A study on the machining of high-aspect ratio micro-structures using micro-EDM

Journal of Materials Processing Technology

Volumn 140, Issue 1-3 SPEC., 2003, Pages 318-325

  Lim, H S ^a   Wong, Y S ^a   Rahman, M ^a   Edwin Lee, M K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Electro discharge machining; High aspect ratio; Micro EDM; Micro structure; On machine measurement

Indexed keywords

DEPOSITION; INJECTION MOLDING; MICROELECTRODES; MICROSTRUCTURE; OPTICAL SENSORS; WEAR OF MATERIALS; X RAY LITHOGRAPHY;

TOOL WEAR;

ELECTRIC DISCHARGE MACHINING;

EID: 0041408674     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(03)00760-X     Document Type: Conference Paper

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