Manufacturing of micro electrodes using ultra sonic aided electrochemical machining

DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Volumn , Issue , 2003, Pages 399-401

  Wang, Feng Tsai ^a   Hsu, Chen Siang ^a   Shyu, R F ^a   Ho, C T ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

Anodes; Copper; Design engineering; Electrochemical machining; Electrochemical processes; Electrodes; Manufacturing; Materials science and technology; Micromechanical devices; Wire

Indexed keywords

EID: 84945947006     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2003.1287076     Document Type: Conference Paper

References (7)

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