High aspect ratio and complex shaped blind micro holes by micro EDM

CIRP Annals - Manufacturing Technology

Volumn 51, Issue 1, 2002, Pages 359-362

  Yu, Z Y ^a   Rajurkar, K P ^a   Shen, H ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

EDM; Micro machining; Performance

Indexed keywords

ASPECT RATIO; ELECTRODES; MICROELECTROMECHANICAL DEVICES; PHYSICAL VAPOR DEPOSITION;

MICRO HOLES;

ELECTRIC DISCHARGE MACHINING;

EID: 0037501237     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)61536-4     Document Type: Article

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