Two-dimensional profiling of large tilt angle, low energy boron implanted structure using secondary-ion mass spectrometry

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 348-352

  Cooke, G A ^a   Pearson, P ^b   Gibbons, R ^a   Dowsett, M G ^a   Hill, C ^b  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b GMMT Caswell   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000795738     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588473     Document Type: Article

References (9)

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3. M. G. Dowsett and G. A. Cooke, J. Vac. Sci. Technol. B 10, 353 (1992).
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5. G. A. Cooke, Ph.D. thesis, University of Warwick, United Kingdom, 1992.
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7. S. K. Jones et al., in Proceedings of ESSDERC 93, Grenoble, 13-16 (Editions Frontieres, Paris, 1993).
8. W. Vandervorst and F. R. Shepherd, J. Vac. Sci. Technol. A 5, 313 (1987).
9. M. G. Dowsett, N. S. Smith, A. C. Lovejoy, P. D. Pedrick, and D. H. Richards, Surf. Interface Anal. (to be published).