Localized electrochemical micromachining with gap control

Sensors and Actuators, A: Physical

Volumn 108, Issue 1-3, 2003, Pages 144-148

  Yong, Li ^a   Yunfei, Zheng ^a   Guang, Yang ^a   Liangqiang, Peng ^b  

^a TSINGHUA UNIVERSITY   (China)

^b Institute of Technology Policy and Management Science   (China)

Author keywords

Electrochemical micromachining; Gap control; Pulsed current; Side insulated electrode

Indexed keywords

ANODES; CATHODES; CHEMICAL VAPOR DEPOSITION; ELECTRIC CURRENTS; ELECTROCHEMISTRY; MICROELECTRODES; SCANNING;

ELECTROCHEMICAL MICROMACHINING; GAP CONTROL;

MICROMACHINING;

EID: 0345376779     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00371-6     Document Type: Conference Paper

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