Microelectro discharge machining as a technology in micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2879, Issue , 1996, Pages 332-337

  Ehrfeld, Wolfgang ^a   Lehr, Heinz ^a   Michel, Frank ^a   Wolf, Andrej ^a   Gruber, Hans Peter ^a   Bertholds, Axel ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRO DISCHARGE MACHINING; MICROFABRICATION; MICROREACTORS;

ELECTRIC DISCHARGES; FABRICATION; INJECTION MOLDING; MANUFACTURE; MECHANICAL PROPERTIES; OPTIMIZATION; SEMICONDUCTING SILICON; STAINLESS STEEL; TECHNOLOGY; TITANIUM;

MICROMACHINING;

EID: 0030405950     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)