The advancement of SPM-based nanolithography

Materials Science Forum

Volumn 471-472, Issue , 2004, Pages 353-357

  Zhang, L B ^a   Shi, J X ^a   Yuan, J L ^a   Ji, S M ^a   Chang, M ^a  

^a ZHEJIANG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Lithography; Nanofabrication; Nanolithography; SPL; SPM

Indexed keywords

ATOMIC FORCE MICROSCOPY; MACHINING; PHOTOLITHOGRAPHY; SCANNING TUNNELING MICROSCOPY; SELF ASSEMBLY; THERMAL CONDUCTIVITY; ULTRAHIGH VACUUM;

NANOGRAFTING; SCANNING PROBE LITHOGRAPHY (SPL); SCANNING PROBE MICROSCOPY (SPM); TUNNELING CURRENT;

NANOTECHNOLOGY;

EID: 17044411819     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.471-472.353     Document Type: Conference Paper

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