Laser machining by short and ultrashort pulses, state of the art and new opportunities in the age of the photons

CIRP Annals - Manufacturing Technology

Volumn 51, Issue 2, 2002, Pages 531-550

  Meijer, J ^a   Du, K ^b   Gillner, A ^c   Hoffmann, D ^c   Kovalenko, V S ^d   Masuzawa, T ^e   Ostendorf, A ^f   Poprawe, R ^c   Schulz, W ^c  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b EdgeWave GmbH   (Germany)

^c FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

^d TARAS SHEVCHENKO NATIONAL UNIVERSITY OF KYIV   (Ukraine)

^e UNIVERSITY OF TOKYO   (Japan)

^f LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Ablation; Laser; Micro machining

Indexed keywords

LASER ABLATION; LASER BEAMS; LASER PULSES; PHOTONS; ULTRASHORT PULSES;

LASER MACHINING; LASER-MATERIAL INTERACTIONS;

MICROMACHINING;

EID: 0036978275     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)61699-0     Document Type: Article

References (78)

1. Achenbach, J., 2001. The power of light, National Geographic, October 2001, p 2-31.
2. Hentschel, M. et al. 2001, Nature 414 p509.
3. Hewett, J. 2002. Time for attosecond consolidation. Optics and Lasers Europe, OLE Jan. 2002, p 30.
4. Chen, X. and Liu, X. 1999. Short pulsed laser machining: How short is short enough? Journal of laser applications. Vol. 11, nr 6 p268-272.
5. Bosman J. 2002, Laser engraving processes. PhD thesis, University of Twente (in press)
6. Semak, V., 2001, Laser drilling: from milli to femto, Laser solutions course, ICALEO 2001, Jacksonville, 18 October, p 1-9.
7. Ohmura, E and I. Miyamoto. 1998. Molecular dynamics simulation on laser ablation of metals and silicon, Int. J. of Japan Soc. Prec. Eng. Vol 34 No 4, p 248-253.
8. Ishizaka, Y, K. Watanabe, I. Fukumoto, E. Ohmura and I. Miyamoto. 1998. Three-dimensional molecular dynamics simulation on laser materials processing of silicon. Proc. ICALEO98, p A55-63.
9. Ohmura, E, I. Fukumoto and I. Miyamoto. 1998. Molecular dynamics simulation on laser ablation and thermal shock phenomena. Proc. ICALEO 1998, p A45-54.
10. Ohmura, E and I. Fukumoto. 1996. Study on fusing- and evaporating process of fcc metal due to laser irradiation using molecular dynamics. Int. J. of Japan Soc. Prec. Eng. Vol 30, No 1, p 47-48.
11. McClung, F J, Hellwarth R W 1963 Characteristics of Giant Optical Pulsations from Ruby Proc. IEEE 51 46.
12. Mocker, H.W., and R.J. Collins, 1965, Mode competition and self-locking effects in a Q-switched ruby laser. Applied Physics Letters no 7, p.270.
13. Krausz, F, Brabec T, Spielmann, C 1991 Self-starting passive mode locking Opt. Letters 16 235
14. DeMaria, A J, Stetser D A, Heynau, H 1966 Self mode-locking of lasers with saturable absorbers Applied Physics Letters 8 174
15. Spence D E, Kean, P N, Sibbet, W 1991 60-fsec pulse generation from a self-mode-locked Ti:sapphire laser Optics Letters 16 42.
16. Guillot, D., 1998, Microlasers. Photonics Spectra. Feb. 1998. P 143-146.
17. Kovalenko, V. S. Laser technology, Vyscha Schola, Kiev, 1989, 280 p
18. Ogura, G., J. Angell and D. Wall: Applications test potential of laser micromachining. Laser Focus World, June 1998, 117-123.
19. Weck, M., Schröder, H.B., 1993, Thermal Energy from Machining Process - A dominating factor on form accuracy in ultra- and high precision turning, Proceedings of the 8th ASPE Annual Meeting, Nov. 7-12th 1993, Seattle, Washington, USA, 170-173.
20. Kruth, J.-P., Tönshoff, H. K., Klocke, F., 1998, Surface and Sub-Surface Quality in Material Removal Processes for Tool Making, Int. Symp. Electromachining ISEM XII 1998, Aachen, Germany, in: VDI Berichte, F. Klocke, J.-P. Kruth (eds.), 1405:33-64.
21. Kostrykin, V., M. Niessen, J. Jandeleit, W. Schulz, E.W. Kreutz, and R. Poprawe, 1998, Picosecond laser pulses induced heat and mass transfer. Proc. SPIE Vol. 3343, p 971-982.
22. Klimentov, S.M., Garnov, S.V., Kononenko, T.V., Konov, V.I., Pivovarov, P.A., Dausinger, F., 1999, High rate deep channel ablative formation by picosecond-nanosecond combined laser pulses, Applied Physics A 69:633-636.
23. Stewen, C., Contag, K., Larionov, M., Giesen, A., Hügel, H., 2000, A 1-kW Thin Disc Laser, IEEE JSTQE 6(4):650-658.
24. Brunner, F., Spühler, G.J., Aus der Au, J., Krainer, L., Morier-Genoud, F., Paschotta, R., Weiss, S., Harder, C., Lagatsky, A.A., Abdolvand, A., Kuleshov, N.V., Keller, U., 2000, Diode-pumped femtosecond Yb:KGd(WO4)2 laser with 1.1 W average power, Opt. letters 25(15):1119-1121.
25. Du, K., Wu, L., Xu J., Giesekus, J., Loosen, P., Poprawe, R., 1998, Partially end-pumped Nd:YAG slab laser with hybrid resonator, Optics Letters 23(5):370-372.
26. Schmidt, G., Hoffmann, H.D., Bonati, G., Wester, R., Loosen, P., Poprawe, R., 1999, A New Diode Pumped Multi kW Solid State Laser-Modelling of the Performance in Comparison with Experimental Results, Proceedings Photonics West 99.
27. Koch, R., Schröder, T., Stamm, U., Zschocke, W., Basting, D., 1998, High Average Power, High Pulse Repetition Frequency Diode Pumped UV Solid-State Laser System, Glasgow (UK), Proc. Cleo Europe 98, paper CWJ5.
28. Tönshoff, H. K., Mommsen, J., 1992, Process of generating three-dimensional microstructures with excimer lasers, Proc. ECLAT92, Göttingen.
29. Hellrung, D., Gillner, A., Poprawe, R., 1997, Laser beam removal of micro-structures with Nd:YAG lasers, Proc. Lasers in Material Processing Laser'97, Munich, SPIE 3097:267-273.
30. Spur, G. 2001: Industrial cleaning technologies for hard surfaces: dry ice blasting and laser. Proc. 40th Int. detergency conf. IDC'01, p 156-165.
31. Hoving, W. Philips, CFT. Private communications.
32. Lee, J.M., K.G. Watkins and W.M. Steen, 2001, Surface cleaning of silicon wafer by laser sparking. J. Laser Appl., Vol 13, 4, p. 154-158.
33. Ready, J.F., 1971, Effects of high power laser radiation (Academic, New York), p.213.
34. Kidder, R.E., 1968, Nucl. Fusion, 8, 3.
35. Geiger, M., M. Kleiner, R. Eckstein, N. Tiesler, U. Engel, Microforming, Annals of the CIRP Vol. 50/2/2001, p. 445-462.
36. Hoving, W., 2001 Laser fine adjustment, Proc. ICALEO 2001.
37. Otsu, M., T. Wada and K. Osakada, 2001, Micro bending of thin spring by laser forming and spark forming, Annals of the CIRP, Vol. 50/1, p 141-144.
38. Meijer, J. In J.A. McGeogh 2002 Micromachining materials Marcel Dekker, NY, p203-237.
39. Galantucci, L.M., 1998, Excimer laser cutting: Experimental characterization and 3D numerical modelling for polyester resins, Annals of the CIRP Vol. 47/1/1998, p 141-144.
40. Elliot, D.J. Ultraviolet laser technology and applications. Academic Press, NY 1995.
41. Basting, D. 2001, Excimer laser technology: Laser sources, optics, systems and applications. Lambda Physik AG, Göttinger (D)
42. Hind, A., 2001, Spectrophotometry Takes measure of deep UV Lithography, Photonics Spectra Dec 2001, p 82-86.
43. Burnett, J.H, Z.H. Levine, E.L. Shirley, 2001, Hidden in plain sight: Can lithographers design out the intrinsic birefringence of calcium fluoride, or must they find a new material solution for 157 nm lithography, Photonics Spectra, Dec 2001, p 88-92.
44. www.cee.hw.ac.uk/microengineering/microsystems/uv-liga/.
45. MacGeough, J.A., M.C. Leu, K.P. Rajurkar, A.K.M. De Silva and Q. Liu, 2001, Electroforming process and application to micro/macro manufacturing, CIRP Annals, Volume 50/2/2001, pp.499-514.
46. Ready, J.F. 2001, LIA Handbook of Laser Materials Processing Magnolia Publ. Inc p 491.
47. Bachmann, F.G. 1990, Industrial laser applications, Appl. Surface Science 46, p. 254-263.
48. Riccardi, G., M. Cantello, F. Mariotti, P. Giacosa, 1998. Micromachining with excimer laser, Annals of the CIRP, Vol. 47/1/1998 p 145-148.
49. Lasers are Diamond's best friend. Photonics Spectra. June 1992, p. 40
50. Windholz, R., and P. Molian, 1997, Nanosecond pulsed excimer laser machining of CVD diamond and HOPG graphite, J. Mater. Sci. 32, p. 4295-4301.
51. Shirk, M.D., and P.A. Molian, 1998, Ultrashort laser ablation of diamond, J. of Laser Applications. Vol 10, 2, p. 64-70
52. Lotze, R. J. Birkel, K. Wissenbach, 1999. Entlacken mit Laserstrahlung, Neue industrielle Anwendungen. JOT Journal für Oberflächentechnik 1999/8.
53. Klein, S. T. Stratoudaki, V. Zafiropoulos, J. Hildenhagen, K. Dickmann, Th. Lehmkuhl, 1999. Laser induced breakdown spectroscopy for on line laser cleaning of sandstone and stained glasses. Appl. Phys. A69, p 441-444.
54. www.art-innovation.nl
55. A. Schoonderbeek, C.A. Biesheuvel, R.M. Hofstra, K-J. Boller, J. Meijer, 2002, "High speed drilling of metals with a long pulse XeCl excimer laser", Proc. SPIE 4760 High-Power Laser Ablation IV.
56. Fotakis, C. 1998 in Handbook of the EuroLaser Academy, Chapman & Hall, London, Vol. 1, p 227 - 265.
57. Burgess, D.S., 2001, Laser ablation generates nanoparticles, Photonics Spectra, July '01, p 26-29
58. Masuzawa, T, J. Olde Benneker, J.J.C. Eindhoven, 2000, A new Method for three dimensional excimer laser micromachining by Hole area modulation (HAM), Annals of the CIRP Vol. 49/1, p 139-142.
59. Illy, E.K. and J.A. Piper. Micromachining cuts cost for Copper Vapor Lasers, Photonics Spectra March 1998, 106-111.
60. Kovalenko, V., M. Anyakin, Y. Uno, 2000, Modeling and Optimization of Laser Semiconductor Cutting," Proceedings of the ICALEO, Vol. 90, Laser Microfabrication, p. D82-D92.
61. Allen, D, H. Almond and P. Logan. A technical comparison of micro-electrodischarge machining, micro drilling and copper vapour laser machining for the fabrication of ink jet nozzles. Proc. SPIE Vol. 4019 (2000), p 531-540.
62. S. Elmes et al. 2001. Laser machining of micro reservoir pins for gene analysis and high throughput screening. ICALEO Laser Micro fabrication Conf. M303, ISBN 0-912035-73-0.
63. Allen, D.M., H.J.A. Almond, J.S. Bhogal, A.A. Green, P. Logan, X.X. Huang, Typical metrology of Micro hole arrays made in stainless steel foils by two stage EDM. Annals of the CIRP Vol. 48/1/1999, pp 127-130.
64. Almond, H, J. Bhogal and D.M. Allen. A positional accuracy study of a micro EDM machine. Proceedings of SPIE, 3680, p. 1113-1124, 1999.
65. Masuzawa, T., 2000, State of the art of micromachining. Annals of the CIRP Vol. 49/2/2000, pp 478-488
66. Kearsley, A. and K. Errey. Powerful pulses focus on industry's material needs. Opto & Laser Europe. Nr 26
67. Nolte, S. et al., 1997, Ablation of metals by ultrashort laser pulses. J. Opt. Soc. Am B; Vol. 14, No. 10, p. 2716-2722
68. Strickland, D. and G. Mourou, 1985, Compression of amplified chirped optical pulses. Opt. Comm., 56, 219.
69. LUbatschowski, H. et al., 2002. Ultrafast Laser Pulses for Medical Applications. Proceedings of SPIE, LA 4633-07, (in press)
70. Momma, C., U. Knoop, S. Nolte, 1999, Laser cutting of slotted tube coronary stents. State of the art and future developments; Biomedical research, p. 39-44
71. Peters, J., et. al. Contribution of CIRP to the development of metrology and surface quality evaluation during the last fifty years, Annals of the CIRP Vol. 50/2/2001, pp 471-489.
72. Merchant, M.E., 1971, Delphi forecast of future production engineering, Annals of the CIRP, 20/2/1971, p. 205-213.
73. McKeown, P.A., 1987. The role of the precision engineering in manufacturing of the future. Annals of the CIRP, 36/2/1987, p 495-502.
74. Moore, G.E., 1965, Cramming more components onto integrated circuits, Electronics 38, p 114-117.
75. Moore, G.E., 1975, Progress digital integrated electronics, IEDM Techn. Digest, Washington. p11-13.
76. The national Technology Roadmap for Semiconductors, 1994, (Semiconductor Industry Association San Jose, Calif.).
77. Taniguchi, N. 1983. Current status in, and future trends of, ultra precision machining and ultra fine materials processing. Annals of the CIRP Vol. 32/2/1983 p573-580.
78. Corbett, J., P.A. McKeown, G.N. Peggs, R. Whatmore, 2000, Nanotechnology: International developments and emerging products. Annals of the CIRP, Vol. 49/2/2000, p. 523-545.