메뉴 건너뛰기




Volumn , Issue , 2009, Pages 207-268

Dynamic SIMS

Author keywords

Areas and methods of application; Dynamic secondary ion mass (SIM) spectrometry; Instrumentation; Novel approaches; Quantification of data; SIMS powerful mass spectrometric technique

Indexed keywords


EID: 84890613168     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9780470721582.ch5     Document Type: Chapter
Times cited : (23)

References (234)
  • 1
    • 0003776074 scopus 로고
    • Secondary Ion Mass Spectrometry
    • John Wiley & Sons, Inc., New York, NY
    • A. Benninghoven, F.G. Rudenauer and H.W. Werner, Secondary Ion Mass Spectrometry, John Wiley & Sons, Inc., New York, NY, p. 671 (1987).
    • (1987) , pp. 671
    • Benninghoven, A.1    Rudenauer, F.G.2    Werner, H.W.3
  • 2
    • 84935921540 scopus 로고
    • Applied Charged Particle Optics
    • in, Advances in Electronics and Electron Physics, Supplement 13B, Ed. A. Septier Academic Press, New York, NY
    • G. Slodzian, in Applied Charged Particle Optics, Advances in Electronics and Electron Physics, Supplement 13B, Ed. A. Septier Academic Press, New York, NY, p. 1 (1980).
    • (1980) , pp. 1
    • Slodzian, G.1
  • 26
    • 0039652901 scopus 로고
    • Thin Film and Depth Profile Analysis
    • in, Topics in Current Physics, H. Oechsner (Ed.), Springer-Verlag, Berlin
    • H. Oechsner, in Thin Film and Depth Profile Analysis, Topics in Current Physics, H. Oechsner (Ed.), Springer-Verlag, Berlin, p. 63 (1983).
    • (1983) , pp. 63
    • Oechsner, H.1
  • 28
    • 84890660756 scopus 로고
    • Proceedings of the 1st International Conference on Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors
    • in, eds. C. Osburn and G. McGuire, Microelectronics Centre of North Carolina, Research Triangle Park, NC
    • S.W. Downey, A.B Emerson and R.F. Kopf, in Proceedings of the 1st International Conference on Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors, eds. C. Osburn and G. McGuire, Microelectronics Centre of North Carolina, Research Triangle Park, NC, p. 172 (1991).
    • (1991) , pp. 172
    • Downey, S.W.1    Emerson, A.B.2    Kopf, R.F.3
  • 33
    • 84890598098 scopus 로고
    • Proceedings of SIMS VI
    • in, John Wiley & Sons, Ltd, Chichester, UK
    • G. Slodzian, in Proceedings of SIMS VI, John Wiley & Sons, Ltd, Chichester, UK, p. 3 (1988).
    • (1988) , pp. 3
    • Slodzian, G.1
  • 47
    • 84890673561 scopus 로고
    • Proceedings of SIMS V
    • in, Springer-Verlag, Berlin
    • R.T. Lareau and P. Williams, in Proceedings of SIMS V, p. 7, Springer-Verlag, Berlin (1986).
    • (1986) , pp. 7
    • Lareau, R.T.1    Williams, P.2
  • 48
    • 84890573864 scopus 로고
    • Proceedings of SIMS V
    • in, Springer-Verlag, Berlin
    • R.L. Hervig and P. Williams, in Proceedings of SIMS V, p. 152, Springer-Verlag, Berlin (1986).
    • (1986) , pp. 152
    • Hervig, R.L.1    Williams, P.2
  • 65
    • 84953025797 scopus 로고
    • Proceedings of SIMS VII
    • in, John Wiley & Sons, Inc., New York, NY
    • R. Treichler, H. Cerva, W. Hosler and R. v. Criegern, in Proceedings of SIMS VII, John Wiley & Sons, Inc., New York, NY, pp. 259 and 262 (1990).
    • (1990)
    • Treichler, R.1    Cerva, H.2    Hosler, W.3    Criegern, R.V.4
  • 66
    • 84890737006 scopus 로고
    • Presented at SIMS V (Abstract only)
    • R. v. Criegern, Presented at SIMS V (Abstract only) (1986).
    • (1986)
    • Criegern, R.V.1
  • 72
    • 84951220236 scopus 로고
    • Proceedings of SIMS V
    • in, Springer-Verlag, Berlin
    • W. Vandervorst and J. Remmerie, in Proceedings of SIMS V, Springer-Verlag, Berlin, p. 288 (1986).
    • (1986) , pp. 288
    • Vandervorst, W.1    Remmerie, J.2
  • 75
    • 0002434395 scopus 로고    scopus 로고
    • Proceedings of SIMS XII
    • in, Elsevier, Amsterdam
    • M.G. Dowsett, S.B. Patel and G.A. Cooke, in Proceedings of SIMS XII, Elsevier, Amsterdam, p. 85 (2000).
    • (2000) , pp. 85
    • Dowsett, M.G.1    Patel, S.B.2    Cooke, G.A.3
  • 99
    • 84890584590 scopus 로고
    • Proceedings of SIMS V
    • in, Springer-Verlag, Berlin
    • J.B. Clegg, in Proceedings of SIMS V, Springer-Verlag, Berlin, p. 112 (1985).
    • (1985) , pp. 112
    • Clegg, J.B.1
  • 101
    • 0001990130 scopus 로고
    • Proceedings of SIMS V
    • in, Springer-Verlag, Berlin
    • H.N. Migeon, C. Le Pipec and J.J. Le Goux, in Proceedings of SIMS V, Springer-Verlag, Berlin, p. 155 (1985).
    • (1985) , pp. 155
    • Migeon, H.N.1    Le Pipec, C.2    Le Goux, J.J.3
  • 103
    • 84951340235 scopus 로고
    • SIMS
    • in, National Bureau of Standards, Special Publication 427, J. Heinrich and D.E. Newbury (Eds), National Bureau of Standards, Washington, DC
    • J.A. McHugh, in SIMS, National Bureau of Standards, Special Publication 427, J. Heinrich and D.E. Newbury (Eds), National Bureau of Standards, Washington, DC, p. 179 (1975).
    • (1975) , pp. 179
    • McHugh, J.A.1
  • 119
    • 0040688232 scopus 로고
    • Proceedings of SIMS VI
    • in, John Wiley & Sons, Ltd, Chichester, UK
    • M.G. Dowsett, E.A. Clark, M.H. Lewis and D.J. Godfrey, in Proceedings of SIMS VI, John Wiley & Sons, Ltd, Chichester, UK, p. 725 (1987).
    • (1987) , pp. 725
    • Dowsett, M.G.1    Clark, E.A.2    Lewis, M.H.3    Godfrey, D.J.4
  • 121
    • 84890727547 scopus 로고
    • Proceedings of SIMS V
    • in, Springer-Verlag, Berlin
    • G.D.T. Spiller and J.R. Davis, in Proceedings of SIMS V, Springer-Verlag, Berlin, p. 334 (1986).
    • (1986) , pp. 334
    • Spiller, G.D.T.1    Davis, J.R.2
  • 123
    • 84890710935 scopus 로고
    • Proceedings of SIMS V
    • in, Springer-Verlag, Berlin
    • M.G. Dowsett, E.H.C. Parker and D.S. McPhail, in Proceedings of SIMS V, Springer-Verlag, Berlin, p. 340 (1986).
    • (1986) , pp. 340
    • Dowsett, M.G.1    Parker, E.H.C.2    McPhail, D.S.3
  • 127
  • 128
    • 84890660756 scopus 로고
    • Proceedings of the 1st International Conference on Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors
    • in, eds. C Osburn and G McGuire Microelectronics Centre of North Carolina, Research Triangle Park, NC
    • S W Downey, A B Emerson and R F Kopf, in Proceedings of the 1st International Conference on Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors, eds. C Osburn and G McGuire Microelectronics Centre of North Carolina, Research Triangle Park, NC, p. 172 (1991).
    • (1991) , pp. 172
    • Downey, S.W.1    Emerson, A.B.2    Kopf, R.F.3
  • 130
    • 0000915147 scopus 로고
    • (see also K. Wittmaack, Journal of Applied Physics, 52, 527 (1981) and the following).
    • V.R. Deline, C.A. Evans Jr and P. Williams, Applied Physics Letters, 33, 832 (1978). (see also K. Wittmaack, Journal of Applied Physics, 52, 527 (1981) and the following).
    • (1978) Applied Physics Letters , vol.33 , pp. 832
    • Deline, V.R.1    Evans Jr., C.A.2    Williams, P.3
  • 145
    • 84890745107 scopus 로고
    • Proceedings of SIMS VI
    • in, John Wiley & Sons, Ltd, Chichester, UK
    • H.S. Fox, M.G. Dowsett and R.F. Houghton, in Proceedings of SIMS VI, John Wiley & Sons, Ltd, Chichester, UK, p. 445 (1988).
    • (1988) , pp. 445
    • Fox, H.S.1    Dowsett, M.G.2    Houghton, R.F.3
  • 155
    • 84890717381 scopus 로고    scopus 로고
    • SIMS X: Proceedings of the 10th International Conference on Secondary Ion Mass Spectrometry
    • (Eds), John Wiley & Sons, Ltd, Chichester, UK
    • A. Benninghoven, B. Hagenoff and H.W. Werner (Eds), SIMS X: Proceedings of the 10th International Conference on Secondary Ion Mass Spectrometry, John Wiley & Sons, Ltd, Chichester, UK (1997).
    • (1997)
    • Benninghoven, A.1    Hagenoff, B.2    Werner, H.W.3
  • 156
    • 0003776069 scopus 로고    scopus 로고
    • SIMS XI: Proceedings of the 11th International Conference on Secondary Ion Mass Spectrometry
    • (Eds), John Wiley & Sons, Ltd, Chichester, UK
    • G. Gillen, R. Lareau, J. Bennett and F. Stevie (Eds), SIMS XI: Proceedings of the 11th International Conference on Secondary Ion Mass Spectrometry, John Wiley & Sons, Ltd, Chichester, UK (1998).
    • (1998)
    • Gillen, G.1    Lareau, R.2    Bennett, J.3    Stevie, F.4
  • 157
    • 84890696964 scopus 로고    scopus 로고
    • SIMS XII: Proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry
    • (Eds), Elsevier, Amsterdam
    • A. Benninghoven, P. Bertrand, H.N. Migeon and H.W. Werner (Eds), SIMS XII: Proceedings of the 12th International Conference on Secondary Ion Mass Spectrometry, Elsevier, Amsterdam (2000).
    • (2000)
    • Benninghoven, A.1    Bertrand, P.2    Migeon, H.N.3    Werner, H.W.4
  • 160
    • 84890575961 scopus 로고    scopus 로고
    • SIMS XV: Proceedings of the Fifteenth International Conference on Secondary Ion Mass Spectrometry, Applied Surface Science
    • (Eds)
    • J.C. Vickerman, I.S. Gilmore, M.G. Dowsett, A. Henderson and A. Benninghoven (Eds), SIMS XV: Proceedings of the Fifteenth International Conference on Secondary Ion Mass Spectrometry, Applied Surface Science, 252 (2006).
    • (2006) , vol.252
    • Vickerman, J.C.1    Gilmore, I.S.2    Dowsett, M.G.3    Henderson, A.4    Benninghoven, A.5
  • 162
    • 84890727547 scopus 로고
    • Proceedings of SIMS V
    • in, Springer-Verlag, Berlin
    • G.D.T. Spiller and T. Ambridge, in Proceedings of SIMS V, Springer-Verlag, Berlin, p. 127 (1986).
    • (1986) , pp. 127
    • Spiller, G.D.T.1    Ambridge, T.2
  • 163
    • 33747174459 scopus 로고
    • Proceedings of SIMS VII
    • in, John Wiley & Sons, Ltd, Chichester, UK
    • E.A. Clark, M.G. Dowsett, H.S. Fox and S.M. Newstead, in Proceedings of SIMS VII, John Wiley & Sons, Ltd, Chichester, UK, p. 627 (1990).
    • (1990) , pp. 627
    • Clark, E.A.1    Dowsett, M.G.2    Fox, H.S.3    Newstead, S.M.4
  • 169
    • 84890573864 scopus 로고
    • Proceedings of SIMS V
    • in, Springer-Verlag, Berlin
    • R.L. Hervig and P. Williams, in Proceedings of SIMS V, Springer-Verlag, Berlin, p. 152 (1986).
    • (1986) , pp. 152
    • Hervig, R.L.1    Williams, P.2
  • 170
    • 84890613288 scopus 로고
    • Proceedings of SIMS VI
    • in, John Wiley & Sons, Ltd, Chichester, UK
    • D.S. Simons, P. Chi, R.G. Downing, J.R. Ehrstein and J.F. Knudsen, in Proceedings of SIMS VI, John Wiley & Sons, Ltd, Chichester, UK, p. 433 (1988).
    • (1988) , pp. 433
    • Simons, D.S.1    Chi, P.2    Downing, R.G.3    Ehrstein, J.R.4    Knudsen, J.F.5
  • 179
    • 0003776069 scopus 로고    scopus 로고
    • Proceedings of SIMS VII
    • in, Monterey, California, A.M. Benninghoven, C.A. Evans, K.D. McKeegan, H.A. Storms and H.W. Werner (Eds), John Wiley and Sons,, (ISBN 0 471 92738 4).
    • D.S. McPhail, M.G. Dowsett, R.A. Kubiak, S.M. Newstead, S. Biswas and S.D. Littlewood, in Proceedings of SIMS VII, Monterey, California, A.M. Benninghoven, C.A. Evans, K.D. McKeegan, H.A. Storms and H.W. Werner (Eds), John Wiley and Sons, p. 103 (1990) (ISBN 0 471 92738 4).
    • (1990) , pp. 103
    • McPhail, D.S.1    Dowsett, M.G.2    Kubiak, R.A.3    Newstead, S.M.4    Biswas, S.5    Littlewood, S.D.6
  • 183
    • 84890613288 scopus 로고
    • Proceedings of SIMS VI
    • in, John Wiley & Sons, Ltd, Chichester, UK
    • D.S. Simons, P. Chi, R.G. Downing, J.R. Ehrstein and J.F. Knudsen, in Proceedings of SIMS VI, John Wiley & Sons, Ltd, Chichester, UK, p. 433 (1988).
    • (1988) , pp. 433
    • Simons, D.S.1    Chi, P.2    Downing, R.G.3    Ehrstein, J.R.4    Knudsen, J.F.5
  • 201
    • 84950586031 scopus 로고
    • Proceedings of SIMS VI
    • in, John Wiley & Sons, Ltd, Chichester, UK
    • D.S. McPhail and M.G. Dowsett, in Proceedings of SIMS VI, John Wiley & Sons, Ltd, Chichester, UK, p. 269 (1988).
    • (1988) , pp. 269
    • McPhail, D.S.1    Dowsett, M.G.2
  • 202
    • 84890752773 scopus 로고
    • Proceedings of SIMS VII
    • in, John Wiley & Sons, Ltd, Chichester, UK
    • G. Horcher, A. Forchel, S. Bayer, H. Nickel, W. Schlapp and R. Losch, in Proceedings of SIMS VII, John Wiley & Sons, Ltd, Chichester, UK, p. 631 (1990).
    • (1990) , pp. 631
    • Horcher, G.1    Forchel, A.2    Bayer, S.3    Nickel, H.4    Schlapp, W.5    Losch, R.6
  • 213
    • 84890689985 scopus 로고
    • Proceedings of SIMS VI
    • in, John Wiley & Sons, Ltd, Chichester, UK
    • R.T. Lareau, in Proceedings of SIMS VI, John Wiley & Sons, Ltd, Chichester, UK, p. 437 (1988).
    • (1988) , pp. 437
    • Lareau, R.T.1
  • 216
    • 84890649750 scopus 로고
    • Proceedings of the 1st International Conference on Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors
    • in, C. Osburn and G. McGuire (Eds), Microelectronics Centre of North Carolina, Research Triangle Park, NC
    • M.G. Dowsett and G.A. Cooke, in Proceedings of the 1st International Conference on Measurement and Characterization of Ultra Shallow Doping Profiles in Semiconductors, C. Osburn and G. McGuire (Eds), Microelectronics Centre of North Carolina, Research Triangle Park, NC, p. 116 (1991).
    • (1991) , pp. 116
    • Dowsett, M.G.1    Cooke, G.A.2
  • 223
    • 84890617217 scopus 로고
    • SIMS VIII: Proceedings of the 8th International Conference on Secondary Ion Mass Spectrometry
    • in, A. Benninghoven, K.F. Janssen, J. Tumpner and H.W. Werner (Eds), John Wiley & Sons, Ltd, Chichester, UK
    • S.P. Thompson, M.G. Dowsett, J.L. Wilkes, N.A. Fairley, C.A. Corlett, J. Nuttall, D. Finbow, B.W. Griffiths, P. Blenkinsop, and S.J. Mullock, in SIMS VIII: Proceedings of the 8th International Conference on Secondary Ion Mass Spectrometry, A. Benninghoven, K.F. Janssen, J. Tumpner and H.W. Werner (Eds), John Wiley & Sons, Ltd, Chichester, UK, p. 183 (1992).
    • (1992) , pp. 183
    • Thompson, S.P.1    Dowsett, M.G.2    Wilkes, J.L.3    Fairley, N.A.4    Corlett, C.A.5    Nuttall, J.6    Finbow, D.7    Griffiths, B.W.8    Blenkinsop, P.9    Mullock, S.J.10
  • 230
    • 84890606800 scopus 로고
    • SIMS VIII: Proceedings of the 8th International Conference on Secondary Ion Mass Spectrometry
    • in, A. Benninghoven, K.F. Janssen, J. Tumpner and H.W. Werner (Eds), John Wiley & Sons, Ltd, Chichester, UK
    • M.G. Dowsett, S.P. Thompson and C.A. Corlett, in SIMS VIII: Proceedings of the 8th International Conference on Secondary Ion Mass Spectrometry, A. Benninghoven, K.F. Janssen, J. Tumpner and H.W. Werner (Eds), John Wiley & Sons, Ltd, Chichester, UK, p. 187 (1992).
    • (1992) , pp. 187
    • Dowsett, M.G.1    Thompson, S.P.2    Corlett, C.A.3
  • 234
    • 84890606800 scopus 로고
    • SIMS VIII: Proceedings of the 8th International Conference on Secondary Ion Mass Spectrometry
    • in, A. Benninghoven, K.F. Janssen, J. Tumpner and H.W. Werner (Eds), John Wiley & Sons, Ltd, Chichester, UK
    • M.G. Dowsett, J.L. Wilkes, N.A. Fairley, A.C. Lovejoy, P.D. Pedrick, S.J. Potter and S.P. Thompson, in SIMS VIII: Proceedings of the 8th International Conference on Secondary Ion Mass Spectrometry, A. Benninghoven, K.F. Janssen, J. Tumpner and H.W. Werner (Eds), John Wiley & Sons, Ltd, Chichester, UK, p. 191 (1992).
    • (1992) , pp. 191
    • Dowsett, M.G.1    Wilkes, J.L.2    Fairley, N.A.3    Lovejoy, A.C.4    Pedrick, P.D.5    Potter, S.J.6    Thompson, S.P.7


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.