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Volumn 231-232, Issue , 2004, Pages 179-182
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Depth profiling studies of multilayer films with a C 60 + ion source
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Author keywords
C 60 + cluster source; Depth profiling; Langmuir Blodgett film; TOF SIMS
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Indexed keywords
BARIUM;
CARBON;
DEPOSITION;
ISOTOPES;
LANGMUIR BLODGETT FILMS;
NANOTECHNOLOGY;
SECONDARY ION MASS SPECTROMETRY;
SPUTTERING;
CLUSTER SOURCES;
DEPTH PROFILING;
NEUTRAL ATOMS;
ORGANIC FILMS;
MULTILAYERS;
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EID: 2942623952
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2004.03.111 Document Type: Conference Paper |
Times cited : (51)
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References (10)
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