Electrochemical micromachining with ultrashort voltage pulses-a versatile method with lithographical precision

Electrochimica Acta

Volumn 48, Issue 20-22, 2003, Pages 3213-3219

  Kock, M ^a   Kirchner, V ^a   Schuster, R ^a  

^a FRITZ HABER INSTITUT DER MAX PLANCK GESELLSCHAFT   (Germany)

Author keywords

Doublelayer charging; Micromachining; Microstructure; Nickel; Short voltage pulses

Indexed keywords

CYCLIC VOLTAMMETRY; ELECTROCHEMISTRY; LITHOGRAPHY; MICROSTRUCTURE; ULTRASHORT PULSES;

DOUBLELAYER CHARGING;

MICROMACHINING;

EID: 0042970310     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0013-4686(03)00374-8     Document Type: Conference Paper

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