A nanometre-precision, ultra-stiff piezostepper stage for ELID-grinding

CIRP Annals - Manufacturing Technology

Volumn 52, Issue 1, 2003, Pages 317-322

  Van Brussel, H ^a   Reynaerts, D ^a   Vanherck, P ^a   Versteyhe, M ^a   Devos, S ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Piezoelectric; Positioning; Ultra precision

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); FORCE CONTROL; GRINDING MACHINES; INTERFEROMETRY; STIFFNESS;

ELECTROLYTIC IN-PROCESS DRESSING; HAMMERING; PIEZOSTEPPING; STATIC STIFFNESS;

GRINDING (MACHINING);

EID: 0042343675     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60592-7     Document Type: Article

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