A novel spark erosion technique for the fabrication of high aspect ratio micro-grooves

Microsystem Technologies

Volumn 10, Issue 8-9, 2004, Pages 628-632

  Murali, M ^a   Yeo, S H ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO ELECTRICAL DISCHARGE MACHINING (MICRO EDM); MICROFABRICATION TECHNIQUES; MICROSYSTEM TECHNOLOGY (MST); SPARK EROSION;

COMPUTATIONAL METHODS; DIFFRACTION GRATINGS; ELECTRIC DISCHARGE MACHINING; FABRICATION; KINETIC ENERGY; SILICON; SPARK CHAMBERS;

MICROMACHINING;

EID: 9644282018     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0341-8     Document Type: Article

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