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Volumn 55, Issue 2, 2006, Pages 643-666

Micro and nano machining by electro-physical and chemical processes

Author keywords

Micromachining; Nano fabrication

Indexed keywords

COMPOSITE MICROMECHANICS; ENGINEERING EDUCATION; MANUFACTURE; MINIATURE INSTRUMENTS;

EID: 72949118506     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2006.10.002     Document Type: Article
Times cited : (367)

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