Study of 3D micro-ultrasonic machining

Journal of Manufacturing Science and Engineering

Volumn 126, Issue 4, 2004, Pages 727-732

  Yu, Z Y ^a   Rajurkar, K P ^a   Tandon, A ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

3D Microshapes; Micromachining; Ultrasonic Machining

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER AIDED MANUFACTURING; ELECTRIC DISCHARGE MACHINING; FREQUENCIES; GLASS; MICROELECTROMECHANICAL DEVICES; QUARTZ; SILICON; THREE DIMENSIONAL; ULTRASONIC MACHINE TOOLS; VIBRATIONS (MECHANICAL); WEAR OF MATERIALS;

3D MICROSHAPES; ELECTROCHEMICAL MACHINING (ECM); MICROULTRASONIC VIBRATION; ULTRASONIC MACHINING;

MICROMACHINING;

EID: 14744303671     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1813482     Document Type: Article

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