Advances in micro ultrasonic assisted lapping of microstructures in hard-brittle materials: A brief review and outlook

International Journal of Machine Tools and Manufacture

Volumn 45, Issue 7-8, 2005, Pages 881-890

  Zhang, C ^a   Rentsch, R ^a   Brinksmeier, E ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

Brittle material; Microstructure; Ultrasonic assisted lapping

Indexed keywords

ABRASIVES; BRITTLENESS; DIAMOND CUTTING TOOLS; LAPPING; MICROMACHINING; MICROSTRUCTURE; PARAMETER ESTIMATION; PROBLEM SOLVING; VIBRATIONS (MECHANICAL);

DIAMOND MICROMILLING; MICRO ENGINEERING; MICROFABRICATION; ULTRASONIC ASSISTED LAPPING;

ULTRASONICS;

EID: 13844309934     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2004.10.018     Document Type: Article

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