Micro electrochemical machining of 3D micro structure using dilute sulfuric acid

CIRP Annals - Manufacturing Technology

Volumn 54, Issue 1, 2005, Pages 191-194

  Kim, B H ^a   Na, C W ^a   Lee, Y S ^a   Choi, D K ^b   Chi, C N ^a  

^a Seoul National University   (South Korea)

^b Gangneung Wonju National University   (South Korea)

Author keywords

Electro chemical machining (ECM); Electrode; Micro machining

Indexed keywords

CONCENTRATION (PROCESS); ELECTRODES; ELECTROLYTES; MICROMACHINING; MICROSTRUCTURE; POLISHING; STAINLESS STEEL; SULFURIC ACID;

AISI 300 STAINLESS STEELS; ELECTRICAL DISCHARGE MACHINING (EDM); ELECTRO CHEMICAL MACHINING (ECM); MULTIPLE ELECTRODES;

MICROELECTROMECHANICAL DEVICES;

EID: 21944450335     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60081-X     Document Type: Article

References (7)

1. Cagnon, L., Kirchner, V., Kock, M., Schuster, R., Ertl, G., Gmelin, W. T., Kuck, H., 2003, Electrochemical Micromachining of Stainless Steel by Ultra Short Voltage Pulses, Z. Phys. Chem., 217:299-313.
2. Yu, Z. Y., Masuzawa, T., Fujino, M., 1998, Micro-EDM for Three-Dimensional Cavities -Development of Uniform Wear Method-, Annals of the CIRP, 47/1:169-172.
3. Kock, M., Kirchner, V., Schuster, R., 2003, Electrochemical Micromachining with Ultrashort Voltage Pulses - a Versatile Method with Lithographical Precision, Electrochim. Acta, 48:3213-3219.
4. Ahn, S. H., Ryu, S. H., Choi, D. K., Chu, C. N., 2004, Electrochemical Micro Drilling Using Ultra Short Pulses, Prec. Eng., 28/2:129-134.
5. Kim, B. H., Ryu, S. H., Choi, D. K., Chu, C. N., 2005, Micro Electrochemical Milling, J. Micromech. Microeng., 15/1:124-129.
6. Bard, A. J., Faulkner, L. R., 2001, Electrochemical Methods, Fundamentals and Applications, John Wiley and Sons, New York.
7. Kirchner, V., 2002, Electrochemical Microstructuring with Ultrashort Voltage Pulses, Ph.D thesis, Freie Universität Berlin.