The feasibility study on a fabricated micro slit die using micro EDM

International Journal of Advanced Manufacturing Technology

Volumn 25, Issue 1-2, 2005, Pages 10-16

  Wang, A Cheng ^a   Yan, Biing Hwa ^a   Tang, You Xi ^a   Huang, Fuang Yuan ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Fin; Micro EDM; Micro heat sink; Micro slit die; Pressing; Scraping; Tungsten carbide

Indexed keywords

DIES; ELECTRODES; FABRICATION; FINS (HEAT EXCHANGE); HEAT SINKS; PRESSING (FORMING); SCRAP METAL; TUNGSTEN CARBIDE; WEAR OF MATERIALS;

FINS; MICRO ELECTRIC DISCHARGE MACHINING (EDM); MICRO HEAT SINKS; MICRO SLIT DIE; PRESSING; SCRAPING;

ELECTRIC DISCHARGE MACHINING;

EID: 11144287217     PISSN: 02683768     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00170-003-1831-7     Document Type: Article

References (22)

1. Rettemayr M, Exner HE, Mader W (1988) Electron microscopy of binder phase deformation in WC-Co alloys. Mater Sci Technol 4(11):984-990
2. Liu AY, Wentzcovitch RM, Cohen ML (1988) Structural and electronic properties of WC. Phys Rev B Condens Matter 38(14):9483-9489
3. Levy GN, Wertheim R (1988) EDM machining of sintered carbide compacting dies. Ann CIRP 37(1): 175-178
4. Pandit SM, Rajukar KP (1981) Analysis of electrical discharge machining of cemented carbides. Ann CIRP 30(1):111-116
5. Gadalla AM, Tsai W (1989) Machining of WC-Co composites. Mater Manuf Process 4(3):411-423
6. Gadalla AM, Tasi W (1989) Electrical discharge machining of tungsten carbide cobalt composites. J Amer Ceram Soc 72(8):1396-1401
7. 2-Sic. J Eng Mater Technol 113(10):437-442
8. 2-based ceramics. Mater Manuf Process 11(4):565-574
9. Masuzawa T (1985) An approach to micromachining through machine tool technology. Ann CIRP 34(1):419-425
10. Masuzawa T, Fujino M, Kobayashi K, Suzuki T (1985) Wire electro-discharge grinding for micro-machining. Ann CIRP 34(1):431-434
11. Kagaya K, Oishi Y, Yada K (1986) Micro-electro-discharge machining using water as a working fluid-1: micro-hole drilling. Precis Eng 8(3): 156-162
12. Masuzawa T, Yamamoto M, Fujino M (1989) A micropunching system using wire-EDM. Proc of Int Symposium for Electromachining (ISEM-9), pp 86-89
13. Kagaya K, Oishi Y, Yada K (1990) Micro-electro-discharge machining using water as a working fluid-2: narrow slit fabrication. Precis Eng 12(4):213-217
14. Kuo L, Masuzawa T (1991) A micro-pipe fabrication process. Proc IEEE MEMS'91, pp 80-85
15. Allen DM, Lecheheb A (1996) Micro electro-discharge machining of ink jet nozzles: optimum selection of material and machining parameters. J Mater Process Technol 58:53-66
16. Xi-Qing S, Masuzawa T, Fjino M (1996) Micro ultrasonic machining and its applications in MEMS. Sens Actuators A 57:159-164
17. Reynaerts D, Heeren P-H, Van Brussel H (1997) Microstructuring of silicon by elelctro-discharge machining (EDM). Part I: theory. Sens Actuators A 60:212-218
18. Chow HM, Yang CT, Van BH, Huang FY (1999) Fabrication of micro electrode of carbide and micro hole machining characteristic of Ti-6Al-4V alloy by electrical discharge machining. J Japan Inst Light Met 49(1):2-7
19. Masuzawa T (2000) State of the art of micromachining. Ann CIRP 49(2):473-488
20. Masuzawa T (2001) Micro-EDM. Proceedings of the 13th International Symposium for Electromachining ISEM VIII 1; pp 3-19
21. Yu ZY, Rajurkar KP, Shen H (2002) High aspect ratio and complex shaped blind micro holes by micro EDM. Ann CIRP 51(1):359-362
22. Kunieda M, Furuoya S (1991) Improvement of EDM efficiency by supplying oxygen gas into gap. Ann CIRP 40:215-218