Measuring the metrology gap - Three-dimensional metrology at the mesoscopic level

Journal of Manufacturing Processes

Volumn 6, Issue 1, 2004, Pages 117-124

  Peggs, Graham N ^a   Lewis, Andrew J ^a   Leach, Richard K ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

CMM; Coordinate Measurement; Metrology; Micrometrology; Nanometrology

Indexed keywords

DESIGN; GAGES; GRAIN SIZE AND SHAPE; MANUFACTURE; MICROMETERS; SURFACES; VOLUME MEASUREMENT;

COORDINATE MEASUREMENT; MICROMETROLOGY; NANOMETROLOGY; PROBING SYSTEMS;

NANOSTRUCTURED MATERIALS;

EID: 4043136573     PISSN: 15266125     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1526-6125(04)70065-1     Document Type: Article

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