Correction for the loss of depth resolution with accurate depth calibration when profiling with Cs + at angles of incidence above 50° to normal

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 260-263

  Kelly, J H ^a   Dowsett, M G ^a   Augustus, P ^b   Beanland, R ^b  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b Marconi Caswell Ltd   (United Kingdom)

Author keywords

ATOMIKA 4500; Depth calibration; Resolution; SIMS; Trapezoidal projection

Indexed keywords

CALIBRATION; DETERIORATION; POSITIVE IONS; SECONDARY ION MASS SPECTROMETRY;

DEPTH RESOLUTION;

CESIUM;

EID: 12244292654     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00639-6     Document Type: Conference Paper

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