Recent advances in the study of electrochemical micromachining

Journal of Manufacturing Science and Engineering, Transactions of the ASME

Volumn 118, Issue 1, 1996, Pages 29-36

  Datta, M ^a   Shenoy, R V ^a   Romankiw, L T ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL CUTTING; FINISHING; HEAT CONVECTION; MASKS; MASS TRANSFER; SURFACES; THIN FILM DEVICES;

ANODIC DISSOLUTION; ELECTROCHEMICAL MICROMACHINING;

MICROMACHINING;

EID: 0030084454     PISSN: 10871357     EISSN: 15288935     Source Type: Journal    
DOI: 10.1115/1.2803644     Document Type: Article

References (33)

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