메뉴 건너뛰기




Volumn 106, Issue 12, 2009, Pages

Atomically abrupt and unpinned Al2O3/In 0.53Ga0.47 As interfaces: Experiment and simulation

Author keywords

[No Author keywords available]

Indexed keywords

AS INTERFACES; BAND GAPS; DENSITY FUNCTIONAL THEORY CALCULATIONS; DIELECTRIC LAYER; ELECTRICALLY ACTIVE DEFECTS; FERMI LEVEL PINNING; FLAT-BAND VOLTAGE; FREQUENCY-DEPENDENT CAPACITANCE; GATE METALS; II-IV SEMICONDUCTORS; IN-SITU; INTERFACE DIPOLE; LOW DENSITY; OXIDE DEPOSITION; OXIDE/SEMICONDUCTOR INTERFACES; SUBSTRATE SURFACE; TEMPERATURE DEPENDENT; VOLTAGE ANALYSIS; WEAK PERTURBATION; X RAY PHOTOELECTRON SPECTRA;

EID: 73849108382     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3266006     Document Type: Article
Times cited : (88)

References (49)
  • 2
    • 0033583043 scopus 로고    scopus 로고
    • Epitaxial cubic gadolinium oxide as a dielectric for gallium arsenide passivation
    • DOI 10.1126/science.283.5409.1897
    • M. Hong, J. Kwo, A. R. Kortan, J. P. Mannaerts, and A. M. Sergent, Science 0036-8075 283, 1897 (1999) 10.1126/science.283.5409.1897; (Pubitemid 29144203)
    • (1999) Science , vol.283 , Issue.5409 , pp. 1897-1900
    • Hong, M.1    Kwo, J.2    Kortan, A.R.3    Mannaerts, J.P.4    Sergent, A.M.5
  • 5
    • 34547895938 scopus 로고    scopus 로고
    • Simplified surface preparation for GaAs passivation using atomic layer-deposited high-Κ dielectrics
    • DOI 10.1109/TED.2007.900678
    • Y. Xuan, H. Lin, and P. D. Ye, IEEE Trans. Electron Devices 0018-9383 54, 1811 (2007). 10.1109/TED.2007.900678 (Pubitemid 47260256)
    • (2007) IEEE Transactions on Electron Devices , vol.54 , Issue.8 , pp. 1811-1817
    • Xuan, Y.1    Lin, H.-C.2    Ye, P.D.3
  • 9
    • 34250633680 scopus 로고    scopus 로고
    • Annealing condition optimization and electrical characterization of amorphous LaAl O3 GaAs metal-oxide-semiconductor capacitors
    • DOI 10.1063/1.2748308
    • D. Choi, J. S. Harris, M. Warusawithana, and D. G. Schlom, Appl. Phys. Lett. 0003-6951 90, 243505 (2007). 10.1063/1.2748308 (Pubitemid 46934831)
    • (2007) Applied Physics Letters , vol.90 , Issue.24 , pp. 243505
    • Choi, D.1    Harris, J.S.2    Warusawithana, M.3    Schlom, D.G.4
  • 11
    • 19944418278 scopus 로고    scopus 로고
    • Gate dielectrics on compound semiconductors
    • DOI 10.1016/j.mee.2005.04.056, PII S0167931705001954, 14th Biennial Conference on Insulating Films on Semiconductors
    • R. Droopad, M. Passlack, N. England, K. Rajagopalan, J. Abrokwah, and A. Kummel, Microelectron. Eng. 0167-9317 80, 138 (2005). 10.1016/j.mee.2005.04.056 (Pubitemid 40753065)
    • (2005) Microelectronic Engineering , vol.80 , Issue.SUPPL. , pp. 138-145
    • Droopad, R.1    Passlack, M.2    England, N.3    Rajagopalan, K.4    Abrokwah, J.5    Kummel, A.6
  • 16
    • 0037115703 scopus 로고    scopus 로고
    • 0021-8979. 10.1063/1.1521517
    • Y. Yeo, T. King, and C. Hu, J. Appl. Phys. 0021-8979 92, 7266 (2002). 10.1063/1.1521517
    • (2002) J. Appl. Phys. , vol.92 , pp. 7266
    • Yeo, Y.1    King, T.2    Hu, C.3
  • 17
    • 70349982825 scopus 로고    scopus 로고
    • 0039-6028. 10.1016/j.susc.2009.08.009
    • E. A. Chagarov and A. C. Kummel, Surf. Sci. 0039-6028 603, 3191 (2009). 10.1016/j.susc.2009.08.009
    • (2009) Surf. Sci. , vol.603 , pp. 3191
    • Chagarov, E.A.1    Kummel, A.C.2
  • 18
    • 0036500302 scopus 로고    scopus 로고
    • 0163-1829. 10.1103/PhysRevB.65.104202
    • G. Gutierrez and B. Johansson, Phys. Rev. B 0163-1829 65, 104202 (2002). 10.1103/PhysRevB.65.104202
    • (2002) Phys. Rev. B , vol.65 , pp. 104202
    • Gutierrez, G.1    Johansson, B.2
  • 19
    • 0031548428 scopus 로고    scopus 로고
    • 0921-4526. 10.1016/S0921-4526(96)01044-7
    • P. Lamparter and R. Kniep, Physica B 0921-4526 234-236, 405 (1997). 10.1016/S0921-4526(96)01044-7
    • (1997) Physica B , vol.234-236 , pp. 405
    • Lamparter, P.1    Kniep, R.2
  • 21
    • 63649092622 scopus 로고    scopus 로고
    • 0021-9606. 10.1063/1.3078035
    • E. Chagarov and A. Kummel, J. Chem. Phys. 0021-9606 130, 124717 (2009). 10.1063/1.3078035
    • (2009) J. Chem. Phys. , vol.130 , pp. 124717
    • Chagarov, E.1    Kummel, A.2
  • 22
    • 63149101962 scopus 로고    scopus 로고
    • 1938-5862. 10.1149/1.2986837
    • E. Chagarov and A. C. Kummel, ECS Trans. 1938-5862 16, 773 (2008). 10.1149/1.2986837
    • (2008) ECS Trans. , vol.16 , pp. 773
    • Chagarov, E.1    Kummel, A.C.2
  • 24
    • 34347382157 scopus 로고    scopus 로고
    • 0163-1829. 10.1103/PhysRevB.75.245304
    • S. Monaghan, J. C. Greer, and S. D. Elliott, Phys. Rev. B 0163-1829 75, 245304 (2007). 10.1103/PhysRevB.75.245304
    • (2007) Phys. Rev. B , vol.75 , pp. 245304
    • Monaghan, S.1    Greer, J.C.2    Elliott, S.D.3
  • 26
    • 34249041764 scopus 로고    scopus 로고
    • 2/Si interface
    • DOI 10.1016/j.mee.2007.04.102, PII S0167931707004534, INFOS 2007
    • J. L. Gavartin and A. L. Shluger, Microelectron. Eng. 0167-9317 84, 2412 (2007). 10.1016/j.mee.2007.04.102 (Pubitemid 46783943)
    • (2007) Microelectronic Engineering , vol.84 , Issue.9-10 , pp. 2412-2415
    • Gavartin, J.L.1    Shluger, A.L.2
  • 27
    • 45849085748 scopus 로고    scopus 로고
    • 0039-6028. 10.1016/j.susc.2008.04.026
    • E. Chagarov and A. C. Kummel, Surf. Sci. 0039-6028 602, L74 (2008). 10.1016/j.susc.2008.04.026
    • (2008) Surf. Sci. , vol.602 , pp. 74
    • Chagarov, E.1    Kummel, A.C.2
  • 28
    • 0030190741 scopus 로고    scopus 로고
    • Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set
    • DOI 10.1016/0927-0256(96)00008-0, PII S0927025696000080
    • G. Kresse and J. Furthmüller, Comput. Mater. Sci. 0927-0256 6, 15 (1996). 10.1016/0927-0256(96)00008-0 (Pubitemid 126412269)
    • (1996) Computational Materials Science , vol.6 , Issue.1 , pp. 15-50
    • Kresse, G.1    Furthmuller, J.2
  • 29
    • 2442537377 scopus 로고    scopus 로고
    • 0163-1829. 10.1103/PhysRevB.54.11169
    • G. Kresse and J. Furthmüller, Phys. Rev. B 0163-1829 54, 11169 (1996). 10.1103/PhysRevB.54.11169
    • (1996) Phys. Rev. B , vol.54 , pp. 11169
    • Kresse, G.1    Furthmüller, J.2
  • 30
    • 33748606013 scopus 로고
    • 0163-1829. 10.1103/PhysRevB.46.16067
    • S. Neugebauer, Phys. Rev. B 0163-1829 46, 16067 (1992). 10.1103/PhysRevB.46.16067
    • (1992) Phys. Rev. B , vol.46 , pp. 16067
    • Neugebauer, S.1
  • 31
    • 25744460922 scopus 로고
    • 0163-1829. 10.1103/PhysRevB.50.17953
    • P. E. Blöchl, Phys. Rev. B 0163-1829 50, 17953 (1994). 10.1103/PhysRevB.50.17953
    • (1994) Phys. Rev. B , vol.50 , pp. 17953
    • Blöchl, P.E.1
  • 32
    • 0011236321 scopus 로고    scopus 로고
    • 0163-1829. 10.1103/PhysRevB.59.1758
    • G. Kresse and J. Joubert, Phys. Rev. B 0163-1829 59, 1758 (1999). 10.1103/PhysRevB.59.1758
    • (1999) Phys. Rev. B , vol.59 , pp. 1758
    • Kresse, G.1    Joubert, J.2
  • 35
    • 0002467378 scopus 로고
    • 0021-9991. 10.1006/jcph.1995.1039
    • S. J. Plimpton, J. Comput. Phys. 0021-9991 117, 1 (1995). 10.1006/jcph.1995.1039
    • (1995) J. Comput. Phys. , vol.117 , pp. 1
    • Plimpton, S.J.1
  • 36
    • 0008631747 scopus 로고
    • 0026-461X. 10.1180/minmag.1994.58A.2.34
    • M. Matsui, Miner. Mag. 0026-461X 58A, 571 (1994). 10.1180/minmag.1994. 58A.2.34
    • (1994) Miner. Mag. , vol.58 , pp. 571
    • Matsui, M.1
  • 42
    • 0020187572 scopus 로고
    • 0022-3727. 10.1088/0022-3727/15/9/022
    • D. K. Rao and J. Majhi, J. Phys. D: Appl. Phys. 0022-3727 15, 1769 (1982). 10.1088/0022-3727/15/9/022
    • (1982) J. Phys. D: Appl. Phys. , vol.15 , pp. 1769
    • Rao, D.K.1    Majhi, J.2
  • 43
    • 0027643620 scopus 로고
    • 0040-6090. 10.1016/0040-6090(93)90707-V
    • D. S. L. Mui, Z. Wang, and H. Morko̧, Thin Solid Films 0040-6090 231, 107 (1993). 10.1016/0040-6090(93)90707-V
    • (1993) Thin Solid Films , vol.231 , pp. 107
    • Mui, D.S.L.1    Wang, Z.2    Morko̧, H.3
  • 44
    • 0000082343 scopus 로고    scopus 로고
    • 0021-8979. 10.1063/1.368384
    • N. Bhat and K. C. Saraswat, J. Appl. Phys. 0021-8979 84, 2722 (1998). 10.1063/1.368384
    • (1998) J. Appl. Phys. , vol.84 , pp. 2722
    • Bhat, N.1    Saraswat, K.C.2
  • 48
    • 33745753520 scopus 로고    scopus 로고
    • A fast and robust algorithm for Bader decomposition of charge density
    • DOI 10.1016/j.commatsci.2005.04.010, PII S0927025605001849
    • G. Henkelman, A. Arnaldsson, and H. Jónsson, Comput. Mater. Sci. 0927-0256 36, 354 (2006). 10.1016/j.commatsci.2005.04.010 (Pubitemid 44382438)
    • (2006) Computational Materials Science , vol.36 , Issue.3 , pp. 354-360
    • Henkelman, G.1    Arnaldsson, A.2    Jonsson, H.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.