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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 7 B, 2003, Pages 4825-4829

Nanolithography using the scanning tunneling microscope

(1) Sattler, Klaus a

a UNIVERSITY OF HAWAII (United States)

Author keywords

Field evaporation; Nanolithography; Nanoparticles; Nanopatterning; Nanostructures; Semiconductors; Silicon; STM

Indexed keywords

ATOMS; ELECTRIC FIELDS; HYDROGENATION; OXYGEN; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

NANOPATTERN FORMATION; NANOTEXTURING; SILICON ATOMS; SILICON NANOPARTICLE FILMS;

NANOTECHNOLOGY;

EID: 0141792478 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.42.4825 Document Type: Article

Times cited : (19)

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