A CAD tool for the design and manufacturing of freeform micro-EDM electrodes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue , 2002, Pages 105-113

  Meeusen, W ^a   Reynaerts, Dominiek ^a   Van Brussel, H ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Feature based CAD CAM for MEMS; Micro EDM

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER AIDED MANUFACTURING; ELECTRIC DISCHARGE MACHINING; MICROELECTRODES; MICROSTRUCTURE; WEAR OF MATERIALS;

MICROSYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 2942557248     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.462800     Document Type: Conference Paper

References (8)

1. Silicon bulk micromachining by micro-EDM milling with electrode compensation
2. Micro-EDM
3. Investigations on electrode wear in micro-EDM
4. A review on micro-electro discharge machining of metal and silicon
5. Micro-EDM for three-dimensional cavities - Development of uniform wear method