Proximal probe-based fabrication of nanometer-scale devices

Materials Science and Engineering B

Volumn 51, Issue 1-3, 1998, Pages 173-177

  Campbell, P M ^a   Snow, E S ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Atomic force microscope; Nanofabrication; Nanometer scale devices; Oxidation

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; ELECTRIC FIELD EFFECTS; ETCHING; FIELD EFFECT TRANSISTORS; MASKS; METALLIC FILMS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; SURFACE STRUCTURE;

NANOMETER SCALE DEVICES;

NANOTECHNOLOGY;

EID: 0006795577     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(97)00255-9     Document Type: Article

References (23)

1. R. Wiesendanger, Appl. Surf. Sci. 54 (1992) 271.
2. D.M. Eigler, E.K. Schweizer, Nature 344 (1990) 524.
3. M.A. McCord, R.F.W. Pease, J. Vac. Sci. Technol. B6 (1988) 293.
4. R.M. Silver, E.E. Ehrichs, A.L. de Lozanne, Appl. Phys. Lett. 51 (1987) 247.
5. I.-W. Lyo, P. Avouris, Science 253 (1991) 173.
6. J.A. Dagata, J. Schneir, H.H. Harary, C.J. Evans, M.T. Postek, J. Benett, Appl. Phys. Lett. 56 (1990) 2001.
7. E.S. Snow, P.M. Campbell, P.J. McMarr, Appl. Phys. Lett. 63 (1993) 749.
8. E.S. Snow, P.M. Campbell, Appl. Phys. Lett. 64 (1932) 1994).
9. E.D. Palik, O.J. Glembocki, R.E. Stahlbush, J. Electrochem. Soc. 135 (1988) 3126.
10. P.J. McMarr, B.J. Mrstik, M.S. Barger, G. Bowden, J.R. Blanco, J. Appl. Phys. 67 (1990) 7211.
11. P.M. Campbell, E.S. Snow, P.J. McMarr, Solid-State Electron. 37 (1994) 583.
12. P.M. Campbell, E.S. Snow, P.J. McMarr, Appl. Phys. Lett. 66 (1995) 1388.
13. S.C. Minne, H.T. Soh, Ph. Flueckiger, C.F. Quate, Appl. Phys. Lett. 66 (1995) 703.
14. E.S. Snow, P.M. Campbell, B.V. Shanabrook, Appl. Phys. Lett. 63 (1994) 3488.
15. H. Sugimura, T. Uchida, N. Kitamura, H. Masuhara, Jpn. J. Appl. Phys. 32 (1993) 553.
16. K. Matsumoto, S. Takahashi, M. Ishii, M. Hoshi, A. Kurokawa, S. Ichimura, A. Ando, Jpn. J. Appl. Phys. 34 (1995) 1387.
17. K. Matsumoto, M. Ishii, K. Segawa, Y. Oka, B.J. Vartanian, J.S. Harris, Appl. Phys. Lett. 68 (1996) 34.
18. E.S. Snow, P.M. Campbell, Science 270 (1995) 1639.
19. E.S. Snow, D. Park, P.M. Campbell, Appl. Phys. Lett. 69 (1996) 269.
20. J.W. Lyding, T.-C. Shen, J.S. Hubacek, J.R. Tucker, G.C. Abein, Appl. Phys. Lett. 64 (1994) 2010.
21. S.C. Minne, S.R. Manalis, C.F. Quate, Appl. Phys. Lett. 67, (1995) 3918; J. Vac. Sci. Technol. B13, (1995) 1380.
22. S.C. Minne, S.R. Manalis, C.F. Quate, Appl. Phys. Lett. 67, (1995) 3918; J. Vac. Sci. Technol. B13, (1995) 1380.
23. E.S. Snow, P.M. Campbell, F.K. Perkins, Proc. IEEE 85 (1997) 601.