Application of USM to micromachining by on-the-machine tool fabrication

Proceedings - KORUS 2000: 4th Korea-Russia International Symposium on Science and Technology

Volumn 3, Issue , 2000, Pages 106-115

  Egashira, Kai ^a   Masuzawa, T ^a   Fujino, M ^a   Sun, Xi Qing ^b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

microholes; micromachining; ultrasonic machining; WEDG

Indexed keywords

CERAMIC MATERIALS; COMPOSITE MICROMECHANICS; MICROMACHINING; ULTRASONIC APPLICATIONS; ULTRASONIC CUTTING;

ADDITIONAL EXPERIMENTS; ELECTRODISCHARGE GRINDING; ITS APPLICATIONS; MACHINING METHODS; MICRO HOLES; SILICON PLATES; ULTRASONIC MACHINING; WEDG;

MACHINE TOOLS;

EID: 33645035272     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/KORUS.2000.866068     Document Type: Conference Paper

References (3)

1. M. Komamiah and P. N. Reddy, A study on the influence of workpiece properties in ultrasonic machining, Int. J. Mach.Tools Manufact., Vol. 33, No. 3 (1993), pp. 495-505.
2. T. Masuawa, M. Fujino, K. Kobayashi and T. Suzuki, wire electro-discharge grinding for micromachining, Annals of the CIRP, 34, 1(1985), pp.431-434.
3. T. Masaki, K. Kawata and T. Masuzawa, Micro electro-discharge machining and its applications, Proceedings of IEEE MEMS, pp. 21-26, Napa Valley, Feb. 11-14, 1990.