Excimer laser micromachining for 3D microstructure

Journal of Materials Processing Technology

Volumn 149, Issue 1-3, 2004, Pages 561-566

  Choi, Kyung Hyun ^a   Meijer, Johan ^b   Masuzawa, Takahisa ^c   Kim, Dae Hyun ^a  

^a Jeju National University   (South Korea)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

3D Micromachining technology; Excimer laser; Hole Area Modulation; Laser ablation; MEMS

Indexed keywords

COMPUTER SIMULATION; ENERGY DISSIPATION; LASER ABLATION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSTRUCTURE; PROBLEM SOLVING; X RAY LITHOGRAPHY;

3D MICROMACHINING TECHNOLOGY; EXCIMER LASER; HOLE AREA MODULATION (HAM); LASER MACHINING;

LASER PULSES;

EID: 2942541267     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2004.03.005     Document Type: Conference Paper

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