Atomic force microscope as a tool for nanometer scale surface patterning

2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings

Volumn , Issue , 2005, Pages 719-721

  Lemeshko, S ^a   Saunin, S ^a   Shevyakov, V ^b  

^a Nanotechnology Instruments Europe B V   (Netherlands)

^b NATIONAL RESEARCH UNIVERSITY OF ELECTRONIC TECHNOLOGY   (Russian Federation)

Author keywords

AFM; Anodic; Nanolithography; Oxidation

Indexed keywords

ATOMIC FORCE MICROSCOPY; GROWTH (MATERIALS); NANOTECHNOLOGY; OXIDATION; SCANNING ELECTRON MICROSCOPY; TRANSISTORS;

AFM; ANODIC; BIASED SURFACES; MICRON LEVEL;

SURFACE TREATMENT;

EID: 32144452600     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. E. Dubois and J. L. Bubbendorff, Solid-State Electron. 43, 1085, 1999.
2. D. Saluel, J. Daval, B. Bechevet, C. Germain and B. Valon, J. Magn. Mater. 193, 488, 1999.
3. R. Workman, C. Peterson and D. Sarid, Surf. Sci. 423, L277, 1999.
4. K. Matsumoto, Physica B 227, 92, 1996.
5. J. Dagata, J. Schneir, H. Harray, C. Evans, M. Postek and J. Bennett, Appl. Phys. Lett. 56, 2001, 1990.
6. R. Held, T. Heinzel, P. Studerus and K. Ensslin, Physica E 2, 748, 1998.
7. J. Dagata, F. Perez-Murano, G. Abadal, K. Morimoto, T. Inoue, J. Itoh and H. Yokoyama, Appl. Phys. Lett. 76, 2710, 2000.
8. R. Boxman and S. Goldsmith, IEEE Trans. Plasma Sci. 17, 705, 1989.
9. V. Shevyakov, S. Lemeshko and V. Roschin, Nanotechnology 9, 352, 1998.
10. S Lemeshko, S Gavrilov, V Shevyakov, V Roschin and R Solomatenko, Nanotechnology 12, 273, 2001.