for GaAs based MOSFET devices
    • Mar.
    • P. Longo, A. J. Craven, M. C. Holland, D. A. J. Moran, and I. G. Thayne, "A nanoanalytical investigation of high-κ dielectric gate stacks for GaAs based MOSFET devices," Microelectron. Eng., vol. 86, no. 3, pp. 214-217, Mar. 2009.
    • (2009) Microelectron. Eng. , vol.86 , Issue.3 , pp. 214-217
    • Longo, P.1    Craven, A.J.2    Holland, M.C.3    Moran, D.A.J.4    Thayne, I.G.5
  • 33
    • 0001671379 scopus 로고
    • Comparison of surface properties of sodium sulfide and ammonium sulfide passivation of GaAs
    • Jun.
    • R. S. Besser and C. R. Helms, "Comparison of surface properties of sodium sulfide and ammonium sulfide passivation of GaAs," J. Appl. Phys., vol. 65, no. 11, pp. 4306-4310, Jun. 1989.
    • (1989) J. Appl. Phys. , vol.65 , Issue.11 , pp. 4306-4310
    • Besser, R.S.1    Helms, C.R.2
  • 35
    • 57049184099 scopus 로고    scopus 로고
    • Gallium oxide and gadolinium gallium oxide insulators on Si δ-doped GaAs/AlGaAs heterostructures
    • 719, Nov.
    • G. W. Paterson, P. Longo, J. A. Wilson, A. J. Craven, A. R. Long, I. G. Thayne, M. Passlack, and R. Droopad, "Gallium oxide and gadolinium gallium oxide insulators on Si δ-doped GaAs/AlGaAs heterostructures," J. Appl. Phys., vol. 104, no. 10, p. 103 719, Nov. 2008.
    • (2008) J. Appl. Phys. , vol.104 , Issue.10 , pp. 103
    • Paterson, G.W.1    Longo, P.2    Wilson, J.A.3    Craven, A.J.4    Long, A.R.5    Thayne, I.G.6    Passlack, M.7    Droopad, R.8
  • 37
    • 0142108602 scopus 로고    scopus 로고
    • Recombination velocity at oxide-GaAs interfaces fabricated by in situ molecular beam epitaxy
    • DOI 10.1063/1.116652, PII S0003695196030252
    • M. Passlack, M. Hong, J. P. Mannaerts, J. R. Kwo, and L. W. Tu, "Re-combination velocity at oxide-GaAs interfaces fabricated by in situ molecular beam epitaxy," Appl. Phys. Lett., vol. 68, no. 25, pp. 3605-3607, Jun. 1996. (Pubitemid 126684374)
    • (1996) Applied Physics Letters , vol.68 , Issue.25 , pp. 3605-3607
    • Passlack, M.1    Hong, M.2    Mannaerts, J.P.3    Kwo, J.R.4    Tu, L.W.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.