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Volumn 45, Issue 9, 2005, Pages 1095-1108

Machining of non-conducting materials using electrochemical discharge phenomenon - An overview

Author keywords

Electrochemical discharge phenomena; Machining non conductive materials; Spark assisted chemical engraving

Indexed keywords

BONDING; CHEMICAL RESISTANCE; ELECTROCHEMISTRY; FABRICATION; GLASS CERAMICS; INDUSTRIAL APPLICATIONS; INSULATING MATERIALS; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; SILICON;

EID: 14844337140     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2004.11.011     Document Type: Article
Times cited : (337)

References (90)
  • 1
    • 0036906239 scopus 로고    scopus 로고
    • Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass
    • Li. Xinghua, A. Takashi, L. Yongxum, and E. Masayoshi Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass Journal of MEMS 11 2002 625 630
    • (2002) Journal of MEMS , vol.11 , pp. 625-630
    • Xinghua, Li.1    Takashi, A.2    Yongxum, L.3    Masayoshi, E.4
  • 2
    • 0001359654 scopus 로고
    • Electrical discharge drilling of glass
    • H. Kurafuji, and K. Suda Electrical discharge drilling of glass Annals of the CIRP 16 1968 415 419
    • (1968) Annals of the CIRP , vol.16 , pp. 415-419
    • Kurafuji, H.1    Suda, K.2
  • 5
    • 0039532956 scopus 로고
    • Preliminary qualitative approach of a proposed mechanism of material removal in electrical machining of glass
    • K. Allesu, A. Ghosh, and M.K. Muju Preliminary qualitative approach of a proposed mechanism of material removal in electrical machining of glass European Journal of Mechanical Engineers 36 1992 202 207
    • (1992) European Journal of Mechanical Engineers , vol.36 , pp. 202-207
    • Allesu, K.1    Ghosh, A.2    Muju, M.K.3
  • 10
    • 0031153008 scopus 로고    scopus 로고
    • Electrochimical discharge machining: Principle and possibilities
    • A. Ghosh Electrochimical discharge machining: principle and possibilities Sadhana 22 1997 435 447
    • (1997) Sadhana , vol.22 , pp. 435-447
    • Ghosh, A.1
  • 11
    • 3042801150 scopus 로고    scopus 로고
    • Spark assisted chemical engraving in the light of electrochemistry
    • V. Fascio, R. Wüthrich, and H. Bleuler Spark assisted chemical engraving in the light of electrochemistry Electrochimica Acta 49 2004 3997 4003
    • (2004) Electrochimica Acta , vol.49 , pp. 3997-4003
    • Fascio, V.1    Wüthrich, R.2    Bleuler, H.3
  • 12
    • 14844319026 scopus 로고    scopus 로고
    • Glass microstructuring with spark assisted chemical engraving
    • Les Diablerets, Switzerland, Feb. 1-3
    • R. Wüthrich, H. Bleuler, Glass microstructuring with spark assisted chemical engraving. The Fourth Korea-Switzerland Joint Symposium, Les Diablerets, Switzerland, Feb. 1-3 2004, pp. 51-54.
    • (2004) The Fourth Korea-Switzerland Joint Symposium , pp. 51-54
    • Wüthrich, R.1    Bleuler, H.2
  • 17
    • 14844331604 scopus 로고    scopus 로고
    • Method for making a probe device having detective function. US Patent 6,156,188
    • C.T. Yang, et al., Method for making a probe device having detective function. US Patent 6,156,188, 2000.
    • (2000)
    • Yang, C.T.1
  • 19
    • 14844287815 scopus 로고    scopus 로고
    • Method and device for electro-chemical discharge processing with self-acting bubble layer, US Patent 0110502A1
    • C.T. Yang, H.Y. Tsai, T.C. Wu, Method and device for electro-chemical discharge processing with self-acting bubble layer, US Patent 0110502A1, 2002.
    • (2002)
    • Yang, C.T.1    Tsai, H.Y.2    Wu, T.C.3
  • 20
    • 0031233989 scopus 로고    scopus 로고
    • Study on hole machining of non-conducting ceramics by gas-filled electrodischarge and electrochemical compound machining
    • Y. Liu, Z. Jia, and J. Liu Study on hole machining of non-conducting ceramics by gas-filled electrodischarge and electrochemical compound machining Journal of Material Processing Technology 69 1997 198 202
    • (1997) Journal of Material Processing Technology , vol.69 , pp. 198-202
    • Liu, Y.1    Jia, Z.2    Liu, J.3
  • 25
  • 26
    • 0030285226 scopus 로고    scopus 로고
    • Mechanism of spark generation during electrochemical discharge machining: A theoretical model and experimental verification
    • I. Basak, and A. Ghosh Mechanism of spark generation during electrochemical discharge machining: a theoretical model and experimental verification Journal of Material Processing Technology 62 1996 46 53
    • (1996) Journal of Material Processing Technology , vol.62 , pp. 46-53
    • Basak, I.1    Ghosh, A.2
  • 27
    • 0031270136 scopus 로고    scopus 로고
    • Mechanism of material removal in electrochemical discharge machining: A theoretical model and experimental verification
    • I. Basak, and A. Ghosh Mechanism of material removal in electrochemical discharge machining: a theoretical model and experimental verification Journal of Material Processing Technology 71 1997 350 359
    • (1997) Journal of Material Processing Technology , vol.71 , pp. 350-359
    • Basak, I.1    Ghosh, A.2
  • 28
    • 0342298657 scopus 로고    scopus 로고
    • Experimental investigations into electrochemical discharge machining (ECDM) of non-conductive ceramic materials
    • B. Bhattacharyya, B.N. Doloi, and S.K. Sorkhel Experimental investigations into electrochemical discharge machining (ECDM) of non-conductive ceramic materials Journal of Materials Processing Technology 95 1999 145 154
    • (1999) Journal of Materials Processing Technology , vol.95 , pp. 145-154
    • Bhattacharyya, B.1    Doloi, B.N.2    Sorkhel, S.K.3
  • 29
    • 0034222336 scopus 로고    scopus 로고
    • Electrochemical spark trepanning of alumina and quartz
    • V.K. Jain, and S.K. Chak Electrochemical spark trepanning of alumina and quartz Machining Science and Technology 4 2000 277 290
    • (2000) Machining Science and Technology , vol.4 , pp. 277-290
    • Jain, V.K.1    Chak, S.K.2
  • 33
    • 0035124448 scopus 로고    scopus 로고
    • Micro hole machining of borosilicate glass trough electrochemical discharge machining (ECDM)
    • C.T. Yang, S.S. Ho, and B.H. Yan Micro hole machining of borosilicate glass trough electrochemical discharge machining (ECDM) Key Engineering Materials 196 2001 149 166
    • (2001) Key Engineering Materials , vol.196 , pp. 149-166
    • Yang, C.T.1    Ho, S.S.2    Yan, B.H.3
  • 36
    • 0034875355 scopus 로고    scopus 로고
    • Self-aligned micro tool and electrochemical discharge machining (ECDM) for ceramic materials
    • H.-J. Lim, Y.-M. Lim, S.H. Kim, and Y.K. Kwak Self-aligned micro tool and electrochemical discharge machining (ECDM) for ceramic materials Proceedings of SPIE 4416 2001 348 353
    • (2001) Proceedings of SPIE , vol.4416 , pp. 348-353
    • Lim, H.-J.1    Lim, Y.-M.2    Kim, S.H.3    Kwak, Y.K.4
  • 37
    • 0024621653 scopus 로고
    • Ceramic material processing by electrical discharge in electrolyte
    • H. Tokura, I. Kondoh, and M. Yoshikswa Ceramic material processing by electrical discharge in electrolyte Journal of Material Science 24 1989 991 998
    • (1989) Journal of Material Science , vol.24 , pp. 991-998
    • Tokura, H.1    Kondoh, I.2    Yoshikswa, M.3
  • 46
    • 2942612349 scopus 로고    scopus 로고
    • Study of electrochemical discharge machining technology for slicing non-conductive brittle materials
    • W.Y. Peng, and Y.S. Liao Study of electrochemical discharge machining technology for slicing non-conductive brittle materials Journal of Material Processing Technology 149 2004 363 369
    • (2004) Journal of Material Processing Technology , vol.149 , pp. 363-369
    • Peng, W.Y.1    Liao, Y.S.2
  • 48
    • 84882064400 scopus 로고
    • ECSM - A new way to machine polymer composites
    • Delhi, December
    • V.K. Jain, ECSM - a new way to machine polymer composites, in Proceedings of INCARF-93 Conference IIT, Delhi, December 1993.
    • (1993) Proceedings of INCARF-93 Conference IIT
    • Jain, V.K.1
  • 49
    • 0025417066 scopus 로고
    • Absolute pressure sensors by air-tight electrical feedthrough structure
    • M. Esashi, Y. Matsumoto, and S. Shoji Absolute pressure sensors by air-tight electrical feedthrough structure Sensors and Actuators A21-A23 1990 1048 1052
    • (1990) Sensors and Actuators , vol.A21-A23 , pp. 1048-1052
    • Esashi, M.1    Matsumoto, Y.2    Shoji, S.3
  • 55
    • 14744282380 scopus 로고    scopus 로고
    • Development of desktop machinery for three-dimensional microstructuring of pyrex glass devices
    • Minneapolis, USA
    • H. Langen, V. Fascio, R. Wüthrich, T. Ejiri, D. Viquerat, Development of desktop machinery for three-dimensional microstructuring of pyrex glass devices, International Workshop on Microfactories, Minneapolis, USA, 2002, pp. 53-56.
    • (2002) International Workshop on Microfactories , pp. 53-56
    • Langen, H.1    Fascio, V.2    Wüthrich, R.3    Ejiri, T.4    Viquerat, D.5
  • 58
    • 14844290791 scopus 로고
    • Experiments with the light of voltaic arc
    • M.L. Foucault Experiments with the light of voltaic arc Journal of Franklin Institute 48 1849 50 52
    • (1849) Journal of Franklin Institute , vol.48 , pp. 50-52
    • Foucault, M.L.1
  • 60
    • 0030684490 scopus 로고    scopus 로고
    • Contribution to the interpretation of the anode effect
    • H. Vogt Contribution to the interpretation of the anode effect Electrochimica Acta 42 1997 2695 2705
    • (1997) Electrochimica Acta , vol.42 , pp. 2695-2705
    • Vogt, H.1
  • 61
    • 0036507988 scopus 로고    scopus 로고
    • The voltage of alumina reduction cells prior to the anode effect
    • H. Vogt, and J. Thonstad The voltage of alumina reduction cells prior to the anode effect Journal of Applied Electrochemistry 32 2002 241 249
    • (2002) Journal of Applied Electrochemistry , vol.32 , pp. 241-249
    • Vogt, H.1    Thonstad, J.2
  • 62
    • 1042288864 scopus 로고    scopus 로고
    • A model for electrode effects using percolation theory
    • R. Wüthrich, and H. Bleuler A model for electrode effects using percolation theory Electrochimica Acta 49 2004 1547 1554
    • (2004) Electrochimica Acta , vol.49 , pp. 1547-1554
    • Wüthrich, R.1    Bleuler, H.2
  • 66
    • 0042638017 scopus 로고
    • The effect of electrolyte constituents on the onset and location of glow discharge electrolysis
    • S.K. Sengupta The effect of electrolyte constituents on the onset and location of glow discharge electrolysis Journal of Electroanalytical Chemistry 127 1981 263 265
    • (1981) Journal of Electroanalytical Chemistry , vol.127 , pp. 263-265
    • Sengupta, S.K.1
  • 67
    • 0033075334 scopus 로고    scopus 로고
    • The anode effect as a fluid dynamic problem
    • H. Vogt The anode effect as a fluid dynamic problem Journal of Applied Electrochemistry 29 1999 137 145
    • (1999) Journal of Applied Electrochemistry , vol.29 , pp. 137-145
    • Vogt, H.1
  • 69
    • 0017934267 scopus 로고
    • Hydrodynamic instabilities in electrolytic gas evolution
    • B. Mazza, P. Pedeferri, and G. Re Hydrodynamic instabilities in electrolytic gas evolution Electrochimica Acta 23 1978 87 93
    • (1978) Electrochimica Acta , vol.23 , pp. 87-93
    • Mazza, B.1    Pedeferri, P.2    Re, G.3
  • 75
    • 1042290276 scopus 로고
    • Les effets d'électrodes dans les solutions aqueuses. Résultats obtenus à l'aide d'une caméra rapide
    • Ch. Guilpin, and J. Garbarz-Olivier Les effets d'électrodes dans les solutions aqueuses. Résultats obtenus à l'aide d'une caméra rapide Journal de Chimie Physique 75 1978 723 726
    • (1978) Journal De Chimie Physique , vol.75 , pp. 723-726
    • Guilpin, Ch.1    Garbarz-Olivier, J.2
  • 76
    • 39549093412 scopus 로고
    • Analyse de la lumière émise aux électrodes pendant les effets d'électrodes, dans des solutions aqueuses d'électroylte
    • Ch. Guilpin, and J. Garbarz-Olivier Analyse de la lumière émise aux électrodes pendant les effets d'électrodes, dans des solutions aqueuses d'électroylte Spectrochimica Acta 32B 1977 155 163
    • (1977) Spectrochimica Acta , vol.32 , pp. 155-163
    • Guilpin, Ch.1    Garbarz-Olivier, J.2
  • 77
    • 14844307509 scopus 로고
    • Dissertation Thesis, Indian Institute of Technology, Kanpur
    • V. Reghuram, Dissertation Thesis, Indian Institute of Technology, Kanpur, 1994.
    • (1994)
    • Reghuram, V.1
  • 81
    • 14844291230 scopus 로고    scopus 로고
    • Electrochemical engineering of bubble effect during electrolysis process: Continuous and stochastic modelling
    • San Antonio, USA
    • Ph. Mandin, J. Hambourger, S. Sanchez, G. Picard, R. Wüthrich, V. Fascio, H. Bleuler, Electrochemical engineering of bubble effect during electrolysis process: continuous and stochastic modelling, 205th ECS Meeting, San Antonio, USA, 2004.
    • (2004) 205th ECS Meeting
    • Mandin, Ph.1    Hambourger, J.2    Sanchez, S.3    Picard, G.4    Wüthrich, R.5    Fascio, V.6    Bleuler, H.7
  • 86
    • 33645078444 scopus 로고    scopus 로고
    • The gas film in spark assisted chemical engraving (SACE) - A key element for micro-machining applications
    • submitted for publication
    • R. Wüthrich, L. Hof, The gas film in spark assisted chemical engraving (SACE) - a key element for micro-machining applications, International Journal of Machine Tools and Manufacture, submitted for publication.
    • International Journal of Machine Tools and Manufacture
    • Wüthrich, R.1    Hof, L.2


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