Experimental study of micro-EDM machining performances on silicon wafer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4174, Issue , 2000, Pages 331-339

  Song, Xiaozhong ^a   Meeusen, Wim ^a   Reynaerts, Dominiek ^a   Van Brussel, Hendrik ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PROPAGATION; CRYSTAL LATTICES; MICROCRACKS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; SILICON WAFERS;

MICRO-JOULE ENERGY RANGES;

MICROMACHINING;

EID: 0034541674     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.396450     Document Type: Conference Paper

References (13)