Study of micro ultrasonic machining of silicon

American Society of Mechanical Engineers, Manufacturing Engineering Division, MED

Volumn 16-2, Issue , 2005, Pages 1063-1070

  Yu, Z ^a   Hu, X ^a   Rajurkar, K P ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

Debris Accumulation; Material Removal; Micro USM

Indexed keywords

ABRASIVE PARTICLES; DEBRIS ACCUMULATION; MATERIAL REMOVAL; MICRO MECHANICAL MACHINING; MICRO USM;

ABRASIVES; BRITTLENESS; CERAMIC MATERIALS; CRYSTALS; MACHINING; SAPPHIRE; ULTRASONIC APPLICATIONS; VIBRATIONS (MECHANICAL);

SILICON;

EID: 33646006692     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-79244     Document Type: Conference Paper

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